A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and...http://www.google.ca/patents/US6947200?utm_source=gb-gplus-sharePatent US6947200 - Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
