The invention provides a method for forming a metal film for a thin film device so as to have certain gentle taper angles. The method is an improved fine work method to produce metal films such as light shutter films for thin film devices through the combined production method of a wet-etching step and...http://www.google.ca/patents/US20020022364?utm_source=gb-gplus-sharePatent US20020022364 - Method for producing a metal film, a thin film device having such metal film and a liquid crystal display device having such thin film device
