An electrochemical sensor is provided that exhibits improved adhesion of the membrane to the nitride layer used as an insulating layer in silicon- or silicon-oxide-based electrochemical sensing devices. The sensing devices include a substrate, an oxide disposed on the substrate, a nitride disposed on...http://www.google.ca/patents/US7988838?utm_source=gb-gplus-sharePatent US7988838 - Adhesion of membranes on nitride layer in electrochemical sensors by attachment to underlying oxide layer
