A position detection device for detecting a position of an object. The detection device includes an irradiation device for irradiating light onto an alignment mark formed on a surface of the object, a probe for detecting near-field light in the vicinity of the alignment mark upon irradiation by the irradiation...http://www.google.ca/patents/US6806477?utm_source=gb-gplus-sharePatent US6806477 - Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
