A method for forming a layer of material, particularly a dielectric material, on a substrate includes the steps of dispensing the material onto the substrate, spinning the substrate to produce a layer of the dispensed material, and vibrating the substrate to eliminate voids and/or gaps in the dispensed...http://www.google.ca/patents/US5925410?utm_source=gb-gplus-sharePatent US5925410 - Vibration-enhanced spin-on film techniques for semiconductor device processing
