A system and method for finding a defective tool in a semiconductor fabrication facility is disclosed. When the tools process the wafers, data representing the time period during which each wafer passes through each tool is sent to a database. The wafers are tested for defects, and lots having wafers...http://www.google.ca/patents/US6701204?utm_source=gb-gplus-sharePatent US6701204 - System and method for finding defective tools in a semiconductor fabrication facility
