US3852605A

US3852605A - Control circuitry for preventing damage to the target of a scanning x-ray generator

Info

Publication number: US3852605A
Application number: US00427071A
Authority: US
Inventors: E Watanabe; E Kato; K Nakamura; T Fujii; T Shimomura; T Ito
Original assignee: Jeol Ltd
Current assignee: Jeol Ltd
Priority date: 1972-12-27
Filing date: 1973-12-21
Publication date: 1974-12-03
Anticipated expiration: 1991-12-03
Also published as: DE2364142C3; FR2212739B1; DE2364142B2; FR2212739A1; JPS5318318B2; JPS4990086A; GB1444109A; DE2364142A1

Abstract

An electron beam scans a target for creating a scanning X-ray beam. The rate of travel of the electron beam is detected as an electrical signal and in response to this signal, the electron beam or condenser lens currents, or the deflection coil voltage are controlled to prevent damage to the target.

Description

United States Patent [191 Watanabe et al.

[ CONTROL CIRCUITRY FOR PREVENTING DAMAGE TO THE TARGET OF A SCANNING X-RAY GENERATOR Inventors: Eiji Watanabe; Eizo Kato; Takayuki Shimomura; Takashi Ito; Koichiro Nakamura; Tadashi Fujii, all of Tokyo, Japan Nihon Denshi Kabushiki Kaisha, Akishima-shi, Tokyo, Japan Filed: Dec. 21, 1973 Appl. No.: 427,071

us. Cl 250/401, 250/402, 250/405, 250/414, 328/9 Int. Cl H05g 1/54 [451 Dec. 3, 1974 [58] Field of Search... 250/347, 348, 353, 401-403, 250/405, 408, 409, 414, 416; 328/9, 8

[56] References Cited UNITED STATES PATENTS 3,746,862 7/1973 Lombardo ct al. 250/409 3,783,287 l/l974 Fulton ct al. 250/409 X Primary Examiner-Paul L. Gensler Attorney, Agent, or F irm-Webb, Burden, Robinson & Webb 5 7 ABSTRACT An electron beam scans a target for creating a scanning X-ray beam. The rate of travel of the electron beam is detected as an electrical signal and in response to this signal, the electron beam or condenser lens currents, or the deflection coil voltage are controlled to prevent damage to the target.

10 Claims, 7 Drawing Figures IE E AMP!

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19 Y 1 WAVE- f1 AHPL/Tl/DE J5 I DETECT OR I M04 T/PL/ER m I FREQUENCY 1 L\- 1 v I DETECTOR I m j e i BIAS I 5 Pall/ER 2 600265 PATENTELBEc 31914 sum u or 4 CONTROL UNIT i, H )\|4J a A H k w U m T w T L N A? 2 9 m m 3 2 v X M k V N E T L I 2w M 5 Wm W A M2 g 2 a WAD s As 6 l 5 v I N f 1 .J r Elm 4 \\/.U k w WAE $1) 2 CONTROL CIRCUITRY FOR PREVENTING DAMAGE TO THE TARGET OF A SCANNING X-RAY GENERATOR This invention relates to an X-ray generating apparatus, particularly an X-ray generating apparatus in which the electron beam continuously or flying spot scans an X-ray generating target. I

In recent years, continuous or flying spot scanning type X-ray generating apparatus have been developed in which X-rays are generated by the impact of the accelerated electron beam on the target. The X-rays thus generated are passed through a pinhole so as to form an in-line small diameter X-ray beam. The electron beam irradiating the target is continuously or flying spot scanned. Accordingly, as the X-ray generating position on the target varies with time, the direction of the X-ray passing through said pinhole also varies. If the X-ray thus obtained is made to irradiate an object and the X-ray transmitted through said object is detected, and the detected signal supplied to a cathode ray tube synchronized with the electron beam of the X-ray generator or the like, it is possible to'obtain a transmission X-ray image based on the continuous or flying spot scanning X-ray.

In the X-ray generating apparatus as described above, since it is impossible to irradiate a small area of the target with a high acceleration, high density electron beam, the intensity of the generated X-ray is weak. Accordingly, the resolution and contrast of the transmission X-ray image are poor; moreover, since the number of frames per second is limited, good pictures cannot be obtained.

If we now consider the relation between the power of the electron beam irradiating the target andthe resultant X-ray generation, the X-ray intensity vx is given as follows,

vx K V P Where, V is the'accelerating voltage, P is the power of incident electron beam, and K is a constant. As apparent from the formula, to obtain an X -ray beam of strong intensity, the power of the incident electron beam and the related acceleratingvoltage must be increased. However, in the static state the electrical power of the electron beam irradiating 'a given area of the target is limited as shown in the following formula.

Wmax 17.8 (Tm-T) a K Where, Wmax is the maximum allowable target load,

g 2 target, C is the specific heat (Cal/g" C) of the material constituting the target, and V is the travel rate of the target (cm/sec).

The formula shows that, by increasing the target travel rate, the target input power and the X-ray beam intensity are also increased. For example, if a copper target is used, the diameter of the electron beam is 1mm and the travel rate of the target is 2,000cm/sec, thus allowing an input power 10 times larger than that in the static state.

Regarding the point stated above, the conventional X-ray generating apparatus is designed to give a fairly strong X-ray beam by using a rotating target. However, in the case of a continuous or flying spot type scanning X-ray generating apparatus, since the diameter of the electron beam on the target is sometimes very small (in the order of several to several tens of microns) and moreover, since the electron beam remains at a fixed position for a specific period, if the. rotating target referred to above is used, even a minute vibration of the target will adversely effect the X-ray picture displayed on the C. R. T., etc.

In continuous or flying spot type scanning X-ray generating devices, the electron beam is usually deflected by a deflection means and then continuously or flying spot scanned over the target. Moreover, with this type of device, it is theoretically possible to increase the electron beam current according to the increase in scanning speed and thus generate a strong X-ray beam. The contingency to be considered is that for some reason or other,.the rate of travel of the electron beam irradiating the target might be reduced or the beam might come to a complete standstill. The heat generated when the electron beam current exceeds a certain limit is sufficient tocause the target to evaporate. I

An object of this invention is to provide a continuous or flying spot type scanning X-ray generating apparatus capable of generating an extremely strong X-ray beam.

Another object of this invention is to provide a continuous' or flying spottype scanning 'X-ray generating apparatus capable of preventing the target from being damaged.

Briefly according to this invention, a continuous or flying spot type scanning X-ray generating apparatus has incorporated means for detecting the continuous or flying spot scanning speed of the electron beam and for controlling the beam according to said scanning speed.

The scanning speed may be obtained by measuring the distance travelled by the electron beam over the target I per unit time, said distance corresponding to the wave Tm is the melting point (C) of the material constitutstate only; if the target is moved at high speed, the heat distribution over the target will vary, so that the maximum allowable load Wmax becomes as follows.

Where, p is the density of the material constituting the amplitude of the deflection signal. Moreover, the travelling time of the electron beam is made availableby detecting the continuous or flying spot scanning signal line or step number in terms of frequency. As a result, if the product of the amplitude and frequency of said deflection signal is obtained, the travelling speed of the electron beam irradiating the target will be detected. In one embodiment of this invention, the deflection signal is supplied to a wave-amplitude detector and a frequency detector and the two different output signals from these detectors are supplied to a multiplier circuit so as to obtain the product of both signals. However, it is not absolutely necessary to detect both the waveamplitude andfrequency of the deflection signal. For

example, by keeping one parameter constant and varying the other, and by detecting the varied parameter only, the travelling speed of the electron beam on the target can be ascertained.

The advantages of this invention will become more readily apparent by reading the following detailed description in conjunction with the accompanying drawings of which,

FIG. 1 is a block diagram showing one embodiment of this invention, and

FIGS. 2 to 7 are block diagrams showing other embodiments of this invention.

Referring to FIG. 1, an X-ray generating device 1 has at one end an electron gun comprised of a filament 2 and a Wehnelt electrode 3. The electron'beam generated by said electron gun is accelerated by an anode 4 and focussed by first and

second condenser lenses

5 and 6 on an X-ray generating target 7. Said condenser lenses are energized by an scintillation power source 9,

which is controlled by signal from a control unit 8. Electron

beam deflection coils

10 and 11 are provided between said

condenser lenses

5 and 6, said deflection coils being supplied with deflecting signals by the control unit 8 via an amplifier 12. By means of scintillation electron beam irradiation on said target, an X-ray is generated from said target which passes through a pinhole 14 via a transmission window 13 in order to irradia'te an externally located objectlS. The X-ray transmitted through said object 15 then enters an X-ray detector. 16 such as a scintallation detector. where it is detected. The signal detected by the X-ray detector 16, after being amplified by an amplifier 17, is fed into a cathode ray tube 18 to which synchronizing deflection signals are applied from the control unit 8.

In the embodiment as described above, the: electron beam generated by the electron gun forming part of the X-ray generating tube 1 is finely focussed on the target 7 by

condenser lenses

5 and 6 and deflected by deflection coils l0 and 11. Accordingly, said electron beam continuously or flying spot scans the target in accordance with the deflection signal supplied to said deflection coils. As a result, the X-ray generating position of the target varies with time and since the direction of projection of the X-rays passing through the pinhole 14 varies in accordance with the irradiating position of the electron beam on said target, the object 15 is continuously or flying spot scanned by a beam of X -rays and a continuous or flying spot X-ray transmission image of said object is thereby displayed on the cathode ray tube 18. 1

The deflecting signal supplied to the deflection coils by the amplifier 12 is also supplied to a wave-amplitude the distance travelled by the electron beam over the target and the step number or'flying spot number corre sponds to the travelling time of said electron beam over said target. Accordingly, the product of the two different signals corresponds to the mean velocity of the electron beam on the target, and the signal corresponding to said velocity is supplied to the electron gun bias power source'22from the multiplier 21. The bias voltage applied between the filament 2 and the Wehnelt electrode 3 from said bias power source 22 varies in ac- As a result, when the travelling speed of the electron beam on the target 7 is high, the electron beam current increases and the density of the electron beam increases, thereby increasing the intensity of the X-ray beam generated by said target/On the other hand, when the speed of the electron beam on the target is decreased by the deflection signal supplied to the deflection coils 10 and 11 by the control unit 8, the electron gun bias voltage is increased by the signal supplied to the bias power source 22 by the multiplier 21, thereby decreasing the density of said electron beam.

In this embodiment, it is possible to vary the focal length of the condenser lenses so as to control the spot It is also possible to use the output signal of said multiplier 21 in order to control the electron gun filament heating temperature. 1

FIG. 2 shows another embodiment of this invention in which electron beam emission is suspended when the scanning speed of the electron beam on the target drops below a certain predetermined value. This is achieved by providing a comparison circuit 23, a standard signal generator 24 and a control signal generator such as a pulse generator 25. The output signal from the multiplier 21 is fed into the comparison circuit 23 together with a standard signal from the standard signal generator 24 and compared. By so doing, when the intensity of the signal from the multiplier drops below the I intensity of the standard signal, a pulse signal is generated by the pulse generator 25. This pulsesignal is then supplied to the electron gun power source 22 which causes an increase in the bias voltage between the filament 2 and the Wehnelt electrode 3, thereby terminating'the outflow of electrons from the electron gun. As a result, even if there is a drop in the scanning speed of the electron beam on the target,darnage to the target is prevented.

FIGS. 3, 4 and 5 show variations of the'general concept exemplified in the embodiment shown in FIG. 2.

In FIG. 3, a signal from the pulse generator 25 is supplied to the power source 27 of a rapid response, air cored or electrostatic auxiliary lens 26. By so doing, the power source 27 is switched-on and current or voltage is supplied to said auxiliary lens 26. As a result, the spot diameter of the electron beam irradiating the target is instantaneously enlarged and the beam density is consequently reduced. I

In FIG. 4, an electrostatic or electromagnetic deflection means 28 is arranged between the condenser lens means will operate to shift or deflect the electron beam over the surface of the target at high speed. In this case, it would be a good idea to deflect the beam so as to irra# diate a portion of the target surface where the generated X-rays are unable to reach the object.

In FIG. 5, the deflecting means 28 functions so as to deflect the electron beam to an extent such that it ceases to irradiate the target 7. In this case, the power source 30 activated by a pulse from the pulse generator 25 supplies a constant DC. voltage to said deflecting means. In addition, a secondary or auxiliary target 31 has been provided to prevent the inner wall of the X-ray generating device 1 from becoming pitted due to repeated electron beam impingement.

The embodiment shown in FIG. 6 is a modified version of the embodiment shown in FIG. 1 and is ideally suited when scanning the electron beam continuously. In the figure, 32 is a differential circuit which is connected to the output of the deflection signal amplifier I2 and which serves to detect the rate of variation of the deflection signal. The signal from said differential circuit is supplied to the control unit 33 to control the bias power source 22, the condenser lens excitation power source 9 and/or the filament heating power source. In this case, a differential amplifier of simple construction would serve ideally as a control unit.

In the embodiment shown in FIG. 7, only the deflection signal wave-amplitude detector is connected to the output of the amplifier 12. Moreover, a constant signal generating circuit 34 is used in place of frequency de tector. In practice, if the continuous or flying spot scanning signal is generated on the basis of a precise clock pulse, it is not necessary to detect the number of continuously scanned lines or the number of flying spot scanning steps. In this particular case, this embodiment has the advantage that circuit construction is simplified. Also, if the wave amplitude of the deflecting signal is precise, it is possible to provide a constant signal generator in place of the wave-amplitude detector and to connect a frequency detector to the amplifier 12.

Circuit construction can be further simplified by dispensing with the constant signal generating circuit 34 and the multiplier 21 and regulating the detector 19 (or detector output signals. This is possible as the in-,

tensity of the signals generated bythe circuit 34 is con stant.

The embodiments described in FIGS. 6 and 7 can be applied to theembodiments described in FIGS. 2 to 5.

Having thus described the invention with the detail and particularity as required by the Patent Laws what is desired protected by Letters Patent is set forth in the following claims.

We claim:

1. A scanning X-ray generating apparatus comprismg,

a. an electron beam generating source,

b. means for focussing the generated electron beam,

c. a target for generating X-rays by scanning the electron beam thereover,

d. an electron beam deflecting means for scanning the electron beam over said target,

e. a circuit for supplying deflection signals to said electron beam deflecting means.

f. means for obtaining signals indicative of the travelling rate of the electron beam scanning the target by detecting variations of said deflecting signals, and

g. means for controlling the. electron beam in response to said obtained signals to prevent damage to the target.

2. An apparatus as set forth in claim 1 in which the electron beam controlling means modulates the electron generating source so that the electron beam current is increased or decreased in response to said signal indicative of the travelling rate.

3. An apparatus as set forth in claim I in which the electron beam controlling means modulates the electron beam generating source so as to reduce the electron beam current to zero when the travelling rate of the electron beam on the target drops below a certain predetermined value. 1

4. An apparatus as set forth in claim 1 in which the electron beam controlling means modulates an electron beam deflection means so that said travelling rate is increased.

5. An apparatus as set forth in claim 1 in which the electron beam controlling means modulates an electron beam deflection means so that said electron beam deviates from the target area.

6. An apparatus as set forth in claim 1 in which the electron beam controlling means modulates a focussing means so that the spot diameter of said electron beam on said target is varied.

7. An apparatus as set forth in claim 1 in which the means for obtaining signals indicative of the travelling rate of the electron beam scanning said target comprises a means for detecting the frequency of the scanning signals, a means for detecting the wave-amplitude of said signals, and a means for obtaining the product of the output signals from said scanning signal frequency and wave amplitude detecting means.

8; An apparatus as set forth in claim 1 in which the means for obtaining thesignals correspondingto the travelling rate of the electron beam continuously scanning the target is a differential circuit.

9. An apparatus as set forth in claim 1 in which the means for obtaining signals indicative of the travelling rate of the scanning electron beam comprises means for maintaining a constant scanning frequency and means for measuring the scanning wave-amplitude.

10. An apparatus as set forth in claim I in which the means for obtaining signals indicative of the travelling rate of the scanning electron beam comprises means for maintaining thescanning wave-amplitude constant and means for measuring the scanning frequency.

swam STA "as EFA'EENT GFFEQE CEREEFRAEE E QQRREQTWN Patent No. 3, 852, 605 Dated December 3,, 1974 g lnventoflsg Eiji Watanabe et al0 It is certified that error appears in the above-identified patent and that said Letters Patent are hereby corrected as shown below:

Column 3 Line 17 by an scintillationshould read --by an e: :c;'u'ta.i:ion--- Column 3 Line 22 -=-scintillation-- should read --the-=-. Column 3 Line 28 ----scintallation-- should'read --scini:illation--.

Signed and sealed this 18th day of February 1975.

(SEAL) Attest:

- C, MARSHALL DANN RUTH C. MASON Commissioner of Patents Attesting Officer and Trademarks FORM 5 0-1050 (10-69) USCOMM DC scans-P69 U45, GOVERNMENT PRINTING OFFICE 5 1969 0-366-334 I

Claims

1. A scanning X-ray generating apparatus comprising, a. an electron beam generating source, b. means for focussing the generated electron beam, c. a target for generating X-rays by scanning the electron beam thereover, d. an electron beam deflecting means for scanning the electron beam over said target, e. a circuit for supplying deflection signals to said electron beam deflecting means. f. means for obtaining signals indicative of the travelling rate of the electron beam scanning the target by detecting variations of said deflecting signals, and g. means for controlling the electron beam in response to said obtained signals to prevent damage to the target.

3. An apparatus as set forth in claim 1 in which the electron beam controlling means modulates the electron beam generating source so as to reduce the electron beam current to zero when the travelling rate of the electron beam on the target drops below a certain predetermined value.

8. An apparatus as set forth in claim 1 in which the means for obtaining the signals corresponding to the travelling rate of the electron beam continuously scanNing the target is a differential circuit.

10. An apparatus as set forth in claim 1 in which the means for obtaining signals indicative of the travelling rate of the scanning electron beam comprises means for maintaining the scanning wave-amplitude constant and means for measuring the scanning frequency.