A method of fabricating an integrated spatial light modulator. The method includes providing a first substrate including a bonding surface, processing a device substrate to form at least an electrode layer, the electrode layer including a plurality of electrodes, and depositing a standoff layer on the...http://www.google.ca/patents/US7172921?utm_source=gb-gplus-sharePatent US7172921 - Method and structure for forming an integrated spatial light modulator
