Charged particle beam apparatus

CREATE DIFFERENTIAL ABSOLUTE
VALUE IMAGES FROM TWO INPUT IMAGES

Axy Ai, j = A X Ai, j = Ay Ai, j
Axy Bi, j = A X Bi, j — Ay Bi, j

CREATE COMPOSITE IMAGE
OUTPUT PIXEL VALUE OF ORIGINAL IMAGE
CORRESPONDING TO IMAGE HAVING LARGER
PIXEL VALUE

[AA] i, j^CAB] i, j-Ci, j =A i , j
[AA] i , j < [AB] i , j.-C i , j =B i , j

SMOOTH DIFFERENTIAL
ABSOLUTE VALUE IMAGES
[AA] , [AB]

502

503

CREATE DIFFERENTIAL ABSOLUTE VALUE
IMAGES FROM TWO INPUT IMAGES

Axy Ai, j = A X Ai, j + Ay Ai, j
Axy Bi, j = A X Bi, j + Ay Bi, j

SMOOTH DIFFERENTIAL
ABSOLUTE VALUE IMAGES
[AA] , [AB)

CREATE COMPOSITE IMAGE COMPOSE PIXEL VALUE USING PIXEL VALUES OF ORIGINAL IMAGES AT RATIO OF COMPARED PIXEL VALUES OF CORRESPONDING IMAGES

Ci, j=(Ai, jx[AA] i, j+Bi, jx(AB] i, j)/ {[AA] i, j+ [AB] i, j)

CREATE DIFFERENTIAL ABSOLUTE VALUE
IMAGES FROM TWO IMAGES

Axy Ai, j = A X Ai, j + Ay Ai, j
Axy Bif j = A X Bi, j + Ay Bi, j

SMOOTH DIFFERENTIAL
ABSOLUTE VALUE IMAGES
[AA] . [AB]

-702

CREATE COMPOSITE IMAGE COMPOSE PIXEL VALUE USING PIXEL VALUES OF ORIGINAL IMAGES AT WEIGHTED RATIO OF COMPARED PIXEL VALUES OF CORRESPONDING IMAGES

[AA] i, j£ [AB] i, j

C i, j= (kXA i, jX [AA] i, j+B i, jX [AB] i, j) /

(kX [AA] i. j+ [AB] i, j) [AA] i, j< [AB] i. j

Ci, j=(Ai, jX[AA] i. j+kXBi, jX[AB] i, j/ ( [AA] i, j + kX [AB] i, j)

703

DISPLAY PROCESSING
RESULTS Ci. j