A 1 dimensional or 2 dimensional array of micromirror devices comprises a device substrate with a 1st surface and a 2nd surface, control circuitry disposed on said 1st surface and a plurality of micromirrors disposed on said 2nd surface. Each micromirror comprises a reflective surface that is substantially...http://www.google.ca/patents/US6862127?utm_source=gb-gplus-sharePatent US6862127 - High performance micromirror arrays and methods of manufacturing the same
