A photosensitive sol-gel film containing an organometallic photosensitizer is deposited on the oxide containing surface layer of a silicon substrate. A pattern of white or ultra violet light incident to the photosensitive sol-gel film results in the unbinding of the photosensitizer from the exposed regions...http://www.google.ca/patents/US7283717?utm_source=gb-gplus-sharePatent US7283717 - Integrated optic devices and photosensitive sol-gel process for producing integrated optic devices
