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US007567756B2

(12) United States Patent ao) Patent No.: Us 7,567,756 B2

Tremaine (45) Date of Patent: Jul. 28,2009 Page 2

(54) METHOD OF AUTOMATIC ADJUSTMENT OF DITHER AMPLITUDE OF MEMS MIRROR ARRAYS

(75) Inventor: Brian P. Tremaine, San Jose, CA (US)

(73) Assignee: Capella Photonics, San Jose, CA (US)

( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 321 days.

(21) Appl.No.: 11/197,934

(22) Filed: Aug. 3, 2005

(65) Prior Publication Data

US 2007/0166034 Al Jul. 19, 2007

(51) Int. CI.

H04J14/00 (2006.01)

(52) U.S. CI 398/45

(58) Field of Classification Search 398/45^6;

385/16-18

See application file for complete search history.

(56) References Cited

U.S. PATENT DOCUMENTS

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5,629,790 A 5/1997 Neukermans et al 359/198

5,745,271 A 4/1998 Fordetal 398/87

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5,868,480 A 2/1999 Zeinali 353/31

5,960,133 A 9/1999 Tomlinson 385/18

5,974,207 A 10/1999 Aksyuketal 385/24

6,172,777 Bl 1/2001 Flood etal 359/10

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Methods for adjusting dither amplitude for MEMS mirrors in optical switches and optical switches employing such a method are disclosed. A dither amplitude of one or more MEMS mirrors may be adjusted in an optical switch having an input port, and an array of one or more MEMS mirrors that can be selectively optically coupled to one or more of Nis3 optical input/output (I/O) ports. The MEMS mirrors are aligned mirrors to achieve nominal peak coupling at each of the N collimators. Digital-to-analog (DAC) settings for positioning mirrors in an open control loop as a function of the selected collimator are stored to a non-volatile memory. The DAC settings are used to determine a dither amplitude DITHER(x) for one of the MEMS mirrors positioned to couple optical signals to an output port at a position x. The optical switch apparatus may comprise Nis3 optical input/output (I/O) ports, an array of one or more MEMS mirrors that can selectively reflect one or more spectral channels to one or more of the N ports, and a servo-control assembly in communication with said one or more of the MEMS mirrors. The servo control assembly includes memory containing digitalto-analog converter (DAC) settings for positioning each mirror in an open control loop as a function of a port position x. The servo control assembly is programmed to adjust dither amplitude of one or more of the MEMS mirrors using the stored DAC settings.

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U.S. PATENT DOCUMENTS

6,193,376 Bl 2/2001 Hayashi et al 353/30

6,204,946 Bl 3/2001 Aksyiik et al 398/9

6,205,269 Bl 3/2001 Morton 385/24

6,222,954 Bl 4/2001 Riza 385/18

6,243,507 Bl* 6/2001 Goldstein et al 385/13

6,259,841 Bl 7/2001 Bhagavatula 385/47

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6,289,155 Bl 9/2001 Wade 385/37

6,307,657 Bl 10/2001 Ford 398/9

6,327,398 Bl 12/2001 Solgaardetal 385/18

6,343,862 Bl 2/2002 Sawaietal 353/1

6,345,133 Bl 2/2002 Morozov 385/24

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6,411,751 Bl* 6/2002 Giles et al 385/16

6,415,073 Bl 7/2002 Cappiello et al 385 24

6,418,250 Bl 7/2002 Corbosiero et al 385/24

6,439,728 Bl 8/2002 Copeland 359/515

6,453,087 B2 9/2002 Frishetal 385/24

6,549,699 B2 4/2003 Belseretal 385/24

6,625,346 B2 9/2003 Wilde 385/24

6,634,810 Bl 10/2003 Fordetal 398/88

6,647,172 B2 11/2003 Giles et al 385/18

6,657,770 B2 12/2003 Marometal 359/290

6,661,393 B2 12/2003 Tegreene et al 345/7

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etal 359/872

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6,798,941 B2 9/2004 Smith etal 385/18

6,820,988 B2 11/2004 van Drieenhuizen

etal 359/872

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etal 359/872

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OTHER PUBLICATIONS

U.S. Appl. No. 11/469,394 to Joseph E. Davis et al., filed Aug. 31, 2006.

U.S. Appl. No. 11/840,182 to MarkH. Garrett, filed Aug. 16, 2007. "The International Search Report" and "The Written Opinion of the International Searching Authority" for International application No.

PCT/US2006/008639.

"The International Search Report" and "The Written Opinion of the International Searching Authority" for International application No. PCT/US2006/043169.

International application No. PCT/US2006/024075, "The International Search Report and The Written Opinion of the International Searching Authority".

* cited by examiner

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