The integrated electromechanical microstructure comprises a base substrate and a cavity closed by a protective cover. Means for adjusting the pressure in the cavity after the protective cover has been sealed comprise at least one element made of pyrotechnic material combustion whereof releases gas into...http://www.google.ca/patents/US6828640?utm_source=gb-gplus-sharePatent US6828640 - Integrated electromechanical microstructure comprising pressure adjusting means in a sealed cavity and pressure adjustment process
