An optical spectroscopy tool is provided. In one embodiment a highly efficient means by which moderate resolution spectroscopy may be performed in the vacuum ultraviolet (VUV) is described. In one embodiment the techniques can be used as a high throughput spectrometer to spatially disperse wavelengths...http://www.google.ca/patents/US20080204711?utm_source=gb-gplus-sharePatent US20080204711 - Spectrometer with moveable detector element
