A film-formation apparatus includes a film-formation chamber and a source gas supplying apparatus supplying a source gas to the film-formation chamber together with a carrier gas, wherein the source gas supplying apparatus includes a concentration detector detecting a concentration of the source gas...http://www.google.ca/patents/US20040007180?utm_source=gb-gplus-sharePatent US20040007180 - Film-formation apparatus and source supplying apparatus therefor, gas concentration measuring method
