A method of forming a patterned thin film comprises the steps of forming a first plating layer and a second plating layer. Each of the steps of forming the plating layers includes: the step of forming a coating film by applying a liquid resist to the layer below; the heat processing step of forming a...http://www.google.ca/patents/US6872579?utm_source=gb-gplus-sharePatent US6872579 - Thin-film coil and method of forming same
