Provided is an oscillator including: a MEMS resonator for mechanically vibrating; an output oscillator circuit for oscillating at a resonance frequency of the MEMS resonator to output an oscillation signal; and a MEMS capacitor for changing a capacitance thereof caused by a change in a distance between...http://www.google.ca/patents/US7671710?utm_source=gb-gplus-sharePatent US7671710 - MEMS oscillator with temperature sensitive MEMS capacitances
