CN104901161A - Laser source system based on VCSEL technology - Google Patents

Laser source system based on VCSEL technology Download PDF

Info

Publication number
CN104901161A
CN104901161A CN201510337279.7A CN201510337279A CN104901161A CN 104901161 A CN104901161 A CN 104901161A CN 201510337279 A CN201510337279 A CN 201510337279A CN 104901161 A CN104901161 A CN 104901161A
Authority
CN
China
Prior art keywords
circuit
coil
electron gun
vcsel
laser source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510337279.7A
Other languages
Chinese (zh)
Inventor
王晓丽
刘增水
沈行良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai University of Engineering Science
Original Assignee
Shanghai University of Engineering Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai University of Engineering Science filed Critical Shanghai University of Engineering Science
Priority to CN201510337279.7A priority Critical patent/CN104901161A/en
Publication of CN104901161A publication Critical patent/CN104901161A/en
Pending legal-status Critical Current

Links

Abstract

The invention relates to a laser source system based on the VCSEL technology, comprising an electron gun and VCSEL chip packaging body including an electron gun and a VCSEL chip; a focus coil installed outside the electron gun and VCSEL chip packaging body, and used for refocusing electron beams in the electron gun; a deflection coil installed outside the electron gun and VCSEL chip packaging body, and used for controlling tracks of the electron beams in the electron gun, and controlling the incident orientation of the electron beams on the surface of the VCSEL chip; a microcontroller connected with the electron gun, and used for controlling starting of the electron gun and operation; a scanning control unit respectively in connection with the focus coil and the deflection coil, and used for driving the focus coil and the deflection coil; and a CPU respectively in connection with the microcontroller and the scanning control unit, and used for monitoring operation of a whole system. Compared with the prior art, the laser source system has the advantages of high reliability, long service life, high safety, etc.

Description

A kind of laser source systems based on VCSEL technology
Technical field
The present invention relates to a kind of laser source systems, especially relate to a kind of laser source systems based on VCSEL technology.
Background technology
Laser display is the forth generation Display Technique after white and black displays, colored display, digital high definition display; Laser television is one of its application, laser television technology is the revolution showing field after CRT, liquid crystal, plasma, OLED Display Technique, its color domain coverage ratio in theory can up to more than 90% of human eye gamut range, make display frame more true, be rich in stereovision and penetrating sensation, image sharpness is also along with the raising of color saturation has lifting by a relatively large margin.
VCSEL technical know-how is proposed by Nobel Prize in physics winner Basov in 1964 the earliest, be a Solid State Laser source kind with very large potentiality, have that the angle of divergence is little, without speckle, space is incoherent, brightness is high, light utilization efficiency is high, spectral band is from infrared to features such as deep ultraviolets.Also be hopeful to be used widely in optical-fibre communications, laser printing, gas detect, HIGH-DENSITY OPTICAL STORAGE.But how VCSEL technology is applied to lasing light emitter, and becomes the technical problem being instantly badly in need of solving.
Summary of the invention
Object of the present invention be exactly provide that a kind of reliability is high to overcome defect that above-mentioned prior art exists, long service life, the laser source systems based on VCSEL technology that fail safe is good, easy to operate.
Object of the present invention can be achieved through the following technical solutions:
Based on a laser source systems for VCSEL technology, it is characterized in that, comprising:
Electron gun and VCSEL chip packing-body, comprise electron gun and VCSEL chip;
Focusing coil, is arranged on electron gun and VCSEL chip package external body, for carrying out refocusing to the electron beam in electron gun;
Deflecting coil, is arranged on electron gun and VCSEL chip package external body, for controlling the track of the electron beam in electron gun, controls the incident orientation of electron beam at VCSEL chip surface;
Microcontroller, is connected with electron gun, controls for the start-up and operation controlling electron gun;
Scan control unit, is connected with focusing coil and deflecting coil respectively, for driving focusing coil and deflecting coil;
Central processor unit CPU, is connected with microcontroller, scan control unit respectively, for whole system operation monitoring;
Man-machine interface, is connected with CPU, is set operational factor by keyboard, and real time record operational factor.
Described electron gun is three grades of formulas intersection rifles, comprises the negative electrode of electron emission, G1 grid, G2 intensifying ring and G3 electron focusing pole.
Described VCSEL chip bottom is bonded with the substrate of heat conduction.
Also comprise the VCSEL conductor temperature control circuit be connected with CPU, substrate respectively, for realizing the control of VCSEL chip temperature.
Also comprise the output driving and amplifying circuit that are connected with scan control unit, focusing coil and deflecting coil respectively.
Also comprise and focusing on and yoke current testing circuit, this focusing is connected with CPU, focusing coil and deflecting coil respectively with yoke current testing circuit.
Described focusing coil comprises static focus coil and dynamic focus coil, and described deflecting coil comprises line deflector coil and field deflection coil, and described scan control unit comprises:
Static focus coil power, is connected with CPU, static focus coil respectively;
Scan control circuit, is connected with CPU;
Field deflection coil drive circuit, is connected with scan control circuit, field deflection coil respectively;
Line deflector coil drive circuit, is connected with scan control circuit, line deflector coil respectively;
Dynamic focus coil drive circuit, be connected with line deflector coil, amplifying circuit respectively, wherein amplifying circuit is connected with dynamic focus coil.
Described field deflection coil drive circuit comprises and connects the first predrive circuit, power output circuit successively, and the first described predrive circuit is connected with scan control circuit, and described power output circuit is connected with field deflection coil.
Described line deflector coil drive circuit comprises the second predrive circuit, line scanning output circuit, sequence circuit and electron gun electron beam blanking circuit, described scan control circuit is connected with the second predrive circuit, line scanning output circuit, sequence circuit respectively, described line scanning output circuit is connected with the second predrive circuit, line deflector coil respectively, and described line deflector coil and sequence circuit are connected with electron gun electron beam blanking circuit respectively.
Described dynamic focus coil drive circuit comprises the line deflector coil sweep waveform sample circuit, the dynamic correction signal generation circuit that connect successively, described line deflector coil sweep waveform sample circuit is connected with line deflector coil, and described dynamic correction signal produces circuit and is connected with amplifying circuit.
Compared with prior art, the present invention has the following advantages:
1) reliability is high, and system have employed independently MCU control unit, and carries out communication with CPU (selecting ARM chip) unit, the reliability that the start-up and operation that improve electron gun controls;
2) long service life, the fault or out of control of scanning circuit, can make electron beam bombard VCSEL chip fixed surface for a long time, cause wafer damage, therefore, includes focusing and yoke current detection cell circuit, avoid wafer damage in system composition;
3) fail safe is good, the energy of electron beam all can not convert the output of laser energy to, also in order to improve the energy of Laser output, need to adopt cooling provision, be necessary to reduce chip temperature, present invention employs the outer VCSEL conductor temperature control circuit of chip body, and can be monitored by CPU, improve the fail safe of system;
4) easy to operate, include human-machine interface function in system, except can being set operational factor by keyboard, also there is real time execution reference record unit, be convenient to the analysis carrying out operational factor, optimizing operation efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of scan control unit of the present invention;
Fig. 3 is the physical circuit figure of line scanning output circuit of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
Embodiment
As shown in Figure 1, a kind of laser source systems based on VCSEL technology, comprising:
Electron gun and VCSEL chip packing-body 1, comprise electron gun 4 and VCSEL chip 5;
Focusing coil 2, is arranged on electron gun and VCSEL chip packing-body 1 is outside, for carrying out refocusing to the electron beam in electron gun;
Deflecting coil 3, is arranged on electron gun and VCSEL chip packing-body 1 is outside, for controlling the track of the electron beam in electron gun, controls the incident orientation of electron beam at VCSEL chip surface;
Microcontroller 6, is connected with electron gun 4, controls for the start-up and operation controlling electron gun;
Scan control unit 8, is connected with focusing coil 2 and deflecting coil 3 respectively, for driving focusing coil and deflecting coil;
Man-machine interface 12, outside being set, is also had real time execution reference record unit, is convenient to the analysis carrying out operational factor, optimizing operation efficiency by keyboard to operational factor;
Central processor unit CPU7, is connected with microcontroller 6, scan control unit 8 respectively, for whole system operation monitoring.
Described electron gun 4 is three grades of formulas intersection rifles, comprises the negative electrode of electron emission, G1 grid, G2 intensifying ring and G3 electron focusing pole.Described VCSEL chip 5 bottom adhe has the substrate 15 of heat conduction.By arranging the VCSEL conductor temperature control circuit 11 be connected with CPU, substrate respectively, for realizing the control of VCSEL chip temperature.During normal operation, cathode current size is set as that 400mA, G3 are up to 3.5kV.
The present invention also comprises the output driving and amplifying circuit 11 that are connected with scan control unit 8, focusing coil 2 and deflecting coil 3 respectively.And also comprise focus on yoke current detect electric 10 tunnels, this focusing and yoke current testing circuit 10 are connected with CPU7, focusing coil 2 and deflecting coil 3 respectively.
As shown in Figure 2, described focusing coil 2 comprises static focus coil 21 and dynamic focus coil 22, and described deflecting coil 3 comprises line deflector coil 32 and field deflection coil 31;
Described scan control unit 8 comprises:
Static focus coil power 82, is connected with CPU7, static focus coil 21 respectively;
Scan control circuit 81, is connected with CPU7;
Field deflection coil drive circuit, is connected with scan control circuit 81, field deflection coil respectively;
Line deflector coil drive circuit, is connected with scan control circuit 81, line deflector coil respectively;
Dynamic focus coil drive circuit, be connected with line deflector coil, amplifying circuit respectively, wherein amplifying circuit is connected with dynamic focus coil.
Described field deflection coil drive circuit comprises and connects the first predrive circuit 83, power output circuit 84 successively, and the first described predrive circuit 83 is connected with scan control circuit 81, and described power output circuit 84 is connected with field deflection coil 31.
Described line deflector coil drive circuit comprises the second predrive circuit 85, line scanning output circuit 86, sequence circuit 87 and electron gun electron beam blanking circuit 88, described scan control circuit 81 is connected with the second predrive circuit 85, line scanning output circuit 86, sequence circuit 87 respectively, described line scanning output circuit 86 is connected with the second predrive circuit 85, line deflector coil 32 respectively, and described line deflector coil 32 and sequence circuit 87 are connected with electron gun electron beam blanking circuit 88 respectively.
Described dynamic focus coil drive circuit comprises the line deflector coil sweep waveform sample circuit 891, the dynamic correction signal generation circuit 892 that connect successively, described line deflector coil sweep waveform sample circuit 891 is connected with line deflector coil 32, and described dynamic correction signal produces circuit 892 and is connected with amplifying circuit.
For the reliability that the start-up and operation improving electron gun controls, system have employed independently MCU control unit, and carries out communication with CPU (selecting ARM chip) unit; CPU element is the core of whole system, gated sweep control unit, produces electron beam scanning and track compensating control signal, through output amplifier, drives and focuses on and deflecting coil; The fault or out of control of scanning circuit, can make electron beam bombard VCSEL chip fixed surface for a long time, cause wafer damage, therefore, includes focusing and yoke current detection cell circuit in system composition; The energy of electron beam all can not convert the output of laser energy to, also in order to improve the energy of Laser output, needing to adopt cooling provision, being necessary to reduce chip temperature, and native system have employed the outer hydrologic cycle cooling system of chip body, and can be monitored by CPU.
Include human-machine interface function in native system, except can being set operational factor by keyboard, also there is real time execution reference record unit, be convenient to the analysis carrying out operational factor, optimizing operation efficiency.
As shown in Figure 1, VCSEL chip is planar structure, in order to effectively export the laser that VCSEL chip produces, its plane normal and electron gun axis are similar to angle at 45 °, this structural arrangement form of current employing, compared with traditional CRT electron beam scanning structure, substantially increase the design difficulty that sweep trace of electron beam controls, therefore the design of scan control circuit is also the crucial technical problem that native system needs to solve.
Key Controlling Circuit realizes
1) electron gun control circuit explanation
Under the condition that scan control circuit normally works, restart electron gun.The start-up course of electron gun controls extremely important, is automatically controlled by microcontroller implementation.Cathode filament electric current is set to 50% of normal value time initial, is about 200mA, and G1 grid voltage initial value is less, is not more than 150V; After 800V and 3.5kV that G2 and G3 pole tension is progressively increased to normal working voltage successively, by regulating G1 gate voltage values, can adjust electron beam current density, current density design point is 2mA.Gun cathode electric current and G1, G2, G3 pole tension are monitored by microcontroller, once note abnormalities, close G1 grid voltage immediately, to ensure the safety of system.
Cathode current adopts constant-current control circuit; Controlled high tension voltage module is then directly selected in the generation of G1, G2 and G3 voltage, simplifies the design of whole system.
2) scan control circuit design
Scan control circuit is the Key Circuit of whole VCSEL lasing light emitter.Control circuit composition frame chart as shown in Figure 2.For ensureing that electron beam is when bombarding VCSEL chip surface each point, electron beam speed is identical with incident angle, to ensure the laser intensity uniformity exported, needs to control electron beam scanning process.
As shown in Figure 2, CPU is the core of scan control circuit, and CPU, by dual port data memory RAM chip, generates line field synchronization pulse signal, is supplied to TDA4857 and deflects control integration chip.CPU, by data-interface, can produce row-field scanning signal waveform and row field correction signal waveform by control TDA4857 chip.
Because deflection of a beam of electrons angle is different, therefore the distance of electron beam trace is different, and also require that electron beam all can assemble (Jiao) in VCSEL chip surface in theory, circuit carries out compensation adjustment effectively by dynamic focus coil;
Although deflection of a beam of electrons angle identical (angular speed is identical), because electron beam trace radius distance is different, cause VCSEL surface each point tag wire speed can be different, circuit be that superimposed current compensating signal is revised by being expert at, in field coil.
Terminate at single row scan, when carrying out line feed scanning, control electron gun G1 grid voltage by sequence circuit, realize the blanking to electron beam.
In whole circuit realiration, two damping line scanning output circuit is most crucial circuit, and its main feature produces high frequency big current sweep signal to go to drive yoke inductance load, and circuit working principle is identical with CRT product interlock circuit.The circuit design that native system adopts as shown in Figure 3.
In Fig. 3, L1 is the line scan coil as load, D301 and D302 is that damper diode, line scanning control signal are by the resonant process of Q301 control L1 and damping circuit electric capacity; Line scanning compensating signal changes the electric current in line deflector coil current circuit by Q303 duplexure, the object be compensated; Supply voltage pwm control signal, can control two damping line scanning loop works voltage, realize the control to yoke current amplitude, change line scanning scope.
Results and discussions
Use electron gun of the present invention and VCSEL chip, and based on the electronic control system of designed, designed, successfully bombard VCSEL chip by electron beam, produced 630nm LASER Light Source.

Claims (10)

1. based on a laser source systems for VCSEL technology, it is characterized in that, comprising:
Electron gun and VCSEL chip packing-body, comprise electron gun and VCSEL chip;
Focusing coil, is arranged on electron gun and VCSEL chip package external body, for carrying out refocusing to the electron beam in electron gun;
Deflecting coil, is arranged on electron gun and VCSEL chip package external body, for controlling the track of the electron beam in electron gun, controls the incident orientation of electron beam at VCSEL chip surface;
Microcontroller, is connected with electron gun, controls for the start-up and operation controlling electron gun;
Scan control unit, is connected with focusing coil and deflecting coil respectively, for driving focusing coil and deflecting coil;
Central processor unit CPU, is connected with microcontroller, scan control unit respectively, for whole system operation monitoring;
Man-machine interface, is connected with CPU, is set operational factor by keyboard, and real time record operational factor.
2. a kind of laser source systems based on VCSEL technology according to claim 1, is characterized in that, described electron gun is three grades of formulas intersection rifles, comprises the negative electrode of electron emission, G1 grid, G2 intensifying ring and G3 electron focusing pole.
3. a kind of laser source systems based on VCSEL technology according to claim 1, is characterized in that, described VCSEL chip bottom is bonded with the substrate of heat conduction.
4. a kind of laser source systems based on VCSEL technology according to claim 3, is characterized in that, also comprises the VCSEL conductor temperature control circuit be connected with CPU, substrate respectively, for realizing the control of VCSEL chip temperature.
5. a kind of laser source systems based on VCSEL technology according to claim 1, is characterized in that, also comprises the output driving and amplifying circuit that are connected with scan control unit, focusing coil and deflecting coil respectively.
6. a kind of laser source systems based on VCSEL technology according to claim 1, is characterized in that, also comprise and focusing on and yoke current testing circuit, this focusing is connected with CPU, focusing coil and deflecting coil respectively with yoke current testing circuit.
7. a kind of laser source systems based on VCSEL technology according to claim 5, it is characterized in that, described focusing coil comprises static focus coil and dynamic focus coil, and described deflecting coil comprises line deflector coil and field deflection coil, and described scan control unit comprises:
Static focus coil power, is connected with CPU, static focus coil respectively;
Scan control circuit, is connected with CPU;
Field deflection coil drive circuit, is connected with scan control circuit, field deflection coil respectively;
Line deflector coil drive circuit, is connected with scan control circuit, line deflector coil respectively;
Dynamic focus coil drive circuit, be connected with line deflector coil, amplifying circuit respectively, wherein amplifying circuit is connected with dynamic focus coil.
8. a kind of laser source systems based on VCSEL technology according to claim 7, it is characterized in that, described field deflection coil drive circuit comprises and connects the first predrive circuit, power output circuit successively, the first described predrive circuit is connected with scan control circuit, and described power output circuit is connected with field deflection coil.
9. a kind of laser source systems based on VCSEL technology according to claim 7, it is characterized in that, described line deflector coil drive circuit comprises the second predrive circuit, line scanning output circuit, sequence circuit and electron gun electron beam blanking circuit, described scan control circuit is connected with the second predrive circuit, line scanning output circuit, sequence circuit respectively, described line scanning output circuit is connected with the second predrive circuit, line deflector coil respectively, and described line deflector coil and sequence circuit are connected with electron gun electron beam blanking circuit respectively.
10. a kind of laser source systems based on VCSEL technology according to claim 9, it is characterized in that, described dynamic focus coil drive circuit comprises the line deflector coil sweep waveform sample circuit, the dynamic correction signal generation circuit that connect successively, described line deflector coil sweep waveform sample circuit is connected with line deflector coil, and described dynamic correction signal produces circuit and is connected with amplifying circuit.
CN201510337279.7A 2015-06-17 2015-06-17 Laser source system based on VCSEL technology Pending CN104901161A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510337279.7A CN104901161A (en) 2015-06-17 2015-06-17 Laser source system based on VCSEL technology

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510337279.7A CN104901161A (en) 2015-06-17 2015-06-17 Laser source system based on VCSEL technology

Publications (1)

Publication Number Publication Date
CN104901161A true CN104901161A (en) 2015-09-09

Family

ID=54033656

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510337279.7A Pending CN104901161A (en) 2015-06-17 2015-06-17 Laser source system based on VCSEL technology

Country Status (1)

Country Link
CN (1) CN104901161A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110592390A (en) * 2019-08-08 2019-12-20 云南昆钢电子信息科技有限公司 Cold cathode electron gun control system and control method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5280360A (en) * 1991-12-26 1994-01-18 P. N. Lebedev Institute Of Physics Laser screen cathode ray tube with beam axis correction
US5682412A (en) * 1993-04-05 1997-10-28 Cardiac Mariners, Incorporated X-ray source
US20060163998A1 (en) * 2005-01-24 2006-07-27 Tiberi Michael D Electron beam pumped laser light source for projection television

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5280360A (en) * 1991-12-26 1994-01-18 P. N. Lebedev Institute Of Physics Laser screen cathode ray tube with beam axis correction
US5682412A (en) * 1993-04-05 1997-10-28 Cardiac Mariners, Incorporated X-ray source
US20060163998A1 (en) * 2005-01-24 2006-07-27 Tiberi Michael D Electron beam pumped laser light source for projection television

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110592390A (en) * 2019-08-08 2019-12-20 云南昆钢电子信息科技有限公司 Cold cathode electron gun control system and control method

Similar Documents

Publication Publication Date Title
CN103268756B (en) AMOLED voltage external compensation method and system
JP2020526030A (en) Light-emitting diode (LED) mass transfer device and manufacturing method
US11393391B2 (en) Drive control circuit, drive control chip, integrated packaged device, display system, and sparse drive method
US20180108297A1 (en) Amoled display panel detection method and detection device
CN105572915B (en) A kind of electrooptic modulator light pulse reshaping apparatus and shaping methods for introducing reference light
CN210896557U (en) Pixel compensation circuit, display substrate and display device
CN107230454A (en) Display device and its driving method
US20230197882A1 (en) ELECTRICAL CONTACT-FREE uLED LIGHT EMITTING DEVICE BASED ON WAVELENGHT DOWN-CONVERSION
CN204706771U (en) Red laser source apparatus
US11883859B2 (en) Laser cleaning method and device for improving uniformity of laser cleaning surface
KR20170002785A (en) Display panel and repair method thereof
CN104901161A (en) Laser source system based on VCSEL technology
WO2021254041A1 (en) Laser transmitter driving circuit and system, and high-speed optical communication device
CN103464900A (en) Laser sealing method and system
CN204706770U (en) For the electron beam scanning control circuit of laser source systems
KR101754780B1 (en) Electron gun power supply and power supply method using thereof
CN101366153B (en) Method and device for performing dbr laser wavelength modulation free of thermal effect
CN110112653A (en) A kind of emission semiconductor laser of vertical external chamber surface
CN102622967B (en) Organic light-emitting diode display and running method thereof
CN107612356A (en) A kind of grided electron gun power supply
CN206258624U (en) A kind of structure light generating means with MEMS galvanometers feedback
CN111313226B (en) High-speed driving method and device for quantum communication high-extinction-ratio narrow-pulse light source
CN110706657B (en) Pixel circuit and display device
CN108400521A (en) Miniaturization laser driven module in laser radar
JP6008689B2 (en) Laser light source device and laser projector using laser light source device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20150909