A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective...http://www.google.ca/patents/US20080192328?utm_source=gb-gplus-sharePatent US20080192328 - MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE
