A system is provided that simultaneously gathers three-dimensional and two-dimensional data for use in inspecting objects such as chip carriers for defects. Specifically, a source laser beam is directed to an object and forms a spot at the point of impingement at a known X-Y position on the object. The...http://www.google.ca/patents/US5859924?utm_source=gb-gplus-sharePatent US5859924 - Method and system for measuring object features
