An electromechanical dynamic force profile articulating mechanism for recovering or emulating true parallel plate capacitor actuation behaviors from deformable membranes used in MEMS systems. The curved deformation of flexible membranes causes their MEMS behavior to deviate from known interactions between...http://www.google.ca/patents/US20080212158?utm_source=gb-gplus-sharePatent US20080212158 - ELECTROMECHANICAL DYNAMIC FORCE PROFILE ARTICULATING MECHANISM
