A process using integrated sensor technology in which a micromachined sensing element and signal processing circuit are combined on a single semiconductor substrate to form, for example, an infrared sensor. The process is based on modifying a CMOS process to produce an improved layered micromachined...http://www.google.ca/patents/US6828172?utm_source=gb-gplus-sharePatent US6828172 - Process for a monolithically-integrated micromachined sensor and circuit
