CN102971644A - Mo collimator and X-ray detector using same, X-ray inspection device, and CT device - Google Patents
Mo collimator and X-ray detector using same, X-ray inspection device, and CT device Download PDFInfo
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- CN102971644A CN102971644A CN2011800293825A CN201180029382A CN102971644A CN 102971644 A CN102971644 A CN 102971644A CN 2011800293825 A CN2011800293825 A CN 2011800293825A CN 201180029382 A CN201180029382 A CN 201180029382A CN 102971644 A CN102971644 A CN 102971644A
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
- A61B6/02—Devices for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
- A61B6/03—Computerised tomographs
- A61B6/032—Transmission computed tomography [CT]
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
- A61B6/06—Diaphragms
Abstract
According to the embodiments, an Mo collimator having a laminate structure formed by laminating sheets with a thickness of 0.02 to 0.3 mm, is provided. The Mo sheets are provided with multiple holes with short sides or diameters of 0.1 to 1.0 mm. Each hole forms a through-hole from the top surface to the bottom surface of the laminate.
Description
Technical field
Embodiment of the present invention relates to the Mo collimating apparatus and uses X-ray detector, X ray checking device and the CT device of Mo collimating apparatus.
Background technology
In the fields such as medical diagnosis, industrial nondestructive inspection, use X-ray tomograph (X ray CT device) isoradial testing fixture.X ray CT device has following structure, namely, the X-ray tube (x-ray source) that will be fan-shaped fan beam x-ray bombardment with, a plurality of x-ray detection devices are carried out relative configuration of X-ray detector that alignment arrangements obtains, so that the fault surface of measured body appears at central authorities.In X ray CT device, measured body is carried out the irradiation of fan beam X ray from X-ray tube, and in X-ray detector, the X ray absorption data that sees through measured body is collected, afterwards by in computing machine, these X ray absorption data being resolved (X ray absorptivity on each position of computed tomography face, and reproduction is corresponding to the image of X ray absorptivity), the tomography of measured body is reproduced.
Dispose the flash layer that the X ray that sees through measured body is surveyed in the X-ray detector, dispose to prevent that in its place ahead scattered ray from being the collimating apparatus of purpose.Existing collimating apparatus adopts the shape of slit of arranging perpendicular to flash layer, the scattered ray on the channel direction can only be removed, but by it is made lattice-shaped, the scattered ray on the channel direction can not only be removed, also can remove the scattered ray on the slice direction, therefore can improve the resolution of image.Thus, now need a kind of design alteration from the shape of slit to the lattice-shaped.
Up to the present, for the collimating apparatus of lattice-shaped, for example, shown in Figure 23 such as No. 2731162 communique of Jap.P. (patent documentation 1) intersected the plate of comb shape shape and assembled.Although, if adopt like that softer metal of stereotype, be processed into easily the comb formboard, because environmental problem, lead is not want the material that is used as far as possible.Consider to replace stereotype with the Mo plate although have, because the Mo plate is harder, so the processing of comb shape shape is very complicated.In addition, because the thickness of comb formboard is the thin plate about 0.1～0.2mm, so be difficult to perfectly make up.Therefore, in Japanese Patent Laid-Open 2007-3521 communique (patent documentation 2), disclosed and split porose sheet material and carry out stacked, and with the method that supporting member carries out stop, in Japanese Patent Laid-Open 2008-168125 communique (patent documentation 3), disclosed the stepped construction that sept is set each other at sheet material.
Owing to be the structure of having used other parts such as supporting member, sept, therefore can't suppress the rise of the complicated and cost of manufacturing process.In addition, because patent documentation 2 is the Mo plate is separated at certain intervals and to arrange in the vertical, will have the structure of the overhead in a plurality of holes as top cover, so manufacturing process's more complex.
The prior art document
Patent documentation
Patent documentation 1: No. 2731162 communique of Jap.P.
Patent documentation 2: Japanese Patent Laid-Open 2007-3521 communique
Patent documentation 3: Japanese Patent Laid-Open 2008-168125 communique
Summary of the invention
Invent problem to be solved
As mentioned above, the assembling procedure of the lattice-shaped collimating apparatus of prior art is complicated.In addition, owing to need the installing components such as supporting member, sept in addition, so can't fully reduce cost.
For solving above problem, the invention provides a kind of Mo collimating apparatus, this Mo collimating apparatus has been simplified assembling procedure, so can improve yield rate.
The technical scheme that the technical solution problem adopts
According to embodiment of the present invention, a kind of Mo collimating apparatus is provided, it is that Mo (molybdenum) plate of 0.02～0.3mm carries out stacked laminate construction that this Mo collimating apparatus has thickness of slab.Be provided with the hole section that a plurality of minor faces or diameter are 0.1～1.0mm in the Mo plate.Each hole section forms the upper surface of perforation duplexer to the through hole of lower surface.
In addition, the section of through hole is straight line or jump shape, and preferably, the jump of jump shape is in 0～0.010mm.In addition, preferably, the jump of jump shape surpass 0 and the jump zone below 0.010mm be positioned at end regions, the jump of jump shape is that the non-jump zone of 0mm is positioned at the central area.In addition, preferably, when drafting ran through the straight line of each through hole, each straight line pointed to a fixed-focus.In addition, preferably, the laminates number of Mo plate is 10～300.In addition, preferably, the thickness of collimating apparatus is more than 10mm.In addition, preferably, collimating apparatus has the R shape.In addition, preferably, for fixedly carrying out integrated laminate construction by what utilize welding or bonding agent.
In addition, 2～50 Mo plates are being made as in 1 group the situation, the Mo collimating apparatus can comprise a plurality of groups.Preferably, each group has the be interconnected through hole of the straight line that forms of hole section by adjacent Mo plate, and the maximum jump of the through hole between the adjacent sets is 0.001～0.1mm.
In addition, according to embodiment, provide a kind of X-ray detector that uses aforesaid Mo collimating apparatus.In addition, also be applicable to use the X ray checking device of a plurality of Mo collimating apparatuss.Also further be applicable to use the CT device of X-ray detector of the present invention.
The effect of invention
Embodiment of the present invention is carried out stacked stepped construction owing to having used to the Mo plate, thus can simplify assembling procedure, thereby can improve yield rate.In addition, owing to also need not to use other parts such as supporting member, sept, therefore also can reduce cost.
Description of drawings
Fig. 1 is the figure of an example of the related Mo collimating apparatus of expression embodiment of the present invention.
Fig. 2 is the figure of an example of expression Mo plate.
Fig. 3 is the figure of another example of expression Mo plate.
Fig. 4 is the figure of an example of the focus of the related Mo collimating apparatus of expression embodiment of the present invention.
Fig. 5 is the figure of another example of the focus of the related Mo collimating apparatus of expression embodiment of the present invention.
Fig. 6 is the figure of an example of expression through hole.
Fig. 7 is the figure of another example of the related Mo collimating apparatus of expression embodiment of the present invention.
Fig. 8 is the figure of an example that expression has the R shape of the related Mo collimating apparatus of embodiment of the present invention.
Fig. 9 is the figure of expression a example that the related a plurality of collimating apparatuss of embodiment are arranged.
Figure 10 is the figure of an example of the related X-ray detector of expression embodiment.
Figure 11 is the figure of an example of the related X ray checking device of expression embodiment.
Figure 12 is the major part amplification view of through hole shown in Figure 6.
Figure 13 is the major part amplification view of through hole shown in Figure 7.
Embodiment
The related Mo collimating apparatus of embodiment of the present invention is characterised in that, be that the Mo plate of 0.02～0.3mm carries out in the Mo collimating apparatus of the laminate construction that obtains after stacked having thickness of slab, be provided with a plurality of minor faces or diameter is the hole section of 0.1～1.0mm at the Mo plate, each hole section forms the upper surface that connects duplexer to the through hole of lower surface.
The Mo plate can be the above pure Mo of purity 99.9wt, also can be the Mo alloy that the Re, the Ti that add 1～30wt% in Mo, Zr etc. form.
The thickness of slab of Mo plate is 0.02～0.3mm.If the not enough 0.02mm of thickness of slab then is difficult to thin Mo plate like this is processed, can become on the contrary the principal element that cost rises.On the other hand, if thicker than 0.3mm, then for the hereinafter described situation that is processed into the R shape, because resilience will be difficult to keep shape.Therefore, the thickness of slab of Mo plate is 0.02～0.3mm, is preferably 0.1～0.2mm.
An example that has represented the Mo plate among Fig. 2 and Fig. 3.Among the figure, 2 for the Mo plate, 5 for hole section, 6 for screw stop section, L be that long edge lengths, the W of Mo plate is the bond length of Mo plate.
Be provided with the hole section that a plurality of minor faces or diameter are 0.1～1.0mm in the Mo plate.Hole section is of a size of 0.1～1.0mm, more preferably 0.4～0.7mm.
The shape of hole section is not particularly limited and is polygon, the circles etc. such as quadrilateral (square, rectangle) or hexagon, but for the adjustment in jump zone, is preferably quadrilateral.If the not enough 0.1mm of the minor face of hole section or diameter then can be because of the too small and very difficult manufacturing in hole.On the other hand, if surpass 1.0mm, then the performance of collimating apparatus can reduce.In addition, although be not particularly limited the quantity of hole section, preferably arrange a plurality of so that it becomes in fact latticed.
In addition, Fig. 3 is the structure that is provided with screw stop section, but the length L of Mo plate only represents to be provided with the length in the zone of hole section, does not comprise this screw stop section.
The present invention has this Mo plate is carried out the laminate construction that obtains after stacked.The laminates number of Mo plate is 10～10000, more preferably 10～300.If laminates is counted 10 of less thaies, then collimating apparatus is inadequate on thickness direction; If surpass 10000, then can when being loaded into X-ray detector harmful effect may appear because of collimating apparatus overweight causing that become.100～250 duplexer more preferably.
An example that has represented the Mo collimating apparatus among Fig. 1.Among the figure, 1 is that Mo collimating apparatus, 2 is that Mo plate, 3 is that length, H regional centered by the end regions, 4, that L is the Mo plate are the thickness of Mo collimating apparatus.In addition, in statu quo the Mo plate being carried out stacked structure, the length L of Mo plate namely becomes the length L of Mo collimating apparatus.
Among the present invention, in the laminate construction of Mo plate, hole section forms and connects upper surface to the through hole of lower surface.This refers to connect upper surface hole section to the through hole of corresponding respectively following table face section.Thus, each hole section has the effect of calibration.
In addition, the section of through hole is straight line or jump shape, and preferably, the jump shape is in 0～0.010mm.An example that has represented through hole among Fig. 6.Jump shape 0mm represent without jump non-jump zone, be that so-called section is the shape of straight line.In addition, jump is shaped as the jump zone that skew that 0.010mm represents up and down the Mo plate that directly overlaps has the jump of 0.010mm.Preferably, the deviation range of Mo plate is 0～0.005mm (0～5 μ m).
In addition, preferably, the jump shape surpass 0 and the jump zone below 0.010mm be positioned at end regions, the non-jump zone that jump is shaped as 0mm is positioned at the central area.End regions 3 is 100 o'clock for establishing length L, 0～10,90～100 zone.Central area 4 is 100 o'clock for establishing length L, 45～55 zone.
Figure 12 is the synoptic diagram after the part of the hole section 5 in zone, Mo collimating apparatus end 3 among Fig. 6 is amplified.Figure 12 represents the jump between the interior hole section of a through hole.Among Figure 12, the 5a of hole section of Mo plate 2a and, through hole of the 5b of hole section formation of the Mo plate 2b adjacent with Mo plate 2a.The position of the 5a of hole section of Mo plate 2a has skew with respect to the position of the 5b of hole section of Mo plate 2b.Jump d be Mo plate 2a wall section 22 and the 5a of hole section the border and, surround the distance of wall section 23 of the Mo plate 2b of the 5b of hole section.
Because the jump zone is present in end regions, non-jump zone is present in the central area, can realize that therefore each straight line points to the structure of a fixed-focus (X ray generating source) when drafting runs through the straight line of each through hole.An example that has represented the focus of Mo collimating apparatus among Fig. 4 and Fig. 5.Preferably, have like that in the equipment of ring-type detecting device at for example CT device, the collimating apparatus that the X ray that sees through measured body from x-ray source (X-ray tube) is calibrated also with the R shape approximation of annulus.For this reason, preferably, at end regions the jump zone is set, non-jump zone is set in the central area, and make through hole point to the direction of a fixed-focus.
In the time of can confirming by the following method to draw the straight line that runs through each through hole, each straight line points to the structure of a fixed-focus (X ray generating source).By not unusual in the output of confirming when collimating apparatus is loaded into X-ray detector, to obtain, can judge and realize this structure.
When each through hole that is formed at collimating apparatus points to a fixed-focus (X ray generating source), maximum at the jump that end regions forms.In addition, in order to form this shape, the Mo plate of the position that changed the hole by etching is adjusted, and to carry out stacked method be effective.In addition, in order in the collimating apparatus of finished product, the jump size being measured, can to get the section on the Mo plate length direction, and the jump size to be measured.The section of length direction can be arbitrary section.
In addition, also exist following methods to make through hole point to a fixed-focus direction, that is, the hole section that is arranged on the stacked Mo plate is diminished gradually.In addition, when the laminates number is more, preparing section's size different plate in hole in the stacking order of Mo plate is the principal element that cost rises, therefore, there is following methods, namely 10～20% (for example for stacked 200 situation, being 20～40 every 10～20%) every the laminates number make hole section size reduction.
Another example that has represented the Mo collimating apparatus among Fig. 7.Among Fig. 7,2 be Mo plate, 3 for zone, 5 centered by the end regions, 4 is hole section, each group when 7-1～7-4 represents multi-disc Mo plate 2 as 1 group.In each group 7-1～7-4, the hole section 5 of adjacent Mo plate 2 be interconnected to each other and the through hole that forms perpendicular to the upper and lower surface of Mo plate 2, and the longitudinal cross-section is rectilinear form.That is the through hole that, is formed at respectively among group 7-1～7-4 is unified into linearity.In each group 7-1～7-4, the through hole of central area 4 is arranged on same position substantially, but for the through hole of end regions 3, the position between each group is different.Therefore, if the Mo plate 2 of group 7-1～7-4 is carried out stacked, then can be at the straight through hole of the central area of Mo collimating apparatus 14 shapes, form the through hole of jump shapes at the end regions 3 of Mo collimating apparatus 1.
Figure 13 is the synoptic diagram after the part of the through hole in zone, Mo collimating apparatus end 3 among Fig. 7 is amplified.There is skew in the through hole 81 that is connected to form by the hole section 5 of Mo plate 2 of group 7-1 with, the through hole 82 that is connected to form by the hole section of the Mo plate 2 of group 7-2.Through hole 81 consists of a through hole with through hole 82.The wall standard laid down by the ministries or commissions of the Central Government of surrounding the Mo plate 2 of through hole 81 is designated as 24, the wall standard laid down by the ministries or commissions of the Central Government of surrounding the Mo plate 2 of through hole 82 is designated as 25.Jump d be through hole 82 with the border of the wall section 25 of Mo plate 2 and, surround the distance of wall section 24 of the Mo plate 2 of through hole 81.
For the situation that the shape that makes hole section diminishes gradually, need the quantity of etching raw sheet identical with the laminates number.That is, if want stacked 200, then need 200 etching raw sheets.If adopt this way will cause inevitably cost to rise.Therefore, as 1 group, and make the hole section shape in 1 group unified the duplexer of 2～50 Mo plates.That is the through hole of straight line, is set in 1 group.Preferably, on this basis, structure is adjusted, so that the maximum jump between the adjacent sets is between 0.001～0.1mm.In the central area 4, the straight through hole of hole section 5 shapes.On the other hand, preferably, in end regions 3, each is organized and is provided with jump between the through hole, and the through hole that is connected to form to each other by the through hole of each group points to a fixed-focus direction.Maximum jump represents maximum jump in the jump of through hole between the adjacent sets.The jump of the through hole between adjacent sets can be identical, also can change respectively.In addition, 1 group laminates number is 2～50, and the laminates number of each group can be identical, also can be different.
If adopt this structure, for example, for the situation of making stacked 200 collimating apparatus, if then be divided into 10 groups take 20 as 1 group.For 10 groups, then as long as 10 etching raw sheets.Compared with all different etching raw sheets of every Mo plate are set, cost is reduced greatly.
In addition, can exemplify following methods, as: the Mo plate that has formed same holes section is being carried out make after stacked it with the R shape or carrying out stacked to the Mo plate with the R shape in advance.
In addition, by adopting laminate construction, be easy to make collimating apparatus thickness H to reach the collimating apparatus that 10mm is above, formation is thicker.For example, CT device neutral body detect the image of measured body.Therefore, not only need to make hole section vertically * transversely arrange, on thickness direction, also need to calibrate.
In addition, preferably, there is at least more than one the side that has jump at the stacked direction on minor face or long limit in the side of Mo calibrating device.For in the X ray checking device with the situation of a plurality of collimating apparatuss and row arrangement, particularly for as the CT device, the structure that around measured body, is rotated of X ray checking device, need to make collimating apparatus point to a fixed-focus direction.Therefore, when the collimation device is fixed, directional problems occurred, which has been about to is arranged on, which is arranged on down.
For the situation that hole section size is reduced gradually, if the size of uppermost Mo plate and nethermost Mo plate is also reduced gradually since can by visual judge which upper, which is lower, so has improved the installation capability for X-ray detector.In addition, by making the Mo collimating apparatus after stacked also can make collimating apparatus produce directivity, improve installation capability with the R shape.Represented to have an example of the collimating apparatus of R shape among Fig. 8.Consist of a plurality of Mo plates 2 of collimating apparatus 1
1～2
5In, the upper and lower surface of each plate is all crooked towards the below.In addition, uppermost Mo plate 2
1The nethermost Mo plate 2 of Area Ratio
5Area little.By to such Mo plate 2
1～2
5Carry out stacked and make it integrated, become the collimating apparatus 1 of circular shape.
When making the Mo collimating apparatus with the R shape, add to carry out by the punch process equal stress.Because the Mo plate is the stronger material of rigidity, so situation stronger for the R shape, that the Mo thickness of slab is thicker (for example the thickness of slab of Mo plate is more than the 0.2mm) or the Mo plate is long, the resilience of Mo plate is stronger, and in order to keep the R shape, the screw stop shown in Fig. 3 is necessary.Therefore, the structure that the length L of Mo plate is shortened gradually is as stepped construction, and to give substantial R shape also be effective.Since be the Mo plate that length L shortens is gradually carried out stacked, so its side can have little jump.At this moment, owing to do not come the collimation device to give the R shape by extra-stress, therefore hole section size is diminished gradually, form the jump shape.
In addition, preferably, the side of the laminate structure that fixedly makes the Mo plate by utilizing welding or bonding agent is integrated.Here, the side refers to expose the surface of the stepped construction of the long limit of Mo plate or minor face.Fig. 6 and Fig. 7 are examples of side of exposing the stepped construction of the long limit of Mo plate or minor face.Preferably, after hole section forms through hole, in order to keep the jump zone of regulation, make laminate structure integrated.Especially, as the CT device, X-ray examination be equipped in measured body around in the equipment that is rotated, the intensity of collimating apparatus itself also needs.
Welding is not particularly limited and is gas welding, arc welding, electric resistance welding, EBW (electron beam welding) etc., but because the welding position is preferably as much as possible little, so the weldering of preferred electron bundle.Be not particularly limited although the welding position is done, preferably, this side welded in line from the upper surface to the lower surface.In addition, preferably, the length L of Mo plate is once welded every about 3cm.
In addition, what utilize bonding agent fixedly is at the side coating adhesive, and carries out integrated.Preferably, the bonding agent that uses is the heat-curable adhesives such as epoxy resin, silicones.
Aforesaid Mo collimating apparatus is applicable to X-ray detector.The related Mo collimating apparatus of embodiment of the present invention can be applied to any side in X-ray tube side and the detecting device side, but the Mo collimating apparatus with R shape (the such substantial R shape of Fig. 5 be also contained in) is effective for detecting device side (side that the X ray that sees through measured body is detected).The CT device is the device that makes X-ray detector rotate and measure around measured body.Therefore, preferably, in the detecting device of the toroidal (ring-type) that surrounds measured body, the Mo collimating apparatus also possesses the R shape.In addition, preferably, load the detecting device that a plurality of collimating apparatuss cooperate toroidal.
Next, the manufacture method of Mo collimating apparatus described.The manufacture method of the Mo collimating apparatus that embodiment of the present invention is related is not particularly limited, but can adopt following manufacture method for obtaining good yield rate.
At first, preparing thickness of slab is the Mo plate of 0.02～0.3mm.By rolling the Mo plate is processed into thin plate.In addition, in case of necessity, also can use the method for thin plate further being processed by etching.
The operation that hole section is set in the Mo plate can exemplify out lithography, punch process, Laser Processing, line cutting processing etc.For the formation of the Mo plate below thickness of slab 0.2mm netted hole section as shown in Figure 2, be preferably lithography.On the other hand, the situation for the Mo plate formation reticulated cell section that surpasses 0.2mm at thickness of slab is preferably punch process.In addition, make as required the Mo plate that is provided with screw stop section.
Then carry out stacked to the Mo plate that is provided with hole section with regulation sheet number.For the situation that screw stop section is not set, make the side of laminate structure integrated by welding or bonding agent.At this moment, only the related part of outermost hole section is welded or coating adhesive.
Afterwards, carry out as required stress and add, make it with the R shape.In addition, stress is additional is punch process.If the employing laminate structure, even then add the R shape by punch process, hole section is also keeping through hole, can form the offset area of regulation.The stamping pressure of additional R shape is preferably 1～100MPa, more preferably 30～80MPa.In addition, preferably under 400～600 ℃ high temperature, carry out.In addition, preferably after punch process, under 700～900 ℃, carry out stress and eliminate thermal treatment.
In addition, in the situation with the R shape, also can be in advance carry out to the Mo plate that stress is additional to make it have the R shape, carry out stacked to this plate again.In addition, for making every a slice all with the situation of R shape, stamping pressure is 1～80MPa, is preferably 1～50MPa.In addition, preferably under 400～600 ℃ high temperature, carry out.In addition, preferably after punch process, under 700～900 ℃, carry out stress and eliminate thermal treatment.
In the situation with the R shape, can be by identical Mo plate being carried out the jump zone of stacked formation regulation.Especially, the jump zone is formed on end regions.In other words, can form end regions and have jump zone, central area to have the collimating apparatus in non-jump zone by the Mo plate with same holes section being carried out stacked and give the R shape.Therefore, owing to can use the Mo plate with same holes section, so production is better.The situation of this set R shape is that larger collimating apparatus more than the 90mm is effective for the length L that forms the Mo plate.
In addition, for the situation that the R shape is not set, the Mo plate of preparing to have changed in advance the Mo plate of hole section size or having changed hole section position is as laminate structure.The situation that the R shape is not set is effective for the less collimating apparatus of the not enough 90mm of the length L that forms the Mo plate.For the fan beam X ray that sends from X-ray tube is calibrated efficiently, be preferably the R shape of pointing to fan beam center (x-ray bombardment source).For the situation that does not form the R shape, can be by the less collimating apparatus of the not enough 90mm of the length L of a plurality of Mo plates be arranged to form substantial R shape.
In addition, if use the Mo plate changed in advance the Mo plate of hole section size or to have changed hole section position can obtain the laminate structure that needs, then not especially to size, restriction is done in the position, but there is following methods, namely, for example, when preparing to be provided with a plurality of minor faces or diameter and be the netted Mo plate of hole section of 0.1～1.0mm, with every the laminates number 10～20% (for stacked 200 situation, every 10～20) make the size reduction 0.0001～0.010mm in hole, or make length L reduce the method that 0.005～0.010mm (becoming the diminishing shape of Mo plate) changes hole section position.
In addition, preferably, make laminate structure integrated by welding or coating adhesive.For the integrated situation of not utilizing welding or coating adhesive, screw stop section as shown in Figure 3 is set in the end preferably.In addition, also can use simultaneously integrated structure and screw stop structure both sides.For this situation, the peristome that also can be provided for Mo plate location replaces screw stop section as the location division.In addition, represented among Fig. 3 a hole respectively to be set as the example of screw stop section at two ends, but also can adopt the structure that a plurality of (for example, 2～3) screw stop section is set in a side.Also can by a plurality of (2～3) are set respectively in the end, come the location is distinguished use with hole and screw stop with the hole.
Owing to used the laminate structure of Mo plate, so the contraposition of each hole section is easier to, and yield rate is better.The scheme that as prior art the plate of comb shape shape is meshed unless all comb shapes just in time mesh, otherwise will become unacceptable product.In contrast, if adopt stepped construction, then be easy to carry out contraposition.In addition, make the side integrated by welding or coating adhesive, can not use the unnecessary parts such as sept, supporting member.
As mentioned above, if adopt the related Mo collimating apparatus of embodiment of the present invention, owing to carry out easily the contraposition of hole section, so fabrication yield is very high.In addition, make the side integrated by welding or coating adhesive, the intensity of collimating apparatus is improved.If adopt this collimating apparatus, namely be used in the device that as the CT device, makes the X-ray detector rotary moving, also can keep shape, can not produce the bad of deformation.Its result can provide the high X-ray detector of reliability or use the CT device of this X-ray detector.
Fig. 9 has represented a example that a plurality of collimating apparatuss 1 are arranged.Each collimating apparatus 1 is identical with Fig. 8, comprises Mo plate 2
1～2
5X-ray detector is circular, circular arc or fan-shaped in the X ray checking device as the CT device, therefore also collimator arrangement is circular, circular arc or fan-shaped.An example that has represented X-ray detector among Figure 10.X-ray detector 31 is laminated in this order by collimating apparatus 1, flash layer 20 and photoelectric conversion part (photodiode) 21.In addition, an example that has represented X ray checking device among Figure 11.X ray checking device 10 comprises x-ray source 11 (X-ray irradiator) and X-ray detector 31 shown in Figure 10.The X ray that penetrates from x-ray source 11 (X-ray irradiator) sees through measured body 12 arrival X-ray detectors 31.In the X-ray detector 31, can remove scattered x-ray by collimating apparatus 1 is set, only direct X ray by collimating apparatus 1 through hole is converted to light in flash layer 20, and can in photoelectric conversion part 21, respond to this light, be converted into electric signal.In computing machine 13, the electric signal after the conversion in photoelectric conversion part 21 is processed, can be obtained the image 15 in the display 14.In addition, x-ray source 11 is focus among Figure 11.
Embodiment
(embodiment 1～embodiment 5)
Make Mo board size and hole section size Mo plate as shown in table 1 by lithography.Form the laminate structure of sheet number shown in the table 1 with this Mo plate.Become the R shape of R1070 to come to form the R shape its punch process, and under 800 ℃, carry out stress and eliminate thermal treatment.Afterwards, the side is welded, make integrated Mo collimating apparatus.In addition, the Mo plate uses purity to be the Mo more than the 99.9wt%.In addition, every Mo plate all is a plurality of hole section is set nettedly.
Yield rate to the Mo collimating apparatus that obtains is investigated.In addition, the jump shape of the hole section of end regions, central area is investigated.In addition, carry out vibration test so that permanance is investigated.In addition, for the jump shape of the hole section of end regions, central area, in the through hole, the maximum jump of skew is investigated in the up and down Mo plate that overlaps.In addition, for permanance, the Mo collimating apparatus is come and gone 50 times between the distance of 50cm in 1 minute, produce be expressed as " * " of deformation, do not produce be expressed as " zero " of deformation.In addition, yield rate is the ratio that produces certified products.Table 2 illustrates its result.
In addition, comparative example 1 has been prepared the Mo collimating apparatus with embodiment 1 same size except the Mo plate with the comb shape shape is combined into lattice-shaped.Comparative example 1 is also carried out identical mensuration.
[table 1]
[table 2]
The related Mo collimating apparatus of present embodiment is owing to have stepped construction, so its yield rate is 100%, and permanance is also very excellent.In addition, owing to make it with the R shape by punch process, so be formed with jump based on the Mo plate thickness in the side of short brink.In addition, end regions is formed with the jump zone.In addition, the central area does not have jump.Zone beyond end regions and central area has jump in the section of hole, and it is worth below the jump value of end regions.
On the other hand, for comb formboard intermeshing Mo collimating apparatus in the comparative example 1, the hole section of upper surface and lower surface does not have overlapping, but because to be difficult to thickness be that the comb shape shape Mo thin plate of 0.07mm meshes, yield rate is on duty mutually.
(embodiment 6～embodiment 9)
Upper surface Mo board size, lower surface Mo board size are as shown in table 3, and the Mo plate of preparing size decreases consists of duplexer, so that the size in the middle of it is reduced to the size of lower surface Mo plate gradually.In addition, by etching processing netted Mo plate is set, so that hole section reduces gradually take 30～50 as unit, and the hole section that is arranged on the upper surface Mo plate all becomes through hole.Laminate structure all comes the side is fixed by coating adhesive.
Each Mo collimating apparatus is carried out the mensuration identical with embodiment 1.Table 4 illustrates its result.In addition, the zone beyond end regions and central area has jump in the section of hole, and it is worth below the jump value of end regions.
[table 3]
[table 4]
(embodiment 10～embodiment 15)
Prepare the Mo plate (more than the Mo purity 99.9wt%) of vertical 100mm * horizontal 20mm * thickness 0.05mm.Then, the sheet number shown in the table 5 as 1 group, is made the Mo collimating apparatus of the stepped construction with 200 as embodiment 10～13.In addition, use identical Mo plate making layer lamination number be 5000 Mo collimating apparatus as embodiment 14, making layer lamination number is that 9500 Mo collimating apparatus is as embodiment 15.Among the embodiment 11, take 20 as 1 group, after stacked 5 groups, take 50 as 1 group, on this sandwich stacked 2 groups again.In addition, among the embodiment 15, take 20 as 1 group, after stacked 200 groups, take 10 as 1 group, on this sandwich stacked 550 groups again.The Mo collimating apparatus of embodiment 10～15 adopts structure shown in Figure 7.In addition, carry out the formation of hole section by etching, and hole section size is unified into the netted of 0.5mm * 0.5mm.In addition, be rectilinear form by the Mo plate being carried out the stacked through hole unification that forms in each group.In adjacent group, the through hole in each group switching centre zone is arranged on same position.The through hole of part beyond each group switching centre zone is arranged on positions different between the group.
In addition, screw stop hole section is set in the end of each Mo plate.When assembling Mo collimating apparatus, screw stop with hole section in insertion press anchor clamps, and carry out successively stacked.After the stacked end, by resin adhesive peripheral part (four sides) is adhesively fixed.Similarly to Example 1, carry out the investigation of yield rate and permanance.Following table 5 shows in the through hole of jump shape, the maximum jump in the jump between the group.In addition, in the central area of Mo collimating apparatus, the jump of through hole is 0mm, the part beyond central area and end regions, and the jump of through hole is less than maximum jump.
[table 5]
As known from Table 5, by the straight line through hole being set, the maximum jump each other of the through hole between adjacent sets being made as 0.001～0.1mm, improved yield rate, the permanance of collimating apparatus in 1 group.Especially, carry out stackedly owing to insert stationary fixture at screw stop with hole section, so do not have bad when stacked.In addition, because the etching raw sheet only needs and identical the getting final product of quantity of organizing, therefore can significantly reduce cost.
(embodiment 1A～embodiment 15A, comparative example 1A)
Use the Mo collimating apparatus of embodiment 1～embodiment 15 and comparative example 1, and attach it to a CT device side that detects measured body in the X-ray detector.After carrying out the detection of CT image respectively, all can clearly detect 3-D view.Hence one can see that, and the related Mo collimating apparatus of present embodiment not only possesses the collimating apparatus performance identical with existing product, and the yield rate of collimating apparatus and intensity are higher.In other words, the skew that can confirm the hole section that present embodiment is related can not have problems when taking the CT image.
In addition, for the related Mo collimating apparatus of embodiment, in the side of short brink jump being arranged, can be which side of upper surface is lower surface by visual which side of learning, therefore distinguishes easily the directivity when being installed to X ray checking device.In addition, even owing to do not use the particular component such as sept, supporting member also can keep through hole, so also can reduce cost from this point.
Although several embodiments of the present invention are illustrated, and these embodiments only present as example, and do not really want invention scope is limited.These new embodiments can be implemented by other variety of way, in the scope that does not break away from the invention main idea, can carry out various omissions, displacement, change.These embodiments and distortion thereof all are included in scope of invention and the main idea, and are included in the invention and equivalency range thereof that Patent right requirement puts down in writing.
Label declaration
1 Mo collimating apparatus, 2 Mo plates, 3 end regions, 4 central areas, 5 hole sections, 6 screw stop sections, 7-1～7-4 group
Claims (12)
1. it is that the Mo plate of 0.02～0.3mm carries out stacked laminate construction that Mo collimating apparatus, this Mo collimating apparatus have thickness of slab, it is characterized in that,
Be provided with a plurality of minor faces or diameter is the hole section of 0.1～1.0mm at described Mo plate, each described hole section forms the upper surface that connects described laminate construction to the through hole of lower surface.
2. Mo collimating apparatus as claimed in claim 1 is characterized in that,
The section of described through hole is straight line or jump shape, and the jump of described jump shape is in 0～0.010mm.
3. such as each described Mo collimating apparatus in claim 1 or 2, it is characterized in that,
The jump of described jump shape surpass 0 and the jump zone below 0.010mm be positioned at end regions, the jump of described jump shape is that the non-jump zone of 0mm is positioned at the central area.
4. Mo collimating apparatus as claimed in claim 1 is characterized in that,
Comprise a plurality of groups, each group has 2～50 described Mo plates,
The be interconnected through hole of the straight line that forms of described group of described hole section that has respectively by described Mo plate,
The maximum jump of the described through hole between adjacent described group is 0.001～0.1mm.
5. such as each described Mo collimating apparatus in claim 1 or 4, it is characterized in that,
When drafting ran through the straight line of each described through hole, each described straight line pointed to a fixed-focus.
6. such as each described Mo collimating apparatus in claim 1 or 5, it is characterized in that,
The laminates number of described Mo plate is 10～10000.
7. such as each described Mo collimating apparatus in claim 1 or 6, it is characterized in that,
The thickness of described Mo collimating apparatus is more than the 10mm.
8. such as each described Mo collimating apparatus in claim 1 or 7, it is characterized in that,
Described Mo collimating apparatus has the R shape.
9. such as each described Mo collimating apparatus in claim 1 or 8, it is characterized in that,
Described laminate construction is, fixedly makes described Mo plate integrated by what utilize welding or bonding agent.
10. an X-ray detector is characterized in that,
Comprise such as each described Mo collimating apparatus in the claim 1 to 9.
11. an X ray checking device is characterized in that,
Comprise a plurality of such as each described Mo collimating apparatus in the claim 1 to 9.
12. a CT device is characterized in that,
Comprise X-ray detector as claimed in claim 10 or X ray checking device as claimed in claim 11.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-206169 | 2010-09-14 | ||
| JP2010206169 | 2010-09-14 | ||
| PCT/JP2011/070875 WO2012036160A1 (en) | 2010-09-14 | 2011-09-13 | Mo COLLIMATOR AND X-RAY DETECTOR USING SAME, X-RAY INSPECTION DEVICE, AND CT DEVICE |
Publications (2)
| Publication Number | Publication Date |
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| CN102971644A true CN102971644A (en) | 2013-03-13 |
| CN102971644B CN102971644B (en) | 2016-03-16 |
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| CN201180029382.5A Active CN102971644B (en) | 2010-09-14 | 2011-09-13 | Mo collimating apparatus and use the X-ray detector of this Mo collimating apparatus, X ray checking device and CT device |
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| Country | Link |
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| JP (3) | JPWO2012036160A1 (en) |
| CN (1) | CN102971644B (en) |
| WO (1) | WO2012036160A1 (en) |
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| CN104237278A (en) * | 2014-09-09 | 2014-12-24 | 中国科学院上海应用物理研究所 | Fast three-dimensional fluorescence CT system and fast three-dimensional fluorescence CT method based on synchrotron radiation |
| CN104575657A (en) * | 2014-03-31 | 2015-04-29 | 株式会社富士金 | Laminated type X-ray filter grating, and manufacturing device and manufacturing method thereof |
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| KR101772324B1 (en) | 2016-04-18 | 2017-08-28 | 고려대학교 산학협력단 | Variable pin-hole collimator and radiation imaging device using the same |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2012036160A1 (en) | 2012-03-22 |
| JP2017037084A (en) | 2017-02-16 |
| JP2016026289A (en) | 2016-02-12 |
| JP6290352B2 (en) | 2018-03-07 |
| JPWO2012036160A1 (en) | 2014-02-03 |
| CN102971644B (en) | 2016-03-16 |
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