A Spectroscopic Rotating Compensator Material System Investigation System including a Photo Array for simultaneously detecting a Multiplicity of Wavelengths is disclosed. The Spectroscopic Rotating Compensator Material System Investigation System is calibrated by a Mathematical Regression based technique...http://www.google.ca/patents/US5872630?utm_source=gb-gplus-sharePatent US5872630 - Regression calibrated spectroscopic rotating compensator ellipsometer system with photo array detector
