Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed herein comprises a movable mirror....http://www.google.ca/patents/US20060077518?utm_source=gb-gplus-sharePatent US20060077518 - Mirror and mirror layer for optical modulator and method
