A method of forming a micro-electromechanical system (MEMS) includes providing a cap substrate, providing a support substrate, depositing a conductive material over the support substrate, patterning the conductive material to form a gap stop and a contact, wherein the gap stop is separated form the contact...http://www.google.ca/patents/US8119431?utm_source=gb-gplus-sharePatent US8119431 - Method of forming a micro-electromechanical system (MEMS) having a gap stop
