WO2010017146A1 - Generator for foam to clean substrate - Google Patents
Generator for foam to clean substrate Download PDFInfo
- Publication number
- WO2010017146A1 WO2010017146A1 PCT/US2009/052609 US2009052609W WO2010017146A1 WO 2010017146 A1 WO2010017146 A1 WO 2010017146A1 US 2009052609 W US2009052609 W US 2009052609W WO 2010017146 A1 WO2010017146 A1 WO 2010017146A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- foam
- hollow cylinder
- fluid
- chamber
- gas
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/235—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids for making foam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/314—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit
- B01F25/3141—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit with additional mixing means other than injector mixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/314—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit
- B01F25/3142—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit the conduit having a plurality of openings in the axial direction or in the circumferential direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/314—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit
- B01F25/3142—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit the conduit having a plurality of openings in the axial direction or in the circumferential direction
- B01F25/31425—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit the conduit having a plurality of openings in the axial direction or in the circumferential direction with a plurality of perforations in the axial and circumferential direction covering the whole surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/434—Mixing tubes comprising cylindrical or conical inserts provided with grooves or protrusions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/434—Mixing tubes comprising cylindrical or conical inserts provided with grooves or protrusions
- B01F25/4341—Mixing tubes comprising cylindrical or conical inserts provided with grooves or protrusions the insert being provided with helical grooves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Dispersion Chemistry (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nozzles (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Accessories For Mixers (AREA)
- Closures For Containers (AREA)
- Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011522146A JP2011530193A (en) | 2008-08-04 | 2009-08-03 | Foam generator for cleaning substrates |
CN200980130763.5A CN102112241B (en) | 2008-08-04 | 2009-08-03 | Generator for foam to clean substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/185,780 US8161984B2 (en) | 2008-08-04 | 2008-08-04 | Generator for foam to clean substrate |
US12/185,780 | 2008-08-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010017146A1 true WO2010017146A1 (en) | 2010-02-11 |
Family
ID=41607080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2009/052609 WO2010017146A1 (en) | 2008-08-04 | 2009-08-03 | Generator for foam to clean substrate |
Country Status (6)
Country | Link |
---|---|
US (2) | US8161984B2 (en) |
JP (1) | JP2011530193A (en) |
KR (1) | KR101652882B1 (en) |
CN (1) | CN102112241B (en) |
TW (1) | TWI402109B (en) |
WO (1) | WO2010017146A1 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8246755B2 (en) * | 2009-11-05 | 2012-08-21 | Lam Research Corporation | In situ morphological characterization of foam for a proximity head |
US9326442B1 (en) * | 2011-02-07 | 2016-05-03 | Shield Industries, Inc. | Side mounted fertilizer knife assembly with interchangeable strip till and low draft points |
US20120247790A1 (en) * | 2011-04-02 | 2012-10-04 | Roger Duane Young | Foam propellant system |
CN104014262B (en) * | 2013-09-11 | 2016-03-02 | 曹结渝 | A kind of passive type agitator and apply the agitating device of this agitator |
US11643946B2 (en) | 2013-10-02 | 2023-05-09 | Aerocore Technologies Llc | Cleaning method for jet engine |
ES2931926T3 (en) | 2013-10-02 | 2023-01-04 | Aerocore Tech Llc | Cleaning method for jet engine |
CN103639082A (en) * | 2013-12-24 | 2014-03-19 | 湖州华祥不锈钢管有限公司 | Gas-liquid mixing sprayer |
KR20160021535A (en) * | 2014-08-18 | 2016-02-26 | 박종하 | Cleaning Apparatus Using Liquid Mixed with Gas |
US11415019B2 (en) | 2015-12-11 | 2022-08-16 | General Electric Company | Meta-stable detergent based foam cleaning system and method for gas turbine engines |
CN106216126B (en) * | 2016-09-11 | 2018-06-19 | 中国计量大学 | Suitable for the effervescent atomizer of shear shinning non-newtonian fluid |
DK179376B1 (en) * | 2016-11-08 | 2018-05-28 | Nilfisk Food As | Compact cleaning device |
CN108236850A (en) * | 2016-12-27 | 2018-07-03 | 黑龙江吉纳森生物工程股份有限公司 | A kind of molten gas mixer of eddy current type and its application |
CN109807102A (en) * | 2019-02-20 | 2019-05-28 | 贵州工程应用技术学院 | A kind of chip flushing integrated apparatus for machining |
CN111760478B (en) * | 2020-07-24 | 2024-03-15 | 中国石油天然气集团有限公司 | Opposite-impact foam generating device and foam generating method |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3926654A (en) * | 1970-04-03 | 1975-12-16 | Agfa Gevaert | Method of preparing a polyphase system |
US5129581A (en) * | 1991-05-01 | 1992-07-14 | Insta-Foam Products, Inc. | Nozzle for mixing and dispensing reduced CFC and non-CFC foams |
US20030150624A1 (en) * | 2000-04-05 | 2003-08-14 | Manfred Rummel | Foam, spray or atomizer nozzle |
US20060283486A1 (en) * | 2005-06-15 | 2006-12-21 | Lam Research Corporation | Method and apparatus for cleaning a substrate using non-newtonian fluids |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3685807A (en) * | 1969-12-03 | 1972-08-22 | Chevron Res | Apparatus for forming foam for use in wells |
US4133773A (en) * | 1977-07-28 | 1979-01-09 | The Dow Chemical Company | Apparatus for making foamed cleaning solutions and method of operation |
EP1083049B1 (en) * | 1999-09-03 | 2006-07-12 | Canon Kabushiki Kaisha | Liquid discharge head, liquid discharging method and liquid discharge apparatus |
US20040261823A1 (en) * | 2003-06-27 | 2004-12-30 | Lam Research Corporation | Method and apparatus for removing a target layer from a substrate using reactive gases |
JP4509122B2 (en) * | 2003-12-23 | 2010-07-21 | ラム リサーチ コーポレーション | Apparatus and method for cleaning a substrate |
WO2006083557A2 (en) * | 2005-02-04 | 2006-08-10 | W.R. Grace & Co.-Conn. | High yield spray application |
-
2008
- 2008-08-04 US US12/185,780 patent/US8161984B2/en active Active
-
2009
- 2009-08-03 CN CN200980130763.5A patent/CN102112241B/en not_active Expired - Fee Related
- 2009-08-03 WO PCT/US2009/052609 patent/WO2010017146A1/en active Application Filing
- 2009-08-03 KR KR1020117002774A patent/KR101652882B1/en active IP Right Grant
- 2009-08-03 JP JP2011522146A patent/JP2011530193A/en not_active Withdrawn
- 2009-08-04 TW TW98126267A patent/TWI402109B/en not_active IP Right Cessation
-
2012
- 2012-04-12 US US13/445,868 patent/US8557051B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3926654A (en) * | 1970-04-03 | 1975-12-16 | Agfa Gevaert | Method of preparing a polyphase system |
US5129581A (en) * | 1991-05-01 | 1992-07-14 | Insta-Foam Products, Inc. | Nozzle for mixing and dispensing reduced CFC and non-CFC foams |
US20030150624A1 (en) * | 2000-04-05 | 2003-08-14 | Manfred Rummel | Foam, spray or atomizer nozzle |
US20060283486A1 (en) * | 2005-06-15 | 2006-12-21 | Lam Research Corporation | Method and apparatus for cleaning a substrate using non-newtonian fluids |
Also Published As
Publication number | Publication date |
---|---|
CN102112241B (en) | 2014-06-04 |
US20100024842A1 (en) | 2010-02-04 |
US8161984B2 (en) | 2012-04-24 |
JP2011530193A (en) | 2011-12-15 |
US20120255618A1 (en) | 2012-10-11 |
US8557051B2 (en) | 2013-10-15 |
KR20110052598A (en) | 2011-05-18 |
TW201018531A (en) | 2010-05-16 |
CN102112241A (en) | 2011-06-29 |
KR101652882B1 (en) | 2016-08-31 |
TWI402109B (en) | 2013-07-21 |
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