The invention relates to a variable capacitor and method of making it. The variable capacitor comprises a fixed charge plate disposed in a substrate, a movable charge plate disposed above the fixed charge plate, and a stiffener affixed to the movable charge plate. The movable charge plate may be patterned...http://www.google.ca/patents/US6355534?utm_source=gb-gplus-sharePatent US6355534 - Variable tunable range MEMS capacitor
