An optical system having a spatial light modulator (SLM), in which each pixel has an optical cavity and is adapted to: (i) change the intensity of a reflected beam by changing the size of the cavity and (ii) change the phase of the reflected beam by changing the position of the cavity with respect to...http://www.google.ca/patents/US7468828?utm_source=gb-gplus-sharePatent US7468828 - Spot array generation using a MEMS light modulator
