A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an...http://www.google.ca/patents/US7585113?utm_source=gb-gplus-sharePatent US7585113 - Micro-electro mechanical systems switch and method of fabricating the same
Micro-electro mechanical systems switch and method of fabricating the same
