WO2010059950A1 - Method and structure for thin film photovoltaic cell using similar material junction - Google Patents
Method and structure for thin film photovoltaic cell using similar material junction Download PDFInfo
- Publication number
- WO2010059950A1 WO2010059950A1 PCT/US2009/065351 US2009065351W WO2010059950A1 WO 2010059950 A1 WO2010059950 A1 WO 2010059950A1 US 2009065351 W US2009065351 W US 2009065351W WO 2010059950 A1 WO2010059950 A1 WO 2010059950A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- copper
- surface region
- layer
- indium
- thin film
- Prior art date
Links
- 239000000463 material Substances 0.000 title claims abstract description 123
- 238000000034 method Methods 0.000 title claims abstract description 112
- 239000010409 thin film Substances 0.000 title claims abstract description 61
- 239000010949 copper Substances 0.000 claims abstract description 102
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 86
- 229910052802 copper Inorganic materials 0.000 claims abstract description 85
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 claims abstract description 65
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 claims abstract description 61
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910052738 indium Inorganic materials 0.000 claims abstract description 37
- 239000012535 impurity Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 19
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 17
- 239000011593 sulfur Substances 0.000 claims abstract description 17
- 239000006096 absorbing agent Substances 0.000 claims abstract description 13
- 238000007669 thermal treatment Methods 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims description 43
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 26
- OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 239000011787 zinc oxide Substances 0.000 claims description 13
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 11
- 229910001887 tin oxide Inorganic materials 0.000 claims description 9
- 239000012780 transparent material Substances 0.000 claims description 9
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims description 7
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 4
- GXAAOYDOGKQENU-UHFFFAOYSA-N [Al+3].[S--].[S--].[Cu++].[In+3] Chemical compound [Al+3].[S--].[S--].[Cu++].[In+3] GXAAOYDOGKQENU-UHFFFAOYSA-N 0.000 claims description 4
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 238000007747 plating Methods 0.000 claims 2
- 239000007769 metal material Substances 0.000 claims 1
- 125000000101 thioether group Chemical group 0.000 claims 1
- 238000012986 modification Methods 0.000 description 27
- 230000004048 modification Effects 0.000 description 27
- 238000010586 diagram Methods 0.000 description 20
- 241000894007 species Species 0.000 description 17
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 11
- 229910052951 chalcopyrite Inorganic materials 0.000 description 11
- 239000007789 gas Substances 0.000 description 11
- 238000000151 deposition Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002178 crystalline material Substances 0.000 description 4
- 230000005670 electromagnetic radiation Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- -1 which are layered Substances 0.000 description 4
- SEAVSGQBBULBCJ-UHFFFAOYSA-N [Sn]=S.[Cu] Chemical compound [Sn]=S.[Cu] SEAVSGQBBULBCJ-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- NFMAZVUSKIJEIH-UHFFFAOYSA-N bis(sulfanylidene)iron Chemical compound S=[Fe]=S NFMAZVUSKIJEIH-UHFFFAOYSA-N 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
- 229910000339 iron disulfide Inorganic materials 0.000 description 3
- 239000002028 Biomass Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical group S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 2
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 2
- 239000002674 ointment Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- MBMLMWLHJBBADN-UHFFFAOYSA-N Ferrous sulfide Chemical compound [Fe]=S MBMLMWLHJBBADN-UHFFFAOYSA-N 0.000 description 1
- 240000002329 Inga feuillei Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000003502 gasoline Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- PNHVEGMHOXTHMW-UHFFFAOYSA-N magnesium;zinc;oxygen(2-) Chemical compound [O-2].[O-2].[Mg+2].[Zn+2] PNHVEGMHOXTHMW-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000006072 paste Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000003348 petrochemical agent Substances 0.000 description 1
- 239000003209 petroleum derivative Substances 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910052979 sodium sulfide Inorganic materials 0.000 description 1
- GRVFOGOEDUUMBP-UHFFFAOYSA-N sodium sulfide (anhydrous) Chemical compound [Na+].[Na+].[S-2] GRVFOGOEDUUMBP-UHFFFAOYSA-N 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- DHCDFWKWKRSZHF-UHFFFAOYSA-N sulfurothioic S-acid Chemical compound OS(O)(=O)=S DHCDFWKWKRSZHF-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
- H01L31/0323—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2 characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
- H01L31/1852—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising a growth substrate not being an AIIIBV compound
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates generally to photovoltaic materials and manufacturing method. More particularly, the present invention provides a method and structure for manufacture of thin film photovoltaic cells.
- the present method and materials include absorber materials made of copper indium disulfide species, copper tin sulfide, iron disulfide, or others for single junction cells or multi-junction cells.
- Petrochemical energy includes gas and oil.
- Gas includes lighter forms such as butane and propane, commonly used to heat homes and serve as fuel for cooking.
- Gas also includes gasoline, diesel, and jet fuel, commonly used for transportation purposes. Heavier forms of petrochemicals can also be used to heat homes in some places.
- the supply of petrochemical fuel is limited and essentially fixed based upon the amount available on the planet Earth.
- hydroelectric power is derived from electric generators driven by the flow of water produced by dams such as the Hoover Dam in Nevada. The electric power generated is used to power a large portion of the city of Los Angeles in California. Clean and renewable sources of energy also include wind, waves, biomass, and the like. That is, windmills convert wind energy into more useful forms of energy such as electricity. Still other types of clean energy include solar energy. Specific details of solar energy can be found throughout the present background and more particularly below.
- Solar energy technology generally converts electromagnetic radiation from the sun to other useful forms of energy. These other forms of energy include thermal energy and electrical power.
- solar cells are often used. Although solar energy is environmentally clean and has been successful to a point, many limitations remain to be resolved before it becomes widely used throughout the world.
- one type of solar cell uses crystalline materials, which are derived from semiconductor material ingots. These crystalline materials can be used to fabricate optoelectronic devices that include photovoltaic and photodiode devices that convert electromagnetic radiation into electrical power.
- crystalline materials are often costly and difficult to make on a large scale. Additionally, devices made from such crystalline materials often have low energy conversion efficiencies.
- the present invention provides a method and structure for forming thin film semiconductor materials used for manufacturing photovoltaic cells.
- the present method and materials include absorber materials made of copper indium disulfide species, copper tin sulfide, iron disulfide, or others for single junction cells or multi-junction cells.
- a method for forming a thin film photovoltaic device includes providing a transparent substrate including a surface region. A first electrode layer is formed overlying the surface region. The method includes forming a copper layer overlying the first electrode layer and forming an indium layer overlying the copper layer to form a multi-layered structure. In a specific embodiment, the method includes subjecting at least the multi-layered structure to a thermal treatment process in an environment containing sulfur bearing species and forming a bulk copper indium disulfide material from at least the treatment process of the multi-layered structure. In a specific embodiment, the method forms a bulk copper indium disulfide material from at least the treatment process of the multi- layered structure.
- the bulk copper indium disulfide material having a surface region characterized by a copper poor surface region comprising a copper to indium atomic ratio of less than about 0.95:1.
- the copper poor surface region has n-type impurity characteristics.
- the bulk copper indium disulfide material excluding the copper poor surface region forms an absorber region and the copper poor surface region forming at least a portion of a window region for the photovoltaic cell.
- the method includes forming a high resistivity transparent material overlying the copper poor surface region having the n-type impurity characteristics.
- the high resistivity transparent layer uses a semiconductor material having an intrinsic semiconductor characteristic in a specific embodiment.
- a second electrode layer is formed overlying the high resistivity transparent layer.
- a thin film photovoltaic device in an alternative embodiment, includes a substrate comprising a surface region.
- the thin film photovoltaic device includes a first electrode layer overlying the surface region.
- a chalcopyrite material including a chalcopyrite material surface region overlies the first electrode layer.
- the chalcopyrite material includes a copper indium disulfide material and a copper poor copper indium disulfide surface region.
- the copper poor copper indium disulfide surface region has an atomic ratio of Cu:In of about 0.99 and less and has an n type impurity characteristics.
- the copper poor copper indium disulfide surface region provides for a window layer for the photovoltaic device.
- the thin film photovoltaic device also includes a second electrode layer overlying the window layer.
- a thin film photovoltaic device in a yet alternative embodiment, includes a substrate including a surface region. A first electrode layer overlies the surface region.
- the thin film photovoltaic device includes an absorber region overlying the first electrode layer.
- the absorber region includes a bulk copper indium disulfide material.
- the thin film photovoltaic device includes a window region comprising a surface region of the bulk copper indium disulfide material.
- the surface region of the bulk copper indium disulfide material is characterized by a copper poor surface region having a copper to indium atomic ratio of less than about 0.95:1. In a specific embodiment, the copper poor surface region having n-type impurity characteristics.
- the thin film photovoltaic device may include a high resistivity transparent material overlying the copper poor surface region having the n-type impurity characteristics.
- the high resistivity transparent layer includes a semiconductor material having an intrinsic semiconductor characteristic.
- the thin film photovoltaic device includes a second electrode layer overlying the high resistivity transparent layer.
- the second electrode layer includes a zinc oxide material having p-type impurity characteristics in a specific embodiment.
- the present invention uses starting materials that are commercially available to form a thin film of semiconductor bearing material overlying a suitable substrate member.
- the thin film of semiconductor bearing material can be further processed to form a semiconductor thin film material of desired characteristics, such as atomic stoichiometry, impurity concentration, carrier concentration, doping, and others.
- the thin film semiconductor material can be provided using a copper indium disulfide material.
- the copper indium disulfide material is characterized by a bandgap of about 1.55 eV.
- embodiments according to the present invention use environmentally friendly materials that are relatively less toxic than other thin-film photovoltaic materials.
- the present method and resulting structure is substantially free from a parasitic junction on an absorber layer based upon a copper poor chalcopyrite material.
- the present method uses the copper poor chalcopyrite material, which has an n type impurity characteristics, as a window layer for the photovoltaic cell.
- the open circuit voltage of the chalcopyrite material such as copper indium disulfide ranges from about 0.8 volts and greater and preferably 0.9 volts and greater or 1.0 volts and greater up to 1.2 volts.
- the benefits can be achieved.
- the present method and materials include absorber materials made of copper indium disulfide species, copper tin sulfide, iron disulfide, or others for single j unction cells or multi-j unction cells .
- Figures 1-8 are schematic diagrams illustrating a method and structure for forming a thin film photovoltaic device according to an embodiment of the present invention
- Figures 9-10 are simplified diagrams illustrating a method and structure for forming a thin film photovoltaic device including a copper poor surface region for a window layer according to an embodiment of the present invention.
- a method and a structure for forming semiconductor materials for photovoltaic applications are provided. More particularly, the present invention provides a method for manufacturing thin film photovoltaic devices.
- the method has been used to provide a copper indium disulfide thin film material for high efficiency solar cell application.
- the present invention has a much broader range of applicability, for example, embodiments of the present invention may be used to form other semiconducting thin films or multi layers comprising iron sulfide, cadmium sulfide, zinc selenide, and others, and metal oxides such as zinc oxide, iron oxide, copper oxide, and others.
- FIG. 1 is a schematic diagram illustrating a process of a method for forming a thin film photovoltaic device according to an embodiment of the present invention.
- the diagram is merely an example, which should not unduly limit the claims herein.
- a substrate 110 is provided.
- the substrate 110 includes a surface region 112 and is held in a process stage within a process chamber (not shown).
- the substrate 110 is an optically transparent solid material.
- the substrate 110 can be a glass, quartz, fused silica, or a plastic, or metal, or foil, or semiconductor, or other composite materials.
- the substrate can be a single material, multiple materials, which are layered, composites, or stacked, including combinations of these, and the like.
- the substrate can be a single material, multiple materials, which are layered, composites, or stacked, including combinations of these, and the like.
- FIG. 2 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention.
- the diagram is merely an example, which should not unduly limit the claims herein.
- the present invention provides a process for forming a thin film photovoltaic device is to form an electrode layer.
- a first electrode layer 120 is formed overlying the surface region 112 of the substrate 110.
- the first electrode layer 120 can be made of molybdenum using sputtering, evaporation (e.g., electron beam), electro plating, combination of these, and the like according to a specific embodiment.
- the thickness of the first electrode layer can be ranged from 100 nm to 2 micron and others, characterized by resistivity of about 100 Ohm/cm 2 to 10 Ohm/cm 2 and less according to a specific embodiment.
- the first electrode is made of molybdenum or tungsten, but can be others like copper, chromium, aluminum, nickel, or platinum. Of course, there can be other variations, modifications, and alternatives.
- FIG. 3 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention.
- the diagram is merely an example, which should not unduly limit the claims herein.
- a process of forming a copper layer overlying the first electrode layer formed in last process is a process of forming a copper layer overlying the first electrode layer formed in last process.
- a copper (Cu) layer 130 is formed overlying the first electrode layer 120.
- the copper layer is formed using a sputtering process.
- a DC magnetron sputtering process can be used to deposit Cu layer 130 onto the first electrode layer 120 under a following condition.
- the deposition pressure (using Ar gas) is controlled to be about 6.2 mTorr.
- the gas flow rate is set to about 32 seem.
- the deposition temperature can be just at room temperature without need of intentionally heating the substrate. Of course, minor heating may be resulted due to the plasma generated during the deposition. Additionally, the DC power supply of about 115 W may be required. According to certain embodiments, DC power in a range from 100 W to 150 W is suitable depending specific cases with different materials.
- the full deposition time for a Cu layer of 330 nm thickness is about 6 minutes or more. Of course, the deposition condition can be varied and modified according to a specific embodiment.
- the method includes forming a barrier layer 125 overlying the first electrode layer to form an interface region between the first electrode layer and the copper layer.
- the interface region is maintained substantially free from metal disulfide layer having a semiconductor characteristic that is different from the copper indium disulfide material during later processing steps.
- the barrier layer has suitable conductive characteristics and can be reflective to allow electromagnetic radiation to reflect back or can also be transparent or the like.
- the barrier layer is selected from platinum, titanium, chromium, or silver. Of course, there can be other variations, modifications, and alternatives.
- FIG. 4 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention.
- the diagram is merely an example, which should not unduly limit the claims herein.
- One skilled in the art would recognize other variations, modifications, and alternatives.
- a process of providing an indium (In) layer overlying the copper layer is illustrated.
- the indium layer 140 is formed overlying the copper layer 130.
- the indium layer is deposited over the copper layer using a sputtering process.
- a DC magnetron sputtering process can be used to deposit In layer 140 overlying the Cu layer 120 under a similar condition for depositing the Cu layer.
- the deposition time for the indium layer may be shorter than that for Cu layer. For example, 2 minutes and 45 seconds may be enough for depositing an In layer of about 410 nm in thickness according to a specific embodiment.
- the indium layer is provided overlying the copper layer by an electro plating process, or others dependent on specific embodiment.
- Figures 1 through 4 illustrate a formation of a multilayered structure 150 comprising copper and indium on a transparent substrate provided by processes of a method of forming a thin film photovoltaic device.
- the copper layer 130 as well as the indium layer 140 are provided with a selected stoichiometry to ensure that the multilayered structure 150 is a Cu-rich material with an atomic ratio of Cu:In greater than 1 therein.
- the atomic ratio of Cu:In can be in a range from 1.2:1 to 2.0:1 or larger depending upon the specific embodiment.
- the atomic ratio of Cu:In is between 1.35:1 and 1.60:1.
- the atomic ratio of Cu:In is selected to be about 1.55:1.
- the Cu:In ratio is introduced as copper rich, which consumes substantially all of the indium species, in the resulting structure.
- the formation process of indium layer 140 substantially causes no change in atomic stoichiometry in the copper layer 130 formed earlier.
- the formation process of the indium layer 140 is performed earlier overlying the first electrode layer 120 while the formation process of the copper layer 130 is performed later overlying the indium layer 140.
- FIG. 5 is a schematic diagram illustrating a process, of the method for forming a thin film photovoltaic device according to an embodiment of the present invention.
- the diagram is merely an example, which should not unduly limit the claims herein.
- the formed multilayered structure 150 comprising at least an indium layer 140 over a copper layer 130 is subjected to a thermal treatment process 200 in an environment containing a sulfur bearing species 210 at an adequate pressure and at a temperature of about 400 Degrees Celsius to about 600 Degrees Celsius for about three to fifteen minutes for a rapid thermal process according to a specific embodiment.
- the sulfur bearing species are in a fluid phase.
- the sulfur can be provided in a solution, which has dissolved Na 2 S, CS 2 , (NHU) 2 S, thiosulfate, and others.
- the sulfur bearing species 210 are hydrogen sulfide in gas phase.
- the sulfur can be provided in a solid phase. In a solid phase, elemental sulfur can be heated and allowed to boil, which vaporizes into a gas phase, e.g., S n .
- the gas phase sulfur is allowed to react to the indium/copper layers.
- other combinations of sulfur species can be used.
- the thermal treatment process 200 includes certain predetermined ramp-up and ramp down period with certain predetermined speed for temperature changes.
- the thermal treatment process is a rapid thermal annealing process.
- the hydrogen sulfide gas is provided through one or more entry valves with flow rate control into the process chamber where the hydrogen sulfide gas pressure is under controlled by one or more pumps.
- entry valves with flow rate control into the process chamber where the hydrogen sulfide gas pressure is under controlled by one or more pumps.
- the sulfur can be provided as a layer overlying the indium and copper layers or copper and indium layers.
- the sulfur material is provided as a thin layer or patterned layer.
- the sulfur can be provided as a slurry, powder, solid material, gas, paste, or other suitable form.
- the thermal treatment process 200 causes a reaction between copper indium material within the multilayered structure 150 and the sulfur bearing species 210, thereby forming a layer of copper indium disulfide material (or a copper indium disulfide thin film) 220.
- the copper indium disulfide material or copper indium disulfide thin film 220 is transformed by incorporating sulfur ions/atoms stripped or decomposed from the sulfur bearing species into the multilayered structure 150 with indium atoms and copper atoms mutually diffused therein.
- the thermal treatment process 200 would result in a formation of a cap layer over the transformed copper indium disulfide material 220.
- the cap layer contains a thickness of substantially copper sulfide material 221 but substantially free of indium atoms.
- the copper sulfide material 221 includes a surface region 225 of the same copper sulfide material substantially free of indium atoms.
- the formation of this cap layer is under Cu-rich conditions for the original Cu-In bearing multilayered structure 150.
- the thickness of the copper sulfide material 221 is on an order of about five to ten nanometers and greater based on original multilayered structure 150 with indium layer 140 overlying copper layer 130.
- FIG. 6 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention.
- the diagram is merely an example, which should not unduly limit the claims herein.
- a dip process 300 is performed to the copper sulfide material 221 that covers the copper indium disulfide thin film 220.
- the dip process is performed by exposing the surface region 225 to 1 to about 10 weight % solution of potassium cyanide 310 according to a specific embodiment.
- the potassium cyanide acts as an etchant that is capable of selectively removing copper sulfide material 221.
- the etching process starts from the exposed surface region 225 and down to the thickness of the copper sulfide material 221 and substantially stopped at the interface between the copper sulfide material 221 and copper indium disulfide material 220.
- the copper sulfide cap layer 221 is selectively removed by the etching process so that a new surface region 228 of the remaining copper indium disulfide thin film 220 is exposed according to a specific embodiment.
- the etch selectivity is about 1:100 or more between copper sulfide and copper indium disulfide.
- other selective etching species can be used.
- the etching species can be hydrogen peroxide.
- the copper sulfide material can be mechanically removed, chemically removed, electrically removed, or any combination of these, among others.
- the absorber layer made of copper indium disulfide is about 1 to 10 microns, but can be others. Of course, there can be other variations, modifications, and alternatives.
- FIG. 7 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention.
- the diagram is merely an example, which should not unduly limit the claims herein.
- One skilled in the art would recognize other variations, modifications, and alternatives.
- a p- type copper indium disulfide film 320 is formed.
- the previously-formed copper indium disulfide material 220 has possessed a p-type semiconducting characteristic and is substantially the same as the p-type copper indium disulfide film 320.
- the copper indium disulfide material 220 is subjected to additional doping process to provide a p- type impurity density therein for the purpose of an optimum I-V characteristic of the high efficiency thin film photovoltaic devices.
- aluminum species are mixed into the copper indium disulfide material 220.
- the copper indium disulfide material 220 is mixed with a copper indium aluminum disulfide material to form the film 320.
- a window layer 310 is formed overlying the p-type copper indium disulfide material 320.
- the window layer 310 can be selected from a group materials consisting of a cadmium sulfide (CdS), a zinc sulfide (ZnS), zinc selenium (ZnSe), zinc oxide (ZnO), zinc magnesium oxide (ZnMgO), or others and may be doped with impurities for conductivity, e.g., n + -type.
- the window layer 310 is intended to serve another part of a PN-junction associated with a photovoltaic cell.
- the window layer 310 is heavily doped to form an n + -type semiconductor layer.
- indium species are used as the doping material to cause formation of the n + -type characteristic associated with the window layer 310.
- the doping process is performed using suitable conditions.
- ZnO window layer that is doped with aluminum can range from about 200 to 500 nanometers.
- FIG. 8 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention.
- the diagram is merely an example, which should not unduly limit the claims herein.
- a conductive layer 330 is provided at least on a selected portion of window layer 310 to form a top electrode layer for the photovoltaic device.
- conductive layer 330 is a transparent conductive oxide (TCO) layer.
- TCO can be selected from a group consisting of In 2 O 3 :Sn (ITO), ZnO: Al (AZO), SnO 2 :F (TFO), or others.
- the formation of the TCO layer is followed by a patterning step for effectively carried out the function of top electrode layer for the photovoltaic device with considerations of maximizing the efficiency of the thin film based photovoltaic devices.
- the TCO layer can function as a window layer, which essentially eliminates a separate window layer.
- the present method maintains an interface region between the first electrode layer overlying the surface region and the copper indium disulfide material substantially free from a metal disulfide layer having different semiconductor characteristics from the copper indium disulfide material.
- the metal disulfide layer is selected from molybdenum disulfide layer or the like.
- the interface region is characterized by a surface morphology substantially preventing any formation of the metal disulfide layer, which is characterized by a thickness of about 5 to 10 nanometers.
- the present method includes a thermal process during at least the maintaining process or a portion of the maintaining process of at least 300 Degrees Celsius and greater to prevent any formation of the metal disulfide layer, which can be the molybdenum disulfide or like layer.
- a thermal process during at least the maintaining process or a portion of the maintaining process of at least 300 Degrees Celsius and greater to prevent any formation of the metal disulfide layer, which can be the molybdenum disulfide or like layer.
- the present invention provides a method for forming a thin film photovoltaic device, which is outlined below.
- a transparent substrate comprising a surface region
- the copper indium disulfide material comprising a copper-to- indium atomic ratio ranging from about 1.2:1 to about 2:1 or 1.35:1 to about 1.60:1 (or preferably and alternatively from about 0.99:1 or 0.95:1 and less) and a thickness of substantially copper sulfide material having a copper sulfide surface region;
- the present invention provides a method and resulting photovoltaic structure using a copper poor surface region for the window layer and free from parasitic junction regions in the absorber layer.
- Other alternatives can also be provided where steps are added, one or more steps are removed, or one or more steps are provided in a different sequence without departing from the scope of the claims herein. Details of the present method and structure can be found throughout the present specification and more particularly below.
- FIGs 9-11 are simplified diagrams illustrating a method and structure for forming a thin film photovoltaic device according to an embodiment of the present invention. These diagrams are merely examples, which should not unduly limit the scope of the claims herein.
- the present method begins with partially completed photovoltaic device 900.
- the device includes a transparent substrate 901 comprising a surface region, although other substrates can be used.
- the photovoltaic device also includes a first electrode layer 903 overlying the surface region.
- the first electrode layer can be any conductive material including conductive metals, oxides, and semiconductor or combinations of these, as well as any material described herein and outside of the present specification.
- the photovoltaic device includes a chalcopyrite material, which acts as an absorber 905 for the photovoltaic device.
- the chalcopyrite material can include, among others, copper indium disulfide material, copper indium aluminum disulfide, copper indium gallium disulfide, combinations of these, and others.
- the chalcopyrite material is copper rich, or alternatively copper poor and characterized by one or more portions having a copper to indium atomic ratio of 0.99:1 and less or 0.95:1 and less.
- the copper indium disulfide material has one or more copper poor regions, which are preferably compensated using an ionic species.
- the chalcopyrite has a thin layer of copper sulfide 907, which has been previously described, as may remain as a residue or fixed material when the bulk material is copper rich.
- copper sulfide 907 which has been previously described, as may remain as a residue or fixed material when the bulk material is copper rich.
- the method selectively removes the thin layer of copper sulfide.
- the thin layer is removed 909 using a solution of potassium cyanide (KCN) or other suitable technique, e.g., dry etching, plasma etching, sputtering, or others.
- KCN potassium cyanide
- the method may cause formation of a copper poor surface region 1001.
- the copper poor surface is characterized by a copper to indium atomic ratio of less than about 0.95 : 1 or 0.99: 1.
- the copper poor surface region is characterized as an n-type chalcopyrite material, which forms a PN junction with the p- type copper indium disulfide material, which can be rich in copper.
- the copper poor surface region can function as a window layer for the photovoltaic device in a specific embodiment.
- the copper poor surface region may be further treated to provide for an adequate n-type impurity concentration for proper and efficient charge separation for the photovoltaic cell.
- the copper poor surface region may have defects such as one or more pin holes in a thickness of the copper poor surface region.
- the method includes forming an optional high resistivity transparent (HRT) layer 1003 overlying the copper poor surface region, which has n-type impurity characteristics.
- the HRT layer can use an intrinsic semiconductor material that forms a second transparent conductive oxide 1005 in a specific embodiment.
- the HRT layer can use an intrinsic zinc oxide material.
- the HRT layer may be an intrinsic semiconductor material that forms a window layer for the photovoltaic cell.
- the HRT layer may use an intrinsic cadmium sulfide material, but can be other materials.
- the HRT layer used intrinsic zinc oxide material or intrinsic tin oxide material having a doping level between about IxIO 11 and about 1x10 13 cm "3 .
- the HRT layer can have a thickness between about 100 nm and 1000 nm and a resistance between 1 ohm/square and 0.0001 ohm/square.
- the second transparent conductive oxide material and the corresponding HRT layer can include tin doped indium oxide, indium oxide, fluorine doped tin oxide, tin oxide, AZO, and others.
- the highly resistive material protects against pin holes, and other potential defects, and the like.
- Embodiments of the present invention can be applied in a method for forming high efficiency photovoltaic cells described in U.S. Patent Application No. 12/475,858 filed by inventor Howard W.H. Lee on June 1, 2009 and be applied in a method and structure for forming thin film tandem photovoltaic cell described in U.S. Patent Application No. 12/562,086 filed by inventor Howard W.H. Lee on September 17, 2009, commonly assigned and incorporated by reference herein for all purposes.
Abstract
A method for forming a thin film photovoltaic device. The method provides a transparent substrate including a surface region. A first electrode layer overlies the surface region. A copper layer is formed overlying the first electrode layer and an indium layer is formed overlying the copper layer to form a multi-layered structure. At least the multi-layered structure is subjected to a thermal treatment process in an environment containing a sulfur bearing species to forming a bulk copper indium disulfide. The bulk copper indium disulfide material has a surface region characterized by a copper poor surface region having a copper to indium atomic ratio ofless than about 0.95:1 and n-type impurity characteristics. The bulk copper indium disulfide material excluding the copper poor surface region fonns an absorber region and the copper poor surface region fonns at least a portion of a window region for the thin film photovoltaic device.
Description
METHOD AND STRUCTURE FOR THIN FILM PHOTOVOLTAIC CELL USING SIMILAR MATERIAL JUNCTION
CROSS-REFERENCES TO RELATED APPLICATIONS [0001] This application claims priority to U.S. Provisional Patent Application No. 61/116,625, filed November 20, 2008, entitled "METHOD AND STRUCTURE FOR THIN FILM PHOTOVOLTAIC CELL USING SIMILAR MATERIAL JUNCTION" by inventor Howard W.H. Lee, commonly assigned and incorporated by reference herein for all purposes.
BACKGROUND OF THE INVENTION
[0004] The present invention relates generally to photovoltaic materials and manufacturing method. More particularly, the present invention provides a method and structure for manufacture of thin film photovoltaic cells. Merely by way of example, the present method and materials include absorber materials made of copper indium disulfide species, copper tin sulfide, iron disulfide, or others for single junction cells or multi-junction cells.
[0005] From the beginning of time, mankind has been challenged to find way of harnessing energy. Energy comes in the forms such as petrochemical, hydroelectric, nuclear, wind, biomass, solar, and more primitive forms such as wood and coal. Over the past century, modern civilization has relied upon petrochemical energy as an important energy source. Petrochemical energy includes gas and oil. Gas includes lighter forms such as butane and propane, commonly used to heat homes and serve as fuel for cooking. Gas also includes gasoline, diesel, and jet fuel, commonly used for transportation purposes. Heavier forms of petrochemicals can also be used to heat homes in some places. Unfortunately, the supply of petrochemical fuel is limited and essentially fixed based upon the amount available on the planet Earth. Additionally, as more people use petroleum products in growing amounts, it is rapidly becoming a scarce resource, which will eventually become depleted over time.
[0006] More recently, environmentally clean and renewable sources of energy have been desired. An example of a clean source of energy is hydroelectric power. Hydroelectric power is derived from electric generators driven by the flow of water produced by dams such as the Hoover Dam in Nevada. The electric power generated is used to power a large portion of the city of Los Angeles in California. Clean and renewable sources of energy also include wind, waves, biomass, and the like. That is, windmills convert wind energy into more useful forms of energy such as electricity. Still other types of clean energy include solar energy. Specific details of solar energy can be found throughout the present background and more particularly below.
[0007] Solar energy technology generally converts electromagnetic radiation from the sun to other useful forms of energy. These other forms of energy include thermal energy and electrical power. For electrical power applications, solar cells are often used. Although solar energy is environmentally clean and has been successful to a point, many limitations remain to be resolved before it becomes widely used throughout the world. As an example, one type of solar cell uses crystalline materials, which are derived from semiconductor material ingots. These crystalline materials can be used to fabricate optoelectronic devices that include photovoltaic and photodiode devices that convert electromagnetic radiation into electrical power. However, crystalline materials are often costly and difficult to make on a large scale. Additionally, devices made from such crystalline materials often have low energy conversion efficiencies. Other types of solar cells use "thin film" technology to form a thin film of photosensitive material to be used to convert electromagnetic radiation into electrical power. Similar limitations exist with the use of thin film technology in making solar cells. That is, efficiencies are often poor. Additionally, film reliability is often poor and cannot be used for extensive periods of time in conventional environmental applications. Often, thin films are difficult to mechanically integrate with each other. These and other limitations of these conventional technologies can be found throughout the present specification and more particularly below.
[0008] From the above, it is seen that improved techniques for manufacturing photovoltaic materials and resulting devices are desired.
BRIEF SUMMARY OF THE INVENTION
[0009] According to embodiments of the present invention, a method and a structure for forming thin film semiconductor materials for photovoltaic applications are provided. More particularly, the present invention provides a method and structure for forming thin film semiconductor materials used for manufacturing photovoltaic cells. Merely by way of example, the present method and materials include absorber materials made of copper indium disulfide species, copper tin sulfide, iron disulfide, or others for single junction cells or multi-junction cells.
[0010] In a specific embodiment, a method for forming a thin film photovoltaic device is provided. The method includes providing a transparent substrate including a surface region. A first electrode layer is formed overlying the surface region. The method includes forming a copper layer overlying the first electrode layer and forming an indium layer overlying the copper layer to form a multi-layered structure. In a specific embodiment, the method includes subjecting at least the multi-layered structure to a thermal treatment process in an environment containing sulfur bearing species and forming a bulk copper indium disulfide material from at least the treatment process of the multi-layered structure. In a specific embodiment, the method forms a bulk copper indium disulfide material from at least the treatment process of the multi- layered structure. The bulk copper indium disulfide material having a surface region characterized by a copper poor surface region comprising a copper to indium atomic ratio of less than about 0.95:1. In a specific embodiment, the copper poor surface region has n-type impurity characteristics. In a specific embodiment, the bulk copper indium disulfide material excluding the copper poor surface region forms an absorber region and the copper poor surface region forming at least a portion of a window region for the photovoltaic cell. In a specific embodiment, the method includes forming a high resistivity transparent material overlying the copper poor surface region having the n-type impurity characteristics. The high resistivity transparent layer uses a semiconductor material having an intrinsic semiconductor characteristic in a specific embodiment. A second electrode layer is formed overlying the high resistivity transparent layer.
[0011] In an alternative embodiment, a thin film photovoltaic device is provided. The thin film photovoltaic device includes a substrate comprising a surface region. The thin film
photovoltaic device includes a first electrode layer overlying the surface region. A chalcopyrite material including a chalcopyrite material surface region overlies the first electrode layer. In a specific embodiment, the chalcopyrite material includes a copper indium disulfide material and a copper poor copper indium disulfide surface region. The copper poor copper indium disulfide surface region has an atomic ratio of Cu:In of about 0.99 and less and has an n type impurity characteristics. In a specific embodiment, the copper poor copper indium disulfide surface region provides for a window layer for the photovoltaic device. The thin film photovoltaic device also includes a second electrode layer overlying the window layer.
[0012] In a yet alternative embodiment, a thin film photovoltaic device is provided. The thin film photovoltaic device includes a substrate including a surface region. A first electrode layer overlies the surface region. The thin film photovoltaic device includes an absorber region overlying the first electrode layer. In a specific embodiment, the absorber region includes a bulk copper indium disulfide material. The thin film photovoltaic device includes a window region comprising a surface region of the bulk copper indium disulfide material. The surface region of the bulk copper indium disulfide material is characterized by a copper poor surface region having a copper to indium atomic ratio of less than about 0.95:1. In a specific embodiment, the copper poor surface region having n-type impurity characteristics. The thin film photovoltaic device may include a high resistivity transparent material overlying the copper poor surface region having the n-type impurity characteristics. The high resistivity transparent layer includes a semiconductor material having an intrinsic semiconductor characteristic. The thin film photovoltaic device includes a second electrode layer overlying the high resistivity transparent layer. The second electrode layer includes a zinc oxide material having p-type impurity characteristics in a specific embodiment.
[0013] Many benefits are achieved by ways of present invention. For example, the present invention uses starting materials that are commercially available to form a thin film of semiconductor bearing material overlying a suitable substrate member. The thin film of semiconductor bearing material can be further processed to form a semiconductor thin film material of desired characteristics, such as atomic stoichiometry, impurity concentration, carrier concentration, doping, and others. In a specific embodiment, the thin film semiconductor material can be provided using a copper indium disulfide material. In a specific embodiment, the
copper indium disulfide material is characterized by a bandgap of about 1.55 eV. Additionally, embodiments according to the present invention use environmentally friendly materials that are relatively less toxic than other thin-film photovoltaic materials. In a preferred embodiment, the present method and resulting structure is substantially free from a parasitic junction on an absorber layer based upon a copper poor chalcopyrite material. In a specific embodiment, the present method uses the copper poor chalcopyrite material, which has an n type impurity characteristics, as a window layer for the photovoltaic cell. Also in a preferred embodiment, the open circuit voltage of the chalcopyrite material such as copper indium disulfide ranges from about 0.8 volts and greater and preferably 0.9 volts and greater or 1.0 volts and greater up to 1.2 volts. Depending on the embodiment, one or more of the benefits can be achieved. These and other benefits will be described in more detailed throughout the present specification and particularly below.
[0014] Merely by way of example, the present method and materials include absorber materials made of copper indium disulfide species, copper tin sulfide, iron disulfide, or others for single j unction cells or multi-j unction cells .
BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figures 1-8 are schematic diagrams illustrating a method and structure for forming a thin film photovoltaic device according to an embodiment of the present invention;
[0016] Figures 9-10 are simplified diagrams illustrating a method and structure for forming a thin film photovoltaic device including a copper poor surface region for a window layer according to an embodiment of the present invention.
DETAILED DESCRIPTION OF THE INVENTION
[0017] According to embodiments of the present invention, a method and a structure for forming semiconductor materials for photovoltaic applications are provided. More particularly, the present invention provides a method for manufacturing thin film photovoltaic devices.
Merely by way of example, the method has been used to provide a copper indium disulfide thin film material for high efficiency solar cell application. But it would be recognized that the present invention has a much broader range of applicability, for example, embodiments of the
present invention may be used to form other semiconducting thin films or multi layers comprising iron sulfide, cadmium sulfide, zinc selenide, and others, and metal oxides such as zinc oxide, iron oxide, copper oxide, and others.
[0018] Figure 1 is a schematic diagram illustrating a process of a method for forming a thin film photovoltaic device according to an embodiment of the present invention. The diagram is merely an example, which should not unduly limit the claims herein. One skilled in the art would recognize other variations, modifications, and alternatives. As shown in Figure 1, a substrate 110 is provided. In an embodiment, the substrate 110 includes a surface region 112 and is held in a process stage within a process chamber (not shown). In another embodiment, the substrate 110 is an optically transparent solid material. For example, the substrate 110 can be a glass, quartz, fused silica, or a plastic, or metal, or foil, or semiconductor, or other composite materials. Depending upon the embodiment, the substrate can be a single material, multiple materials, which are layered, composites, or stacked, including combinations of these, and the like. Of course there can be other variations, modifications, and alternatives.
[0019] Figure 2 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention. The diagram is merely an example, which should not unduly limit the claims herein. One skilled in the art would recognize other variations, modifications, and alternatives. As shown in Figure 2, the present invention provides a process for forming a thin film photovoltaic device is to form an electrode layer. In particular, a first electrode layer 120 is formed overlying the surface region 112 of the substrate 110. For example, the first electrode layer 120 can be made of molybdenum using sputtering, evaporation (e.g., electron beam), electro plating, combination of these, and the like according to a specific embodiment. The thickness of the first electrode layer can be ranged from 100 nm to 2 micron and others, characterized by resistivity of about 100 Ohm/cm2 to 10 Ohm/cm2 and less according to a specific embodiment. In a preferred embodiment, the first electrode is made of molybdenum or tungsten, but can be others like copper, chromium, aluminum, nickel, or platinum. Of course, there can be other variations, modifications, and alternatives.
[0020] Figure 3 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention. The diagram is
merely an example, which should not unduly limit the claims herein. One skilled in the art would recognize other variations, modifications, and alternatives. As shown is a process of forming a copper layer overlying the first electrode layer formed in last process. In particular, a copper (Cu) layer 130 is formed overlying the first electrode layer 120. For example, the copper layer is formed using a sputtering process. In one example, a DC magnetron sputtering process can be used to deposit Cu layer 130 onto the first electrode layer 120 under a following condition. The deposition pressure (using Ar gas) is controlled to be about 6.2 mTorr. The gas flow rate is set to about 32 seem. The deposition temperature can be just at room temperature without need of intentionally heating the substrate. Of course, minor heating may be resulted due to the plasma generated during the deposition. Additionally, the DC power supply of about 115 W may be required. According to certain embodiments, DC power in a range from 100 W to 150 W is suitable depending specific cases with different materials. The full deposition time for a Cu layer of 330 nm thickness is about 6 minutes or more. Of course, the deposition condition can be varied and modified according to a specific embodiment.
[0021] In a preferred embodiment, the method includes forming a barrier layer 125 overlying the first electrode layer to form an interface region between the first electrode layer and the copper layer. In a specific embodiment, the interface region is maintained substantially free from metal disulfide layer having a semiconductor characteristic that is different from the copper indium disulfide material during later processing steps. Depending upon the embodiment, the barrier layer has suitable conductive characteristics and can be reflective to allow electromagnetic radiation to reflect back or can also be transparent or the like. In a specific embodiment, the barrier layer is selected from platinum, titanium, chromium, or silver. Of course, there can be other variations, modifications, and alternatives.
[0022] Figure 4 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention. The diagram is merely an example, which should not unduly limit the claims herein. One skilled in the art would recognize other variations, modifications, and alternatives. As shown, a process of providing an indium (In) layer overlying the copper layer is illustrated. In particular, the indium layer 140 is formed overlying the copper layer 130. For example, the indium layer is deposited over the copper layer using a sputtering process. In one example, a DC magnetron sputtering
process can be used to deposit In layer 140 overlying the Cu layer 120 under a similar condition for depositing the Cu layer. The deposition time for the indium layer may be shorter than that for Cu layer. For example, 2 minutes and 45 seconds may be enough for depositing an In layer of about 410 nm in thickness according to a specific embodiment. In another example, the indium layer is provided overlying the copper layer by an electro plating process, or others dependent on specific embodiment.
[0023] According to embodiments of the present invention, Figures 1 through 4 illustrate a formation of a multilayered structure 150 comprising copper and indium on a transparent substrate provided by processes of a method of forming a thin film photovoltaic device. In one embodiment, the copper layer 130 as well as the indium layer 140 are provided with a selected stoichiometry to ensure that the multilayered structure 150 is a Cu-rich material with an atomic ratio of Cu:In greater than 1 therein. For example, the atomic ratio of Cu:In can be in a range from 1.2:1 to 2.0:1 or larger depending upon the specific embodiment. In an implementation, the atomic ratio of Cu:In is between 1.35:1 and 1.60:1. In another implementation, the atomic ratio of Cu:In is selected to be about 1.55:1. In a preferred embodiment, the Cu:In ratio is introduced as copper rich, which consumes substantially all of the indium species, in the resulting structure. In a specific embodiment, the formation process of indium layer 140 substantially causes no change in atomic stoichiometry in the copper layer 130 formed earlier. In another specific embodiment, the formation process of the indium layer 140 is performed earlier overlying the first electrode layer 120 while the formation process of the copper layer 130 is performed later overlying the indium layer 140.
[0024] Figure 5 is a schematic diagram illustrating a process, of the method for forming a thin film photovoltaic device according to an embodiment of the present invention. The diagram is merely an example, which should not unduly limit the claims herein. One skilled in the art would recognize other variations, modifications, and alternatives. As shown, the formed multilayered structure 150 comprising at least an indium layer 140 over a copper layer 130 is subjected to a thermal treatment process 200 in an environment containing a sulfur bearing species 210 at an adequate pressure and at a temperature of about 400 Degrees Celsius to about 600 Degrees Celsius for about three to fifteen minutes for a rapid thermal process according to a specific embodiment. In one example, the sulfur bearing species are in a fluid phase. As an
example, the sulfur can be provided in a solution, which has dissolved Na2S, CS2, (NHU)2S, thiosulfate, and others. In another example, the sulfur bearing species 210 are hydrogen sulfide in gas phase. In other embodiments, the sulfur can be provided in a solid phase. In a solid phase, elemental sulfur can be heated and allowed to boil, which vaporizes into a gas phase, e.g., Sn. In a specific embodiment, the gas phase sulfur is allowed to react to the indium/copper layers. In other embodiments, other combinations of sulfur species can be used. Of course, the thermal treatment process 200 includes certain predetermined ramp-up and ramp down period with certain predetermined speed for temperature changes. For example, the thermal treatment process is a rapid thermal annealing process. The hydrogen sulfide gas is provided through one or more entry valves with flow rate control into the process chamber where the hydrogen sulfide gas pressure is under controlled by one or more pumps. Of course, there can be other variations, modifications, and alternatives.
[0025] In a specific embodiment, the sulfur can be provided as a layer overlying the indium and copper layers or copper and indium layers. In a specific embodiment, the sulfur material is provided as a thin layer or patterned layer. Depending upon the embodiment, the sulfur can be provided as a slurry, powder, solid material, gas, paste, or other suitable form. Of course, there can be other variations, modifications, and alternatives.
[0026] Referring to the Figure 5, the thermal treatment process 200 causes a reaction between copper indium material within the multilayered structure 150 and the sulfur bearing species 210, thereby forming a layer of copper indium disulfide material (or a copper indium disulfide thin film) 220. In one example, the copper indium disulfide material or copper indium disulfide thin film 220 is transformed by incorporating sulfur ions/atoms stripped or decomposed from the sulfur bearing species into the multilayered structure 150 with indium atoms and copper atoms mutually diffused therein. In an embodiment, the thermal treatment process 200 would result in a formation of a cap layer over the transformed copper indium disulfide material 220. The cap layer contains a thickness of substantially copper sulfide material 221 but substantially free of indium atoms. The copper sulfide material 221 includes a surface region 225 of the same copper sulfide material substantially free of indium atoms. In a specific embodiment, the formation of this cap layer is under Cu-rich conditions for the original Cu-In bearing multilayered structure 150. Depending on the applications, the thickness of the copper sulfide material 221 is on an
order of about five to ten nanometers and greater based on original multilayered structure 150 with indium layer 140 overlying copper layer 130. Of course, there can be other variations, modifications, and alternatives.
[0027] Figure 6 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention. The diagram is merely an example, which should not unduly limit the claims herein. One skilled in the art would recognize other variations, modifications, and alternatives. As shown in Figure 6, a dip process 300 is performed to the copper sulfide material 221 that covers the copper indium disulfide thin film 220. In particular, the dip process is performed by exposing the surface region 225 to 1 to about 10 weight % solution of potassium cyanide 310 according to a specific embodiment. The potassium cyanide acts as an etchant that is capable of selectively removing copper sulfide material 221. The etching process starts from the exposed surface region 225 and down to the thickness of the copper sulfide material 221 and substantially stopped at the interface between the copper sulfide material 221 and copper indium disulfide material 220. As a result the copper sulfide cap layer 221 is selectively removed by the etching process so that a new surface region 228 of the remaining copper indium disulfide thin film 220 is exposed according to a specific embodiment. In a preferred embodiment, the etch selectivity is about 1:100 or more between copper sulfide and copper indium disulfide. In other embodiments, other selective etching species can be used. In a specific embodiment, the etching species can be hydrogen peroxide. In other embodiments, other techniques including electro-chemical etching, plasma etching, sputter-etching, or any combination of these can be used. In a specific embodiment, the copper sulfide material can be mechanically removed, chemically removed, electrically removed, or any combination of these, among others. In a specific embodiment, the absorber layer made of copper indium disulfide is about 1 to 10 microns, but can be others. Of course, there can be other variations, modifications, and alternatives.
[0028] Figure 7 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention. The diagram is merely an example, which should not unduly limit the claims herein. One skilled in the art would recognize other variations, modifications, and alternatives. As shown in Figure 7, a p- type copper indium disulfide film 320 is formed. In certain embodiments, the previously-formed
copper indium disulfide material 220 has possessed a p-type semiconducting characteristic and is substantially the same as the p-type copper indium disulfide film 320. In another embodiment, the copper indium disulfide material 220 is subjected to additional doping process to provide a p- type impurity density therein for the purpose of an optimum I-V characteristic of the high efficiency thin film photovoltaic devices. In a specific embodiment, aluminum species are mixed into the copper indium disulfide material 220. In another example, the copper indium disulfide material 220 is mixed with a copper indium aluminum disulfide material to form the film 320. Of course, there can be other variations, modifications, and alternatives.
[0029] Subsequently, a window layer 310 is formed overlying the p-type copper indium disulfide material 320. The window layer 310 can be selected from a group materials consisting of a cadmium sulfide (CdS), a zinc sulfide (ZnS), zinc selenium (ZnSe), zinc oxide (ZnO), zinc magnesium oxide (ZnMgO), or others and may be doped with impurities for conductivity, e.g., n+-type. The window layer 310 is intended to serve another part of a PN-junction associated with a photovoltaic cell. Therefore, the window layer 310, during or after its formation, is heavily doped to form an n+-type semiconductor layer. In one example, indium species are used as the doping material to cause formation of the n+-type characteristic associated with the window layer 310. In another example, the doping process is performed using suitable conditions. In a specific embodiment, ZnO window layer that is doped with aluminum can range from about 200 to 500 nanometers. Of course, there can be other variations, modifications, and alternative
[0030] Figure 8 is a schematic diagram illustrating a process of the method for forming a thin film photovoltaic device according to an embodiment of the present invention. The diagram is merely an example, which should not unduly limit the claims herein. One skilled in the art would recognize other variations, modifications, and alternatives. As shown in Figure 8, a conductive layer 330 is provided at least on a selected portion of window layer 310 to form a top electrode layer for the photovoltaic device. In one embodiment, conductive layer 330 is a transparent conductive oxide (TCO) layer. For example, TCO can be selected from a group consisting of In2O3:Sn (ITO), ZnO: Al (AZO), SnO2:F (TFO), or others. In another embodiment, the formation of the TCO layer is followed by a patterning step for effectively carried out the function of top electrode layer for the photovoltaic device with considerations of maximizing the
efficiency of the thin film based photovoltaic devices. In certain embodiments, the TCO layer can function as a window layer, which essentially eliminates a separate window layer. Of course there can be other variations, modifications, and alternatives.
[0031] In a preferred embodiment, the present method maintains an interface region between the first electrode layer overlying the surface region and the copper indium disulfide material substantially free from a metal disulfide layer having different semiconductor characteristics from the copper indium disulfide material. Depending upon the type of first electrode material, the metal disulfide layer is selected from molybdenum disulfide layer or the like. In a specific embodiment, the interface region is characterized by a surface morphology substantially preventing any formation of the metal disulfide layer, which is characterized by a thickness of about 5 to 10 nanometers. In a preferred embodiment, the present method includes a thermal process during at least the maintaining process or a portion of the maintaining process of at least 300 Degrees Celsius and greater to prevent any formation of the metal disulfide layer, which can be the molybdenum disulfide or like layer. Of course, there can be other variations, modifications, and alternatives.
[0032] In a specific embodiment, the present invention provides a method for forming a thin film photovoltaic device, which is outlined below.
1. Start;
2. Provide a transparent substrate comprising a surface region;
3. Form a first electrode layer overlying the surface region;
4. Form a copper layer overlying the first electrode layer;
5. Form an indium layer overlying the copper layer to form a multi-layered structure (alternatively indium is formed first or a multiple layers are sandwiched together);
6. Subject at least the multi-layered structure to a thermal treatment process in an environment containing a sulfur bearing species;
7. Form a bulk copper indium disulfide material from at least the treatment process of the multi-layered structure, the copper indium disulfide material comprising a copper-to- indium atomic ratio ranging from about 1.2:1 to about 2:1 or 1.35:1 to about 1.60:1 (or
preferably and alternatively from about 0.99:1 or 0.95:1 and less) and a thickness of substantially copper sulfide material having a copper sulfide surface region;
8. Remove the thickness of the copper sulfide material to expose a surface region having a copper poor surface region comprising a copper to indium atomic ratio of less than about 0.95 : 1 or 0.99: 1 , the copper poor surface region has a n type impurity characteristics; and
9. Form an optional high resistivity transparent layer overlying the copper poor surface region having the n type impurity characteristic;
10. Form a second electrode layer; and
11. Perform other steps, as desired.
[0033] The above sequence of steps provides a method according to an embodiment of the present invention. In a specific embodiment, the present invention provides a method and resulting photovoltaic structure using a copper poor surface region for the window layer and free from parasitic junction regions in the absorber layer. Other alternatives can also be provided where steps are added, one or more steps are removed, or one or more steps are provided in a different sequence without departing from the scope of the claims herein. Details of the present method and structure can be found throughout the present specification and more particularly below.
[0034] Figures 9-11 are simplified diagrams illustrating a method and structure for forming a thin film photovoltaic device according to an embodiment of the present invention. These diagrams are merely examples, which should not unduly limit the scope of the claims herein.
One of ordinary skill in the art would recognize other variations, modifications, and alternatives. In a specific embodiment, the present method begins with partially completed photovoltaic device 900. As shown, the device includes a transparent substrate 901 comprising a surface region, although other substrates can be used. The photovoltaic device also includes a first electrode layer 903 overlying the surface region. In a specific embodiment, the first electrode layer can be any conductive material including conductive metals, oxides, and semiconductor or combinations of these, as well as any material described herein and outside of the present specification.
[0035] In a specific embodiment, the photovoltaic device includes a chalcopyrite material, which acts as an absorber 905 for the photovoltaic device. As shown, the chalcopyrite material can include, among others, copper indium disulfide material, copper indium aluminum disulfide, copper indium gallium disulfide, combinations of these, and others. In a specific embodiment, the chalcopyrite material is copper rich, or alternatively copper poor and characterized by one or more portions having a copper to indium atomic ratio of 0.99:1 and less or 0.95:1 and less. In a preferred embodiment, the copper indium disulfide material has one or more copper poor regions, which are preferably compensated using an ionic species. Of course, there can be other variations, modifications, and alternatives. In a specific embodiment, the chalcopyrite has a thin layer of copper sulfide 907, which has been previously described, as may remain as a residue or fixed material when the bulk material is copper rich. Of course, there can be other variations, modifications, and alternatives.
[0036] Referring to Figure 10, the method selectively removes the thin layer of copper sulfide. In a specific embodiment, the thin layer is removed 909 using a solution of potassium cyanide (KCN) or other suitable technique, e.g., dry etching, plasma etching, sputtering, or others. In a specific embodiment, the method may cause formation of a copper poor surface region 1001. In a specific embodiment, the copper poor surface is characterized by a copper to indium atomic ratio of less than about 0.95 : 1 or 0.99: 1. In a specific embodiment, the copper poor surface region is characterized as an n-type chalcopyrite material, which forms a PN junction with the p- type copper indium disulfide material, which can be rich in copper. The copper poor surface region can function as a window layer for the photovoltaic device in a specific embodiment. In certain embodiments, the copper poor surface region may be further treated to provide for an adequate n-type impurity concentration for proper and efficient charge separation for the photovoltaic cell. Of course, there can be other variations, modifications, and alternatives.
[0037] Depending on the embodiment, the copper poor surface region may have defects such as one or more pin holes in a thickness of the copper poor surface region. In a specific embodiment, the method includes forming an optional high resistivity transparent (HRT) layer 1003 overlying the copper poor surface region, which has n-type impurity characteristics. The HRT layer can use an intrinsic semiconductor material that forms a second transparent conductive oxide 1005 in a specific embodiment. For example, for an aluminum doped zinc
oxide material as the second transparent conductive oxide, the HRT layer can use an intrinsic zinc oxide material. In an alternative embodiment, the HRT layer may be an intrinsic semiconductor material that forms a window layer for the photovoltaic cell. For example, for a CIGS based photovoltaic device using an n-type cadmium sulfide material as a window, the HRT layer may use an intrinsic cadmium sulfide material, but can be other materials. Of course one skilled in the art would recognize other variations, modifications, and alternatives. In an implementation of the present invention, the HRT layer used intrinsic zinc oxide material or intrinsic tin oxide material having a doping level between about IxIO11 and about 1x1013 cm"3. The HRT layer can have a thickness between about 100 nm and 1000 nm and a resistance between 1 ohm/square and 0.0001 ohm/square. As merely an example, the second transparent conductive oxide material and the corresponding HRT layer can include tin doped indium oxide, indium oxide, fluorine doped tin oxide, tin oxide, AZO, and others. In a specific embodiment, the highly resistive material protects against pin holes, and other potential defects, and the like. Of course, there can be other variations, modifications, and alternatives.
[0038] Although the above has been illustrated according to specific embodiments, there can r be other modifications, alternatives, and variations. Embodiments of the present invention can be applied in a method for forming high efficiency photovoltaic cells described in U.S. Patent Application No. 12/475,858 filed by inventor Howard W.H. Lee on June 1, 2009 and be applied in a method and structure for forming thin film tandem photovoltaic cell described in U.S. Patent Application No. 12/562,086 filed by inventor Howard W.H. Lee on September 17, 2009, commonly assigned and incorporated by reference herein for all purposes. Additionally, although the above has been described in terms of copper indium disulfide, other like materials such as copper indium gallium disulfide, copper indium aluminum disulfide, combinations thereof, and others can be used. Other materials may include CuGaS2, CuInSe2 (CIS), Cu(InGa)Se2 (CIGS), Cu(InAl)Se2, Cu(In5Ga)SSe, combinations of these, and the like. It is understood that the examples and embodiments described herein are for illustrative purposes only and that various modifications or changes in light thereof will be suggested to persons skilled in the art and are to be included within the spirit and purview of this application and scope of the appended claims.
Claims
1. A method for forming a thin film photovoltaic device, the method comprising: providing a transparent substrate comprising a surface region; forming a first electrode layer overlying the .surface region; forming a copper layer overlying the first electrode layer; forming an indium layer overlying the copper layer to form a multi-layered structure; subjecting at least the multi- layered structure to a thermal treatment process in an environment containing a sulfur bearing species; forming a bulk copper indium disulfide material from at least the treatment process of the multi-layered structure, the bulk copper indium disulfide material having a surface region characterized by a copper poor surface region comprising a copper to indium atomic ratio of less than about 0.95:1, the copper poor surface region having an n-type impurity characteristics, the bulk copper indium disulfide material excluding the copper poor surface region forming an absorber region and the copper poor surface region forming at least a portion of a window region; forming a high resistivity transparent material overlying the copper poor surface region having the n-type impurity characteristics, the high resistivity transparent layer comprising a semiconductor material having an intrinsic semiconductor characteristic; and forming a second electrode layer having p-type impurity characteristics overlying the high resistivity transparent layer.
2. The method of claim 1 wherein the copper poor region having the n-type impurity characteristics provides for a window layer.
3. The method of claim 1 wherein the high resistivity transparent layer is optional.
4. The method of claim 1 wherein the first electrode layer comprises a metal material.
5. The method of claim 1 wherein the first electrode layer comprises a .transparent conductive oxide material.
6. The method of claim 1 wherein the first electrode layer is a transparent conductive oxide selected from: aluminum doped zinc oxide, indium doped tin oxide (ITO), or fluorine doped tin oxide.
7. The method of claim 1 wherein the bulk copper indium disulfide comprising a thickness of copper sulfide material, the thickness of copper sulfide material being selectively removed using a solution of potassium cyanide.
8. The method of claim 1 wherein the thermal treatment process of the copper poor surface comprises a temperature ranging from about 100 Degrees Celsius to about 500 Degrees Celsius.
9. The method of claim 1 wherein the forming of the copper layer is provided by a sputtering process or plating process.
10. The method of claim 1 wherein the forming of the indium layer is provided by a sputtering process.
11. The method of claim 1 wherein the forming of the indium layer is provided by a plating process.
12. The method of claim 1 wherein the bulk copper indium disulfide comprises p-type impurity characteristic.
13. The method of claim 1 further comprising introducing an indium species in the window layer to cause formation of an n+-type semiconductor characteristic.
14. The method of claim 1 wherein the bulk copper indium disulfide is mixed with a copper indium aluminum disulfide or copper indium gallium disulfide.
15. The method of claim 1 wherein the sulfide bearing species comprise hydrogen sulfide in fluid phase.
16. The method of claim 1 wherein the second electrode layer is a transparent conductive oxide material.
17. The method of claim 16 wherein the transparent conductive oxide material is selected from aluminum doped zinc oxide, indium doped tin oxide (ITO), or fluorine doped tin oxide.
18. The method of claim 1 wherein the high resistivity transparent material is selected from intrinsic zinc oxide material or intrinsic tin oxide material.
19. A thin film photovoltaic device, the thin film photovoltaic device comprises: a substrate comprising a surface region; a first electrode layer overlying the surface region; a bulk copper indium disulfide material, the bulk copper indium disulfide material having a surface region characterized by a copper poor surface region comprising a copper to indium atomic ratio of less than about 0.95:1, the copper poor surface region having an n-type impurity characteristics; a high resistivity transparent material overlying the copper poor surface region having the n-type impurity characteristics, the high resistivity transparent layer comprising a semiconductor material having an intrinsic semiconductor characteristic; and a second electrode layer comprising a zinc oxide material having p-type impurity characteristics overlying the high resistivity transparent layer.
20. A thin film photovoltaic device, the thin film photovoltaic device comprises: a substrate comprising a surface region; a first electrode layer overlying the surface region; an absorber region comprising a bulk copper indium disulfide material; a window region comprising a surface region of the bulk copper indium disulfide material, the surface region being characterized by a copper poor surface region comprising a copper to indium atomic ratio of less than about 0.95: 1 , the copper poor surface region having n- type impurity characteristics; a high resistivity transparent material overlying the copper poor surface region having the n-type impurity characteristics, the high resistivity transparent layer comprising a semiconductor material having an intrinsic semiconductor characteristic; and a second electrode layer comprising a zinc oxide material having p-type impurity characteristics overlying the high resistivity transparent layer.
21. The thin film photovoltaic device of claim 20 wherein the high resistivity transparent material comprises intrinsic zinc oxide material or intrinsic tin oxide material having a doping level between about 1x1011 and about 1x1013 cm"3.
22. The thin film photovoltaic device of claim 20 wherein the high resistivity transparent material comprises a thickness between about 100 nm and 1000 ran and a resistance between 1 ohm/square and 0.0001 ohm/square.
23. The thin film photovoltaic device of claim 20 further comprises a window layer comprising an n-type cadmium sulfide material overlying the copper poor surface region.
24. The thin film photovoltaic device of claim 22 wherein the high resistivity transparent material comprises an intrinsic cadmium sulfide material.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112009002518T DE112009002518T5 (en) | 2008-11-20 | 2009-11-20 | Method and structure for thin-film photovoltaic cell using a transition of similar material |
CN200980144974.4A CN102210026B (en) | 2008-11-20 | 2009-11-20 | Method and structure for thin film photovoltaic cell using similar material junction |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11662508P | 2008-11-20 | 2008-11-20 | |
US61/116,625 | 2008-11-20 | ||
US12/621,489 | 2009-11-18 | ||
US12/621,489 US8344243B2 (en) | 2008-11-20 | 2009-11-18 | Method and structure for thin film photovoltaic cell using similar material junction |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010059950A1 true WO2010059950A1 (en) | 2010-05-27 |
Family
ID=42171028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2009/065351 WO2010059950A1 (en) | 2008-11-20 | 2009-11-20 | Method and structure for thin film photovoltaic cell using similar material junction |
Country Status (4)
Country | Link |
---|---|
US (1) | US8344243B2 (en) |
CN (1) | CN102210026B (en) |
DE (1) | DE112009002518T5 (en) |
WO (1) | WO2010059950A1 (en) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8017860B2 (en) | 2006-05-15 | 2011-09-13 | Stion Corporation | Method and structure for thin film photovoltaic materials using bulk semiconductor materials |
US20080300918A1 (en) * | 2007-05-29 | 2008-12-04 | Commercenet Consortium, Inc. | System and method for facilitating hospital scheduling and support |
US8071179B2 (en) | 2007-06-29 | 2011-12-06 | Stion Corporation | Methods for infusing one or more materials into nano-voids if nanoporous or nanostructured materials |
US8287942B1 (en) | 2007-09-28 | 2012-10-16 | Stion Corporation | Method for manufacture of semiconductor bearing thin film material |
US8759671B2 (en) | 2007-09-28 | 2014-06-24 | Stion Corporation | Thin film metal oxide bearing semiconductor material for single junction solar cell devices |
US7998762B1 (en) | 2007-11-14 | 2011-08-16 | Stion Corporation | Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration |
US8642138B2 (en) | 2008-06-11 | 2014-02-04 | Stion Corporation | Processing method for cleaning sulfur entities of contact regions |
US9087943B2 (en) | 2008-06-25 | 2015-07-21 | Stion Corporation | High efficiency photovoltaic cell and manufacturing method free of metal disulfide barrier material |
US8003432B2 (en) | 2008-06-25 | 2011-08-23 | Stion Corporation | Consumable adhesive layer for thin film photovoltaic material |
US7855089B2 (en) | 2008-09-10 | 2010-12-21 | Stion Corporation | Application specific solar cell and method for manufacture using thin film photovoltaic materials |
US8476104B1 (en) | 2008-09-29 | 2013-07-02 | Stion Corporation | Sodium species surface treatment of thin film photovoltaic cell and manufacturing method |
US8026122B1 (en) | 2008-09-29 | 2011-09-27 | Stion Corporation | Metal species surface treatment of thin film photovoltaic cell and manufacturing method |
US8394662B1 (en) | 2008-09-29 | 2013-03-12 | Stion Corporation | Chloride species surface treatment of thin film photovoltaic cell and manufacturing method |
US8008112B1 (en) | 2008-09-29 | 2011-08-30 | Stion Corporation | Bulk chloride species treatment of thin film photovoltaic cell and manufacturing method |
US8501521B1 (en) | 2008-09-29 | 2013-08-06 | Stion Corporation | Copper species surface treatment of thin film photovoltaic cell and manufacturing method |
US8236597B1 (en) | 2008-09-29 | 2012-08-07 | Stion Corporation | Bulk metal species treatment of thin film photovoltaic cell and manufacturing method |
US8008110B1 (en) | 2008-09-29 | 2011-08-30 | Stion Corporation | Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method |
US8425739B1 (en) | 2008-09-30 | 2013-04-23 | Stion Corporation | In chamber sodium doping process and system for large scale cigs based thin film photovoltaic materials |
US7910399B1 (en) | 2008-09-30 | 2011-03-22 | Stion Corporation | Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates |
US8383450B2 (en) | 2008-09-30 | 2013-02-26 | Stion Corporation | Large scale chemical bath system and method for cadmium sulfide processing of thin film photovoltaic materials |
US7863074B2 (en) | 2008-09-30 | 2011-01-04 | Stion Corporation | Patterning electrode materials free from berm structures for thin film photovoltaic cells |
US7947524B2 (en) | 2008-09-30 | 2011-05-24 | Stion Corporation | Humidity control and method for thin film photovoltaic materials |
US8741689B2 (en) | 2008-10-01 | 2014-06-03 | Stion Corporation | Thermal pre-treatment process for soda lime glass substrate for thin film photovoltaic materials |
US20110018103A1 (en) | 2008-10-02 | 2011-01-27 | Stion Corporation | System and method for transferring substrates in large scale processing of cigs and/or cis devices |
US8003430B1 (en) | 2008-10-06 | 2011-08-23 | Stion Corporation | Sulfide species treatment of thin film photovoltaic cell and manufacturing method |
US8435826B1 (en) | 2008-10-06 | 2013-05-07 | Stion Corporation | Bulk sulfide species treatment of thin film photovoltaic cell and manufacturing method |
US8168463B2 (en) | 2008-10-17 | 2012-05-01 | Stion Corporation | Zinc oxide film method and structure for CIGS cell |
TWI373851B (en) * | 2008-11-25 | 2012-10-01 | Nexpower Technology Corp | Stacked-layered thin film solar cell and manufacturing method thereof |
US8507786B1 (en) | 2009-06-27 | 2013-08-13 | Stion Corporation | Manufacturing method for patterning CIGS/CIS solar cells |
US8398772B1 (en) | 2009-08-18 | 2013-03-19 | Stion Corporation | Method and structure for processing thin film PV cells with improved temperature uniformity |
FR2951022B1 (en) * | 2009-10-07 | 2012-07-27 | Nexcis | MANUFACTURE OF THIN LAYERS WITH PHOTOVOLTAIC PROPERTIES, BASED ON TYPE I-III-VI2 ALLOY, BY SUCCESSIVE ELECTRO-DEPOSITS AND THERMAL POST-TREATMENT. |
US8809096B1 (en) | 2009-10-22 | 2014-08-19 | Stion Corporation | Bell jar extraction tool method and apparatus for thin film photovoltaic materials |
US8859880B2 (en) | 2010-01-22 | 2014-10-14 | Stion Corporation | Method and structure for tiling industrial thin-film solar devices |
US8263494B2 (en) | 2010-01-25 | 2012-09-11 | Stion Corporation | Method for improved patterning accuracy for thin film photovoltaic panels |
US9096930B2 (en) | 2010-03-29 | 2015-08-04 | Stion Corporation | Apparatus for manufacturing thin film photovoltaic devices |
US8461061B2 (en) | 2010-07-23 | 2013-06-11 | Stion Corporation | Quartz boat method and apparatus for thin film thermal treatment |
US8628997B2 (en) | 2010-10-01 | 2014-01-14 | Stion Corporation | Method and device for cadmium-free solar cells |
US8728200B1 (en) | 2011-01-14 | 2014-05-20 | Stion Corporation | Method and system for recycling processing gas for selenization of thin film photovoltaic materials |
US8998606B2 (en) | 2011-01-14 | 2015-04-07 | Stion Corporation | Apparatus and method utilizing forced convection for uniform thermal treatment of thin film devices |
US8436445B2 (en) | 2011-08-15 | 2013-05-07 | Stion Corporation | Method of manufacture of sodium doped CIGS/CIGSS absorber layers for high efficiency photovoltaic devices |
US8822261B2 (en) * | 2011-09-26 | 2014-09-02 | First Solar, Inc. | Methods of making photovoltaic devices |
JP2018509762A (en) | 2015-02-26 | 2018-04-05 | ダイナミック ソーラー システムズ アクツィエンゲゼルシャフトDynamic Solar Systems Ag | Obtaining PV film structure by room temperature method and room temperature manufacturing method of PV film structure |
CN107534085B (en) * | 2015-02-26 | 2021-05-11 | 动态太阳能系统公司 | Method for the room-temperature production of electrical thin layers, use thereof, and thin-layer heating system obtained in this way |
WO2016134706A1 (en) | 2015-02-26 | 2016-09-01 | Dynamic Solar Systems Ag | Method for producing electrotechnical thin layers at room temperature, and electrotechnical thin layer |
CN105140338B (en) * | 2015-07-29 | 2017-07-04 | 云南师范大学 | A kind of inexpensive FeS2The preparation method of thin film solar cell |
CN106531827A (en) * | 2015-09-15 | 2017-03-22 | 株式会社东芝 | Photoelectric conversion element, solar cell, solar cell module, and solar power generating system |
JP2017059657A (en) * | 2015-09-16 | 2017-03-23 | 株式会社東芝 | Photoelectric conversion device and solar battery |
CN108878558A (en) * | 2018-06-27 | 2018-11-23 | 北京铂阳顶荣光伏科技有限公司 | CIGS solar battery and preparation method thereof |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4332974A (en) * | 1979-06-28 | 1982-06-01 | Chevron Research Company | Multilayer photovoltaic cell |
US5501744A (en) * | 1992-01-13 | 1996-03-26 | Photon Energy, Inc. | Photovoltaic cell having a p-type polycrystalline layer with large crystals |
US5868869A (en) * | 1995-06-07 | 1999-02-09 | Photon Energy, Inc. | Thin film photovoltaic device and process of manufacture |
US20070193623A1 (en) * | 2006-02-22 | 2007-08-23 | Guardian Industries Corp. | Electrode structure for use in electronic device and method of making same |
Family Cites Families (218)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3520732A (en) | 1965-10-22 | 1970-07-14 | Matsushita Electric Ind Co Ltd | Photovoltaic cell and process of preparation of same |
US3828722A (en) | 1970-05-01 | 1974-08-13 | Cogar Corp | Apparatus for producing ion-free insulating layers |
US3975211A (en) | 1975-03-28 | 1976-08-17 | Westinghouse Electric Corporation | Solar cells and method for making same |
US4062038A (en) | 1976-01-28 | 1977-12-06 | International Business Machines Corporation | Radiation responsive device |
US4263336A (en) * | 1979-11-23 | 1981-04-21 | Motorola, Inc. | Reduced pressure induction heated reactor and method |
US4727047A (en) * | 1980-04-10 | 1988-02-23 | Massachusetts Institute Of Technology | Method of producing sheets of crystalline material |
US5217564A (en) | 1980-04-10 | 1993-06-08 | Massachusetts Institute Of Technology | Method of producing sheets of crystalline material and devices made therefrom |
US4335266A (en) | 1980-12-31 | 1982-06-15 | The Boeing Company | Methods for forming thin-film heterojunction solar cells from I-III-VI.sub.2 |
US4441113A (en) | 1981-02-13 | 1984-04-03 | Energy Conversion Devices, Inc. | P-Type semiconductor material having a wide band gap |
US4444113A (en) * | 1981-04-06 | 1984-04-24 | The United States Of America As Represented By The Secretary Of The Army | High-pressure self-sealing obturator in sabot discard projectile |
US4465575A (en) | 1981-09-21 | 1984-08-14 | Atlantic Richfield Company | Method for forming photovoltaic cells employing multinary semiconductor films |
DE3314197A1 (en) | 1982-04-28 | 1983-11-03 | Energy Conversion Devices, Inc., 48084 Troy, Mich. | P-CONDUCTING AMORPHOUS SILICON ALLOY WITH A LARGE BAND GAP AND MANUFACTURING PROCESS THEREFOR |
US4442310A (en) * | 1982-07-15 | 1984-04-10 | Rca Corporation | Photodetector having enhanced back reflection |
US4518855A (en) * | 1982-09-30 | 1985-05-21 | Spring-Mornne, Inc. | Method and apparatus for statically aligning shafts and monitoring shaft alignment |
US4461922A (en) | 1983-02-14 | 1984-07-24 | Atlantic Richfield Company | Solar cell module |
US4471155A (en) | 1983-04-15 | 1984-09-11 | Energy Conversion Devices, Inc. | Narrow band gap photovoltaic devices with enhanced open circuit voltage |
US4517403A (en) * | 1983-05-16 | 1985-05-14 | Atlantic Richfield Company | Series connected solar cells and method of formation |
US4724011A (en) * | 1983-05-16 | 1988-02-09 | Atlantic Richfield Company | Solar cell interconnection by discrete conductive regions |
US4532372A (en) | 1983-12-23 | 1985-07-30 | Energy Conversion Devices, Inc. | Barrier layer for photovoltaic devices |
US4598306A (en) | 1983-07-28 | 1986-07-01 | Energy Conversion Devices, Inc. | Barrier layer for photovoltaic devices |
US4499658A (en) * | 1983-09-06 | 1985-02-19 | Atlantic Richfield Company | Solar cell laminates |
US4589194A (en) * | 1983-12-29 | 1986-05-20 | Atlantic Richfield Company | Ultrasonic scribing of thin film solar cells |
US4542255A (en) | 1984-01-03 | 1985-09-17 | Atlantic Richfield Company | Gridded thin film solar cell |
US4581108A (en) * | 1984-01-06 | 1986-04-08 | Atlantic Richfield Company | Process of forming a compound semiconductive material |
US4661370A (en) * | 1984-02-08 | 1987-04-28 | Atlantic Richfield Company | Electric discharge processing of thin films |
US4507181A (en) * | 1984-02-17 | 1985-03-26 | Energy Conversion Devices, Inc. | Method of electro-coating a semiconductor device |
US4611091A (en) | 1984-12-06 | 1986-09-09 | Atlantic Richfield Company | CuInSe2 thin film solar cell with thin CdS and transparent window layer |
US4599154A (en) | 1985-03-15 | 1986-07-08 | Atlantic Richfield Company | Electrically enhanced liquid jet processing |
US4623601A (en) | 1985-06-04 | 1986-11-18 | Atlantic Richfield Company | Photoconductive device containing zinc oxide transparent conductive layer |
JPH0682625B2 (en) | 1985-06-04 | 1994-10-19 | シーメンス ソーラー インダストリーズ,エル.ピー. | Deposition method of zinc oxide film |
US4638111A (en) * | 1985-06-04 | 1987-01-20 | Atlantic Richfield Company | Thin film solar cell module |
US4663495A (en) * | 1985-06-04 | 1987-05-05 | Atlantic Richfield Company | Transparent photovoltaic module |
US4798660A (en) * | 1985-07-16 | 1989-01-17 | Atlantic Richfield Company | Method for forming Cu In Se2 films |
US4625070A (en) | 1985-08-30 | 1986-11-25 | Atlantic Richfield Company | Laminated thin film solar module |
JPS6273784A (en) | 1985-09-27 | 1987-04-04 | Sanyo Electric Co Ltd | Photovoltaic device |
US4865999A (en) | 1987-07-08 | 1989-09-12 | Glasstech Solar, Inc. | Solar cell fabrication method |
US4775425A (en) | 1987-07-27 | 1988-10-04 | Energy Conversion Devices, Inc. | P and n-type microcrystalline semiconductor alloy material including band gap widening elements, devices utilizing same |
US4816082A (en) * | 1987-08-19 | 1989-03-28 | Energy Conversion Devices, Inc. | Thin film solar cell including a spatially modulated intrinsic layer |
US4968354A (en) | 1987-11-09 | 1990-11-06 | Fuji Electric Co., Ltd. | Thin film solar cell array |
US5045409A (en) | 1987-11-27 | 1991-09-03 | Atlantic Richfield Company | Process for making thin film solar cell |
US4793283A (en) | 1987-12-10 | 1988-12-27 | Sarkozy Robert F | Apparatus for chemical vapor deposition with clean effluent and improved product yield |
US5008062A (en) * | 1988-01-20 | 1991-04-16 | Siemens Solar Industries, L.P. | Method of fabricating photovoltaic module |
US5259883A (en) | 1988-02-16 | 1993-11-09 | Kabushiki Kaisha Toshiba | Method of thermally processing semiconductor wafers and an apparatus therefor |
US4915745A (en) * | 1988-09-22 | 1990-04-10 | Atlantic Richfield Company | Thin film solar cell and method of making |
US5180686A (en) * | 1988-10-31 | 1993-01-19 | Energy Conversion Devices, Inc. | Method for continuously deposting a transparent oxide material by chemical pyrolysis |
US4873118A (en) | 1988-11-18 | 1989-10-10 | Atlantic Richfield Company | Oxygen glow treating of ZnO electrode for thin film silicon solar cell |
US4996108A (en) * | 1989-01-17 | 1991-02-26 | Simon Fraser University | Sheets of transition metal dichalcogenides |
US4950615A (en) | 1989-02-06 | 1990-08-21 | International Solar Electric Technology, Inc. | Method and making group IIB metal - telluride films and solar cells |
FR2646560B1 (en) | 1989-04-27 | 1994-01-14 | Solems Sa | METHOD FOR IMPROVING THE SPECTRAL RESPONSE OF AN IMPROVED PHOTOCONDUCTOR STRUCTURE, SOLAR CELL AND PHOTORECEPTIVE STRUCTURE |
US5028274A (en) | 1989-06-07 | 1991-07-02 | International Solar Electric Technology, Inc. | Group I-III-VI2 semiconductor films for solar cell application |
EP0421133B1 (en) | 1989-09-06 | 1995-12-20 | Sanyo Electric Co., Ltd. | Manufacturing method of a flexible photovoltaic device |
US5078803A (en) * | 1989-09-22 | 1992-01-07 | Siemens Solar Industries L.P. | Solar cells incorporating transparent electrodes comprising hazy zinc oxide |
JPH03124067A (en) | 1989-10-07 | 1991-05-27 | Showa Shell Sekiyu Kk | Photovoltaic device and its manufacture |
US5011565A (en) * | 1989-12-06 | 1991-04-30 | Mobil Solar Energy Corporation | Dotted contact solar cell and method of making same |
US5154777A (en) | 1990-02-26 | 1992-10-13 | Mcdonnell Douglas Corporation | Advanced survivable space solar power system |
DK170189B1 (en) | 1990-05-30 | 1995-06-06 | Yakov Safir | Process for the manufacture of semiconductor components, as well as solar cells made therefrom |
EP0460287A1 (en) | 1990-05-31 | 1991-12-11 | Siemens Aktiengesellschaft | Novel chalcopyrite solar cell |
EP0468094B1 (en) | 1990-07-24 | 1995-10-11 | Siemens Aktiengesellschaft | Process for producing a chalcopyrite solar cell |
JP2729239B2 (en) | 1990-10-17 | 1998-03-18 | 昭和シェル石油株式会社 | Integrated photovoltaic device |
US5528397A (en) | 1991-12-03 | 1996-06-18 | Kopin Corporation | Single crystal silicon transistors for display panels |
US6784492B1 (en) | 1991-03-18 | 2004-08-31 | Canon Kabushiki Kaisha | Semiconductor device including a gate-insulated transistor |
US5211824A (en) * | 1991-10-31 | 1993-05-18 | Siemens Solar Industries L.P. | Method and apparatus for sputtering of a liquid |
US5231047A (en) | 1991-12-19 | 1993-07-27 | Energy Conversion Devices, Inc. | High quality photovoltaic semiconductor material and laser ablation method of fabrication same |
US5261968A (en) | 1992-01-13 | 1993-11-16 | Photon Energy, Inc. | Photovoltaic cell and method |
JPH05243596A (en) | 1992-03-02 | 1993-09-21 | Showa Shell Sekiyu Kk | Manufacture of laminated type solar cell |
WO1993019491A1 (en) * | 1992-03-19 | 1993-09-30 | Siemens Solar Gmbh | Weather-resistant thin layer solar module |
US5248349A (en) | 1992-05-12 | 1993-09-28 | Solar Cells, Inc. | Process for making photovoltaic devices and resultant product |
US5298086A (en) * | 1992-05-15 | 1994-03-29 | United Solar Systems Corporation | Method for the manufacture of improved efficiency tandem photovoltaic device and device manufactured thereby |
DE69304143T2 (en) | 1992-05-19 | 1997-01-30 | Matsushita Electric Ind Co Ltd | Method of making a chalcopyrite type composition |
ES2171415T3 (en) | 1992-06-29 | 2002-09-16 | United Solar Systems Corp | DEPOSITION PROCESS ACTIVATED BY MICROWAVES WITH REGULATION OF SUBSTRATE TEMPERATURE. |
ATE170669T1 (en) * | 1992-06-29 | 1998-09-15 | Canon Kk | RESIN COMPOSITION FOR SEALING AND A SEMICONDUCTOR DEVICE COVERED WITH SEALING RESIN COMPOSITION |
EP0662247B1 (en) * | 1992-09-22 | 1999-03-10 | Siemens Aktiengesellschaft | Process for rapidly generating a chalkopyrite semiconductor on a substrate |
US5474939A (en) | 1992-12-30 | 1995-12-12 | Siemens Solar Industries International | Method of making thin film heterojunction solar cell |
DE4333407C1 (en) | 1993-09-30 | 1994-11-17 | Siemens Ag | Solar cell comprising a chalcopyrite absorber layer |
US5738731A (en) * | 1993-11-19 | 1998-04-14 | Mega Chips Corporation | Photovoltaic device |
ATE194727T1 (en) * | 1993-12-17 | 2000-07-15 | Canon Kk | METHOD OF PRODUCING AN ELECTRON EMITTING DEVICE, AN ELECTRON SOURCE AND AN IMAGE PRODUCING DEVICE |
EP1722403B1 (en) * | 1994-06-15 | 2012-07-25 | Seiko Epson Corporation | Fabrication method for a thin film semiconductor device |
US5578103A (en) | 1994-08-17 | 1996-11-26 | Corning Incorporated | Alkali metal ion migration control |
DE4442824C1 (en) * | 1994-12-01 | 1996-01-25 | Siemens Ag | Solar cell having higher degree of activity |
EP0729189A1 (en) * | 1995-02-21 | 1996-08-28 | Interuniversitair Micro-Elektronica Centrum Vzw | Method of preparing solar cells and products obtained thereof |
US6743723B2 (en) * | 1995-09-14 | 2004-06-01 | Canon Kabushiki Kaisha | Method for fabricating semiconductor device |
US5977476A (en) | 1996-10-16 | 1999-11-02 | United Solar Systems Corporation | High efficiency photovoltaic device |
JP3249407B2 (en) | 1996-10-25 | 2002-01-21 | 昭和シェル石油株式会社 | Thin-film solar cells composed of chalcopyrite-based multi-compound semiconductor thin-film light-absorbing layers |
JP3249408B2 (en) | 1996-10-25 | 2002-01-21 | 昭和シェル石油株式会社 | Method and apparatus for manufacturing thin film light absorbing layer of thin film solar cell |
JP3527815B2 (en) * | 1996-11-08 | 2004-05-17 | 昭和シェル石油株式会社 | Method for producing transparent conductive film of thin film solar cell |
US5985691A (en) | 1997-05-16 | 1999-11-16 | International Solar Electric Technology, Inc. | Method of making compound semiconductor films and making related electronic devices |
JPH1154773A (en) | 1997-08-01 | 1999-02-26 | Canon Inc | Photovoltaic element and its manufacture |
DE19741832A1 (en) * | 1997-09-23 | 1999-03-25 | Inst Solarenergieforschung | Method of manufacturing a solar cell and solar cell |
US6258620B1 (en) | 1997-10-15 | 2001-07-10 | University Of South Florida | Method of manufacturing CIGS photovoltaic devices |
CA2308369C (en) | 1997-11-10 | 2008-03-18 | Don L. Kendall | Quantum ridges and tips |
EP0985510B1 (en) * | 1998-02-05 | 2003-09-24 | Nippon Sheet Glass Co., Ltd. | Article with uneven surface, process for producing the same, and composition therefor |
US6107562A (en) | 1998-03-24 | 2000-08-22 | Matsushita Electric Industrial Co., Ltd. | Semiconductor thin film, method for manufacturing the same, and solar cell using the same |
US6344608B2 (en) | 1998-06-30 | 2002-02-05 | Canon Kabushiki Kaisha | Photovoltaic element |
US6127202A (en) | 1998-07-02 | 2000-10-03 | International Solar Electronic Technology, Inc. | Oxide-based method of making compound semiconductor films and making related electronic devices |
US6451415B1 (en) * | 1998-08-19 | 2002-09-17 | The Trustees Of Princeton University | Organic photosensitive optoelectronic device with an exciton blocking layer |
JP3428931B2 (en) | 1998-09-09 | 2003-07-22 | キヤノン株式会社 | Flat panel display dismantling method |
JP2000150861A (en) | 1998-11-16 | 2000-05-30 | Tdk Corp | Oxide thin film |
JP3667178B2 (en) | 1998-11-24 | 2005-07-06 | キヤノン株式会社 | Method for producing zinc oxide thin film, method for producing photovoltaic element using the same, and photovoltaic element |
JP2000173969A (en) | 1998-12-03 | 2000-06-23 | Canon Inc | Rinsing method and photovoltaic element |
JP2001156321A (en) | 1999-03-09 | 2001-06-08 | Fuji Xerox Co Ltd | Semiconductor device and its manufacturing method |
US6160215A (en) | 1999-03-26 | 2000-12-12 | Curtin; Lawrence F. | Method of making photovoltaic device |
US6307148B1 (en) | 1999-03-29 | 2001-10-23 | Shinko Electric Industries Co., Ltd. | Compound semiconductor solar cell and production method thereof |
US6328871B1 (en) | 1999-08-16 | 2001-12-11 | Applied Materials, Inc. | Barrier layer for electroplating processes |
AU2001240599A1 (en) | 2000-02-07 | 2001-08-14 | Cis Solartechnik Gmbh | Flexible metal substrate for cis solar cells, and method for producing the same |
US7194197B1 (en) * | 2000-03-16 | 2007-03-20 | Global Solar Energy, Inc. | Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer |
US6372538B1 (en) * | 2000-03-16 | 2002-04-16 | University Of Delaware | Fabrication of thin-film, flexible photovoltaic module |
US7414188B2 (en) | 2002-01-25 | 2008-08-19 | Konarka Technologies, Inc. | Co-sensitizers for dye sensitized solar cells |
DE10119407A1 (en) * | 2000-05-12 | 2001-11-15 | Heidelberger Druckmasch Ag | Angle correction device for printing plates has rear clamping device with one axial under-rail, one turning batten on it and at least one circumferentially turning clamping rail |
US6423565B1 (en) | 2000-05-30 | 2002-07-23 | Kurt L. Barth | Apparatus and processes for the massproduction of photovotaic modules |
US7301199B2 (en) * | 2000-08-22 | 2007-11-27 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
EP1314189B1 (en) | 2000-08-22 | 2013-02-27 | President and Fellows of Harvard College | Electrical device comprising doped semiconductor nanowires and method for its production |
JP2002196337A (en) * | 2000-09-06 | 2002-07-12 | Seiko Epson Corp | Manufacturing method and manufacturing apparatus for optoelectronic device and manufacturing method and manufacturing apparatus for liquid crystal panel |
JP2002167695A (en) | 2000-09-19 | 2002-06-11 | Canon Inc | Method for depositing zinc oxide film and method for producing photovolatic element using the film |
US6576112B2 (en) * | 2000-09-19 | 2003-06-10 | Canon Kabushiki Kaisha | Method of forming zinc oxide film and process for producing photovoltaic device using it |
DE10104726A1 (en) | 2001-02-02 | 2002-08-08 | Siemens Solar Gmbh | Process for structuring an oxide layer applied to a carrier material |
JP4827303B2 (en) | 2001-03-12 | 2011-11-30 | キヤノン株式会社 | Photovoltaic element, TFT, and method for forming i-type semiconductor layer |
US6858308B2 (en) * | 2001-03-12 | 2005-02-22 | Canon Kabushiki Kaisha | Semiconductor element, and method of forming silicon-based film |
JP2002299670A (en) | 2001-04-03 | 2002-10-11 | Canon Inc | Silicon-based thin film and photovoltaic element |
US7842882B2 (en) | 2004-03-01 | 2010-11-30 | Basol Bulent M | Low cost and high throughput deposition methods and apparatus for high density semiconductor film growth |
US7053294B2 (en) * | 2001-07-13 | 2006-05-30 | Midwest Research Institute | Thin-film solar cell fabricated on a flexible metallic substrate |
JP4236081B2 (en) | 2001-10-16 | 2009-03-11 | 大日本印刷株式会社 | Method for producing pattern forming body |
EP1443527A4 (en) * | 2001-10-19 | 2007-09-12 | Asahi Glass Co Ltd | Substrate with transparent conductive oxide film and production method therefor, and photoelectric conversion element |
US6635307B2 (en) | 2001-12-12 | 2003-10-21 | Nanotek Instruments, Inc. | Manufacturing method for thin-film solar cells |
US7276749B2 (en) | 2002-02-05 | 2007-10-02 | E-Phocus, Inc. | Image sensor with microcrystalline germanium photodiode layer |
US6690041B2 (en) * | 2002-05-14 | 2004-02-10 | Global Solar Energy, Inc. | Monolithically integrated diodes in thin-film photovoltaic devices |
US7560641B2 (en) | 2002-06-17 | 2009-07-14 | Shalini Menezes | Thin film solar cell configuration and fabrication method |
US6852920B2 (en) | 2002-06-22 | 2005-02-08 | Nanosolar, Inc. | Nano-architected/assembled solar electricity cell |
US7291782B2 (en) * | 2002-06-22 | 2007-11-06 | Nanosolar, Inc. | Optoelectronic device and fabrication method |
WO2004023527A2 (en) * | 2002-09-05 | 2004-03-18 | Nanosys, Inc. | Nanostructure and nanocomposite based compositions and photovoltaic devices |
EP2399970A3 (en) * | 2002-09-05 | 2012-04-18 | Nanosys, Inc. | Nanocomposites |
US6974976B2 (en) * | 2002-09-30 | 2005-12-13 | Miasole | Thin-film solar cells |
US6849798B2 (en) | 2002-12-17 | 2005-02-01 | General Electric Company | Photovoltaic cell using stable Cu2O nanocrystals and conductive polymers |
US6936761B2 (en) | 2003-03-29 | 2005-08-30 | Nanosolar, Inc. | Transparent electrode, optoelectronic apparatus and devices |
US20040252488A1 (en) | 2003-04-01 | 2004-12-16 | Innovalight | Light-emitting ceiling tile |
US7279832B2 (en) | 2003-04-01 | 2007-10-09 | Innovalight, Inc. | Phosphor materials and illumination devices made therefrom |
WO2004090995A1 (en) | 2003-04-09 | 2004-10-21 | Matsushita Electric Industrial Co., Ltd. | Solar cell |
JP2004332043A (en) | 2003-05-07 | 2004-11-25 | Canon Inc | Method and apparatus for forming zinc oxide thin film and method for forming photovoltaic element |
US7462774B2 (en) * | 2003-05-21 | 2008-12-09 | Nanosolar, Inc. | Photovoltaic devices fabricated from insulating nanostructured template |
US7265037B2 (en) | 2003-06-20 | 2007-09-04 | The Regents Of The University Of California | Nanowire array and nanowire solar cells and methods for forming the same |
TWI292225B (en) | 2003-07-14 | 2008-01-01 | Fujikura Ltd | Electrolytic composition, and photoelectric conversion element and dye sensitizing solar battery employing the same |
WO2005034247A1 (en) * | 2003-09-03 | 2005-04-14 | Midwest Research Institute | Zno/cu(inga)se2 solar cells prepared by vapor phase zn doping |
EP1521308A1 (en) * | 2003-10-02 | 2005-04-06 | Scheuten Glasgroep | Ball or grain-shaped semiconductor element to be used in solar cells and method of production; method of production of a solar cell with said semiconductor element and solar cell |
US20070163643A1 (en) | 2004-02-19 | 2007-07-19 | Nanosolar, Inc. | High-throughput printing of chalcogen layer and the use of an inter-metallic material |
US20070169810A1 (en) | 2004-02-19 | 2007-07-26 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor |
US8623448B2 (en) | 2004-02-19 | 2014-01-07 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from chalcogenide microflake particles |
WO2005081324A1 (en) | 2004-02-20 | 2005-09-01 | Sharp Kabushiki Kaisha | Substrate for photoelectric converter, photoelectric converter, and multilayer photoelectric converter |
US7441413B2 (en) | 2004-03-23 | 2008-10-28 | Samsung Electronics Co., Ltd. | Refrigerator and control method thereof |
US7122398B1 (en) | 2004-03-25 | 2006-10-17 | Nanosolar, Inc. | Manufacturing of optoelectronic devices |
JP2005311292A (en) | 2004-03-25 | 2005-11-04 | Kaneka Corp | Substrate for thin film solar cell, manufacturing method therefor, and thin film solar cell using the same |
JP4695850B2 (en) | 2004-04-28 | 2011-06-08 | 本田技研工業株式会社 | Chalcopyrite solar cell |
CA2567930A1 (en) | 2004-06-08 | 2005-12-22 | Nanosys, Inc. | Methods and devices for forming nanostructure monolayers and devices including such monolayers |
TW201341440A (en) * | 2004-06-08 | 2013-10-16 | Sandisk Corp | Post-deposition encapsulation of nanostructures: compositions, devices and systems incorporating same |
CN101432889A (en) * | 2004-06-18 | 2009-05-13 | 超点公司 | Nanostructured materials and photovoltaic devices including nanostructured materials |
DE112005001429T5 (en) * | 2004-06-18 | 2007-04-26 | Innovalight, Inc., St. Paul | Method and apparatus for forming nanoparticles using radio frequency plasmas |
JP2006049768A (en) | 2004-08-09 | 2006-02-16 | Showa Shell Sekiyu Kk | Cis compound semiconductor thin film solar battery and manufacturing method for light absorbing layer of solar battery |
US7750352B2 (en) * | 2004-08-10 | 2010-07-06 | Pinion Technologies, Inc. | Light strips for lighting and backlighting applications |
US7732229B2 (en) | 2004-09-18 | 2010-06-08 | Nanosolar, Inc. | Formation of solar cells with conductive barrier layers and foil substrates |
US7276724B2 (en) | 2005-01-20 | 2007-10-02 | Nanosolar, Inc. | Series interconnected optoelectronic device module assembly |
US20060249202A1 (en) | 2004-09-20 | 2006-11-09 | Seunghyup Yoo | Photovoltaic cell |
EP1809785A2 (en) | 2004-11-10 | 2007-07-25 | Daystar Technologies, Inc. | Vertical production of photovoltaic devices |
WO2006053218A2 (en) * | 2004-11-10 | 2006-05-18 | Daystar Technologies, Inc. | Pressure control system in a photovoltaic substrate deposition |
TW200634170A (en) * | 2004-11-10 | 2006-10-01 | Daystar Technologies Inc | Pressure control system in a photovoltaic substrate deposition apparatus |
EP1817113A1 (en) * | 2004-11-10 | 2007-08-15 | Daystar Technologies, Inc. | Thermal process for creation of an in-situ junction layer in cigs |
JP2008520102A (en) | 2004-11-10 | 2008-06-12 | デイスター テクノロジーズ,インコーポレイティド | Method and photovoltaic device using alkali-containing layer |
WO2006073562A2 (en) | 2004-11-17 | 2006-07-13 | Nanosys, Inc. | Photoactive devices and components with enhanced efficiency |
US20060130890A1 (en) | 2004-12-20 | 2006-06-22 | Palo Alto Research Center Incorporated. | Heterojunction photovoltaic cell |
JP2006179626A (en) | 2004-12-22 | 2006-07-06 | Showa Shell Sekiyu Kk | Cis system thin film solar cell module, and its manufacturing method and separation method |
JP2006183117A (en) * | 2004-12-28 | 2006-07-13 | Showa Shell Sekiyu Kk | METHOD FOR PRODUCING ZnO-BASED TRANSPARENT ELECTROCONDUCTIVE FILM BY USING MOCVD (ORGANO-METAL CHEMICAL VAPOR DEPOSITION) PROCESS |
JP4131965B2 (en) | 2004-12-28 | 2008-08-13 | 昭和シェル石油株式会社 | Method for producing light absorption layer of CIS thin film solar cell |
JP2006186200A (en) | 2004-12-28 | 2006-07-13 | Showa Shell Sekiyu Kk | Precursor film and film formation method therefor |
KR100495925B1 (en) * | 2005-01-12 | 2005-06-17 | (주)인솔라텍 | Optical absorber layers for solar cell and manufacturing method thereof |
JP4801928B2 (en) | 2005-04-25 | 2011-10-26 | 富士フイルム株式会社 | Organic electroluminescence device |
JP4841173B2 (en) * | 2005-05-27 | 2011-12-21 | 昭和シェル石油株式会社 | High resistance buffer layer / window layer continuous film forming method and film forming apparatus for CIS thin film solar cell |
JP3963924B2 (en) | 2005-07-22 | 2007-08-22 | 本田技研工業株式会社 | Chalcopyrite solar cell |
WO2007019188A2 (en) * | 2005-08-05 | 2007-02-15 | First Solar, Inc. | Manufacture of photovoltaic devices |
JP2007123721A (en) | 2005-10-31 | 2007-05-17 | Rohm Co Ltd | Photoelectric transducer and method of manufacturing same |
US7442413B2 (en) | 2005-11-18 | 2008-10-28 | Daystar Technologies, Inc. | Methods and apparatus for treating a work piece with a vaporous element |
DE102005062977B3 (en) | 2005-12-28 | 2007-09-13 | Sulfurcell Solartechnik Gmbh | Method and apparatus for converting metallic precursor layers to chalcopyrite layers of CIGSS solar cells |
US7235736B1 (en) | 2006-03-18 | 2007-06-26 | Solyndra, Inc. | Monolithic integration of cylindrical solar cells |
US9105776B2 (en) | 2006-05-15 | 2015-08-11 | Stion Corporation | Method and structure for thin film photovoltaic materials using semiconductor materials |
US8017860B2 (en) * | 2006-05-15 | 2011-09-13 | Stion Corporation | Method and structure for thin film photovoltaic materials using bulk semiconductor materials |
EP2140482A2 (en) * | 2006-06-12 | 2010-01-06 | Matthew R. Robinson | Thin-film devices fromed from solid particles |
US7879685B2 (en) * | 2006-08-04 | 2011-02-01 | Solyndra, Inc. | System and method for creating electric isolation between layers comprising solar cells |
TW200810167A (en) * | 2006-08-09 | 2008-02-16 | Ind Tech Res Inst | Dye-sensitized solar cell and the method of fabricating thereof |
DE102006041046A1 (en) | 2006-09-01 | 2008-03-06 | Cis Solartechnik Gmbh & Co. Kg | Solar cell, process for the production of solar cells and electrical trace |
US8426722B2 (en) * | 2006-10-24 | 2013-04-23 | Zetta Research and Development LLC—AQT Series | Semiconductor grain and oxide layer for photovoltaic cells |
US8203073B2 (en) | 2006-11-02 | 2012-06-19 | Guardian Industries Corp. | Front electrode for use in photovoltaic device and method of making same |
FR2908406B1 (en) * | 2006-11-14 | 2012-08-24 | Saint Gobain | POROUS LAYER, METHOD FOR MANUFACTURING THE SAME, AND APPLICATIONS THEREOF |
US20080121264A1 (en) * | 2006-11-28 | 2008-05-29 | Industrial Technology Research Institute | Thin film solar module and method of fabricating the same |
TW200849621A (en) * | 2006-12-21 | 2008-12-16 | Helianthos Bv | Method for making solar sub-cells from a solar cell |
EP2115783A2 (en) * | 2007-01-31 | 2009-11-11 | Jeroen K.J. Van Duren | Solar cell absorber layer formed from metal ion precursors |
US20080204696A1 (en) | 2007-02-28 | 2008-08-28 | Tdk Corporation | Method of alignment |
KR100882668B1 (en) * | 2007-07-18 | 2009-02-06 | 삼성모바일디스플레이주식회사 | Organic light emitting display device and method of manufacturing the same |
FR2919429B1 (en) * | 2007-07-27 | 2009-10-09 | Saint Gobain | FRONT PANEL SUBSTRATE OF PHOTOVOLTAIC CELL AND USE OF A SUBSTRATE FOR A FRONT PANEL OF PHOTOVOLTAIC CELL |
JP2009099476A (en) * | 2007-10-19 | 2009-05-07 | Sony Corp | Dye-sensitized photoelectric conversion element and its manufacturing method |
US7998762B1 (en) | 2007-11-14 | 2011-08-16 | Stion Corporation | Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration |
JP2009135337A (en) | 2007-11-30 | 2009-06-18 | Showa Shell Sekiyu Kk | Laminate structure, integrated structure and manufacturing method, of cis-based solar cell |
US8001283B2 (en) | 2008-03-12 | 2011-08-16 | Mips Technologies, Inc. | Efficient, scalable and high performance mechanism for handling IO requests |
US8981211B2 (en) | 2008-03-18 | 2015-03-17 | Zetta Research and Development LLC—AQT Series | Interlayer design for epitaxial growth of semiconductor layers |
US20090235987A1 (en) | 2008-03-24 | 2009-09-24 | Epv Solar, Inc. | Chemical Treatments to Enhance Photovoltaic Performance of CIGS |
EP2291855B1 (en) * | 2008-04-15 | 2018-06-27 | Global Solar Energy, Inc. | Apparatus for manufacturing thin-film solar cells |
JP4384237B2 (en) | 2008-05-19 | 2009-12-16 | 昭和シェル石油株式会社 | CIS type thin film solar cell manufacturing method |
FR2932009B1 (en) | 2008-06-02 | 2010-09-17 | Saint Gobain | PHOTOVOLTAIC CELL AND PHOTOVOLTAIC CELL SUBSTRATE |
US7855089B2 (en) | 2008-09-10 | 2010-12-21 | Stion Corporation | Application specific solar cell and method for manufacture using thin film photovoltaic materials |
US8008111B1 (en) | 2008-09-29 | 2011-08-30 | Stion Corporation | Bulk copper species treatment of thin film photovoltaic cell and manufacturing method |
US8026122B1 (en) | 2008-09-29 | 2011-09-27 | Stion Corporation | Metal species surface treatment of thin film photovoltaic cell and manufacturing method |
US8008112B1 (en) | 2008-09-29 | 2011-08-30 | Stion Corporation | Bulk chloride species treatment of thin film photovoltaic cell and manufacturing method |
US8008110B1 (en) | 2008-09-29 | 2011-08-30 | Stion Corporation | Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method |
US7960204B2 (en) * | 2008-09-30 | 2011-06-14 | Stion Corporation | Method and structure for adhesion of absorber material for thin film photovoltaic cell |
US7910399B1 (en) * | 2008-09-30 | 2011-03-22 | Stion Corporation | Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates |
US8053274B2 (en) * | 2008-09-30 | 2011-11-08 | Stion Corporation | Self cleaning large scale method and furnace system for selenization of thin film photovoltaic materials |
US7863074B2 (en) * | 2008-09-30 | 2011-01-04 | Stion Corporation | Patterning electrode materials free from berm structures for thin film photovoltaic cells |
US20110018103A1 (en) | 2008-10-02 | 2011-01-27 | Stion Corporation | System and method for transferring substrates in large scale processing of cigs and/or cis devices |
US8003430B1 (en) | 2008-10-06 | 2011-08-23 | Stion Corporation | Sulfide species treatment of thin film photovoltaic cell and manufacturing method |
US8168463B2 (en) | 2008-10-17 | 2012-05-01 | Stion Corporation | Zinc oxide film method and structure for CIGS cell |
CN102725859B (en) | 2009-02-04 | 2016-01-27 | 应用材料公司 | Metering and the detection cover group of solar energy production line |
US8197912B2 (en) | 2009-03-12 | 2012-06-12 | International Business Machines Corporation | Precision separation of PV thin film stacks |
US8142521B2 (en) * | 2010-03-29 | 2012-03-27 | Stion Corporation | Large scale MOCVD system for thin film photovoltaic devices |
-
2009
- 2009-11-18 US US12/621,489 patent/US8344243B2/en not_active Expired - Fee Related
- 2009-11-20 DE DE112009002518T patent/DE112009002518T5/en not_active Ceased
- 2009-11-20 CN CN200980144974.4A patent/CN102210026B/en not_active Expired - Fee Related
- 2009-11-20 WO PCT/US2009/065351 patent/WO2010059950A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4332974A (en) * | 1979-06-28 | 1982-06-01 | Chevron Research Company | Multilayer photovoltaic cell |
US5501744A (en) * | 1992-01-13 | 1996-03-26 | Photon Energy, Inc. | Photovoltaic cell having a p-type polycrystalline layer with large crystals |
US5868869A (en) * | 1995-06-07 | 1999-02-09 | Photon Energy, Inc. | Thin film photovoltaic device and process of manufacture |
US20070193623A1 (en) * | 2006-02-22 | 2007-08-23 | Guardian Industries Corp. | Electrode structure for use in electronic device and method of making same |
Also Published As
Publication number | Publication date |
---|---|
US20100122726A1 (en) | 2010-05-20 |
DE112009002518T5 (en) | 2012-06-14 |
US8344243B2 (en) | 2013-01-01 |
CN102210026B (en) | 2014-01-29 |
CN102210026A (en) | 2011-10-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8344243B2 (en) | Method and structure for thin film photovoltaic cell using similar material junction | |
US8198122B2 (en) | Bulk chloride species treatment of thin film photovoltaic cell and manufacturing method | |
US8258000B2 (en) | Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method | |
US7960204B2 (en) | Method and structure for adhesion of absorber material for thin film photovoltaic cell | |
US8193028B2 (en) | Sulfide species treatment of thin film photovoltaic cell and manufacturing method | |
US8211736B2 (en) | Bulk copper species treatment of thin film photovoltaic cell and manufacturing method | |
US8617917B2 (en) | Consumable adhesive layer for thin film photovoltaic material | |
US8026122B1 (en) | Metal species surface treatment of thin film photovoltaic cell and manufacturing method | |
US8889468B2 (en) | Method and structure for thin film tandem photovoltaic cell | |
US8217261B2 (en) | Thin film sodium species barrier method and structure for cigs based thin film photovoltaic cell | |
US8232134B2 (en) | Rapid thermal method and device for thin film tandem cell | |
US20090301562A1 (en) | High efficiency photovoltaic cell and manufacturing method | |
US9087943B2 (en) | High efficiency photovoltaic cell and manufacturing method free of metal disulfide barrier material | |
US8394662B1 (en) | Chloride species surface treatment of thin film photovoltaic cell and manufacturing method | |
US8435826B1 (en) | Bulk sulfide species treatment of thin film photovoltaic cell and manufacturing method | |
US8236597B1 (en) | Bulk metal species treatment of thin film photovoltaic cell and manufacturing method | |
US8476104B1 (en) | Sodium species surface treatment of thin film photovoltaic cell and manufacturing method | |
US8642138B2 (en) | Processing method for cleaning sulfur entities of contact regions | |
US8501521B1 (en) | Copper species surface treatment of thin film photovoltaic cell and manufacturing method | |
US8082672B2 (en) | Mechanical patterning of thin film photovoltaic materials and structure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200980144974.4 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09828295 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1120090025188 Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 09828295 Country of ref document: EP Kind code of ref document: A1 |