A semiconductor substrate has a sensor disposed in a surface layer on an entrance surface thereof for receiving incident light, and an intermediate-refractive-index film is disposed on the entire entrance surface of the semiconductor substrate either directly or with an insulating film interposed therebetween....http://www.google.ca/patents/US6379993?utm_source=gb-gplus-sharePatent US6379993 - Solid-state imaging device with a film of low hydrogen permeability and a method of manufacturing same
