A micro-machined movable light emitting assembly is formed on or from an undoped or pure III-V substrate or formed on or from a doped III-V substrate. The movable light emitting assemblies are to be actuated using force generators, to generate the various mechanical degrees of freedom depending on the...http://www.google.ca/patents/US6180428?utm_source=gb-gplus-sharePatent US6180428 - Monolithic scanning light emitting devices using micromachining
Monolithic scanning light emitting devices using micromachining
