Apparatus providing a low impedance RF return current path between a shield member and a pedestal in a semiconductor wafer processing chamber. The return path reduces RF voltage drop between the shield member and the pedestal during processing. The return path comprises a conductive strap connected to...http://www.google.ca/patents/US6221221?utm_source=gb-gplus-sharePatent US6221221 - Apparatus for providing RF return current path control in a semiconductor wafer processing system
