This invention relates to a process for forming a metal interconnect comprising the steps of forming a concave in an insulating film formed on a substrate, forming a barrier metal film on the insulating film, forming an interconnect metal film over the whole surface such that the concave is filled with...http://www.google.ca/patents/US6930037?utm_source=gb-gplus-sharePatent US6930037 - Process for forming a metal interconnect
