WO2010111153A3 - Display device with openings between sub-pixels and method of making same - Google Patents

Display device with openings between sub-pixels and method of making same Download PDF

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Publication number
WO2010111153A3
WO2010111153A3 PCT/US2010/028050 US2010028050W WO2010111153A3 WO 2010111153 A3 WO2010111153 A3 WO 2010111153A3 US 2010028050 W US2010028050 W US 2010028050W WO 2010111153 A3 WO2010111153 A3 WO 2010111153A3
Authority
WO
WIPO (PCT)
Prior art keywords
sub
columns
portions
reflective layer
pixels
Prior art date
Application number
PCT/US2010/028050
Other languages
French (fr)
Other versions
WO2010111153A2 (en
Inventor
Yi Tao
Fan Zhong
Original Assignee
Qualcomm Mems Technologies, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies, Inc. filed Critical Qualcomm Mems Technologies, Inc.
Priority to CN201080013628.5A priority Critical patent/CN102361814B/en
Priority to EP10711800A priority patent/EP2411321A2/en
Priority to JP2012502136A priority patent/JP5484558B2/en
Publication of WO2010111153A2 publication Critical patent/WO2010111153A2/en
Publication of WO2010111153A3 publication Critical patent/WO2010111153A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/05—Arrays
    • B81B2207/053—Arrays of movable structures

Abstract

An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.
PCT/US2010/028050 2009-03-23 2010-03-19 Display device with openings between sub-pixels and method of making same WO2010111153A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201080013628.5A CN102361814B (en) 2009-03-23 2010-03-19 Display device with openings between sub-pixels and method of making same
EP10711800A EP2411321A2 (en) 2009-03-23 2010-03-19 Display device with openings between sub-pixels and method of making same
JP2012502136A JP5484558B2 (en) 2009-03-23 2010-03-19 Display device having openings between sub-pixels and method for manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/409,425 US8270056B2 (en) 2009-03-23 2009-03-23 Display device with openings between sub-pixels and method of making same
US12/409,425 2009-03-23

Publications (2)

Publication Number Publication Date
WO2010111153A2 WO2010111153A2 (en) 2010-09-30
WO2010111153A3 true WO2010111153A3 (en) 2011-04-07

Family

ID=42737369

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2010/028050 WO2010111153A2 (en) 2009-03-23 2010-03-19 Display device with openings between sub-pixels and method of making same

Country Status (7)

Country Link
US (1) US8270056B2 (en)
EP (1) EP2411321A2 (en)
JP (1) JP5484558B2 (en)
KR (1) KR20110137358A (en)
CN (1) CN102361814B (en)
TW (1) TW201105568A (en)
WO (1) WO2010111153A2 (en)

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WO2010111153A2 (en) 2010-09-30
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