A fluid proof mass accelerometer fabricated from bonded substrate layers. The device includes a plurality of micromachined fluid cavities which are joined by micromachined fluid channels. The fluid cavities extend from the bonded inner surfaces of the substrate layers to thin resilient membranes which...http://www.google.ca/patents/US5668319?utm_source=gb-gplus-sharePatent US5668319 - Micromachined accelerometer
