Optical MEMS switching array with embedded beam-confining channels and ...

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(12) United States Patent

Ruan et al.

(io) Patent No.: (45) Date of Patent:

US 7,027,682 B2 Apr. 11, 2006

(54) OPTICAL MEMS SWITCHING ARRAY WITH EMBEDDED BEAM-CONFINING CHANNELS AND METHOD OF OPERATING SAME

(75) Inventors: Meichun Ruan, Tempe, AZ (US); Jun Shen, Phoenix, AZ (US); Charles Wheeler, Paradise Valley, AZ (US)

(73) Assignee: Arizona State University, Tempe, AZ (US)

( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.

(21) Appl. No.: 09/902,883

(22) Filed: Jul. 11, 2001

(65) Prior Publication Data

US 2002/0021860 Al Feb. 21, 2002

Related U.S. Application Data

(63) Continuation-in-part of application No. 09/563,595, filed on May 3, 2000, now Pat. No. 6,496,612, which is a continuation-in-part of application No. 09/496, 446, filed on Feb. 2, 2000, now Pat. No. 6,469,602.

(60) Provisional application No. 60/155,757, filed on Sep. 23, 1999, provisional application No. 60/217,265, filed on Jul. 11, 2000.

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(Continued)
FOREIGN PATENT DOCUMENTS
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(Continued)

OTHER PUBLICATIONS

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(Continued) Primary Examiner—Sarah Song

(74) Attorney, Agent, or Firm—Robert D. Atkins; Quarles & Brady Streich Lang LLP

A new optical switch device and method of operating such a device overcomes alignment problems through the use of an optical signal-confining channel that may be embedded so as to confine optical signals in a desired propagation path such that the optical signal's alignment with the output is secured. Small-angle mirrors may be used so as to direct the optical signal into the intended optical signal-confining channels so as to achieve the desired optical switching. The mirrors could be latching micro-mirrors or non-latching micro-mirrors. Such mirrors could be controlled by electrostatic actuation, thermal actuation or electromagnetic actuation, or any other technique.

21 Claims, 18 Drawing Sheets

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PCT Notification of Transmittal of the International Search Report or the Declaration; Mailed May 4, 2002; International Filing Date: Nov. 7, 2001; PCT/US01/21856; Agent's File Reference 12218.1116.

* cited by examiner