A linear accelerometer is provided having a substrate, a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates, and an inertial mass substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive...http://www.google.ca/patents/US20030140700?utm_source=gb-gplus-sharePatent US20030140700 - Microfabricated linear accelerometer
