The present disclosure provides a stage device applicable to a semiconductor manufacturing apparatus. A stage device 10 comprises a Y-axis stage 20 and an X-axis stage 40, the Y-axis stage 20 including a fixed component 21 and a movable component 26 movable along the Y-axis, the X-axis stage 40 including...http://www.google.ca/patents/US7025005?utm_source=gb-gplus-sharePatent US7025005 - Stage device and angle detecting device
