A MEMS device and method of making same is disclosed. In one embodiment, a micro-switch includes a base assembly comprising a movable structure bearing a contact pad. The base assembly is wafer-scale bonded to a lid assembly comprising an activator and a signal path. The movable structure moves within...http://www.google.ca/patents/US8179215?utm_source=gb-gplus-sharePatent US8179215 - MEMS device with integral packaging
