WO2009066992A3 - Capacitive sensor - Google Patents

Capacitive sensor Download PDF

Info

Publication number
WO2009066992A3
WO2009066992A3 PCT/MY2008/000158 MY2008000158W WO2009066992A3 WO 2009066992 A3 WO2009066992 A3 WO 2009066992A3 MY 2008000158 W MY2008000158 W MY 2008000158W WO 2009066992 A3 WO2009066992 A3 WO 2009066992A3
Authority
WO
WIPO (PCT)
Prior art keywords
capacitive sensor
moisture content
insulating layers
sensor comprises
measuring moisture
Prior art date
Application number
PCT/MY2008/000158
Other languages
French (fr)
Other versions
WO2009066992A2 (en
Inventor
Agus Santoso Tamsir
Azrif Manut
Dzulindah Muhamad Alias
Suraya Sulaiman
Azlan Zakaria
Original Assignee
Mimos Berhad
Agus Santoso Tamsir
Azrif Manut
Dzulindah Muhamad Alias
Suraya Sulaiman
Azlan Zakaria
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad, Agus Santoso Tamsir, Azrif Manut, Dzulindah Muhamad Alias, Suraya Sulaiman, Azlan Zakaria filed Critical Mimos Berhad
Publication of WO2009066992A2 publication Critical patent/WO2009066992A2/en
Publication of WO2009066992A3 publication Critical patent/WO2009066992A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Abstract

A capacitive sensor comprises of electrodes interdigitated fingers in multiple insulating layers for measuring moisture content.
PCT/MY2008/000158 2007-11-23 2008-11-24 Capacitive sensor WO2009066992A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI20072088 2007-11-23
MYPI20072088A MY164505A (en) 2007-11-23 2007-11-23 Capacitive sensor

Publications (2)

Publication Number Publication Date
WO2009066992A2 WO2009066992A2 (en) 2009-05-28
WO2009066992A3 true WO2009066992A3 (en) 2009-08-20

Family

ID=40668026

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/MY2008/000158 WO2009066992A2 (en) 2007-11-23 2008-11-24 Capacitive sensor

Country Status (2)

Country Link
MY (1) MY164505A (en)
WO (1) WO2009066992A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2336758B1 (en) 2009-12-16 2012-08-29 Nxp B.V. Capacitive sensor
WO2011159480A1 (en) 2010-06-15 2011-12-22 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
MY173650A (en) * 2010-11-15 2020-02-13 Mimos Berhad Humidity sensor and a method for fabricating the same
CN102507669A (en) * 2011-11-18 2012-06-20 中国科学院上海微系统与信息技术研究所 Structure improvement and making method of humidity sensor on basis of polyimide and filler corrosion
CN103207215A (en) * 2012-01-16 2013-07-17 中国科学院上海微系统与信息技术研究所 Improved humidity sensor based on polyimide
WO2014185771A2 (en) * 2013-05-17 2014-11-20 Mimos Berhad A capacitive humidity sensor
EP2988122B1 (en) 2014-08-20 2019-04-24 ams international AG Capacitive sensor
WO2016056887A1 (en) * 2014-10-09 2016-04-14 Mimos Berhad Humidity sensor with nanoporous polyimide membranes and a method of fabrication thereof
EP3037810B1 (en) 2014-12-23 2017-10-25 EM Microelectronic-Marin SA Improved moisture sensor
EP3208610B1 (en) 2016-02-18 2021-05-12 ams AG Sensor arrangement and method for generating measurement signals

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017820A (en) * 1975-07-25 1977-04-12 Illinois Tool Works Inc. Humidity sensor with multiple electrode layers separated by a porous monolithic ceramic dielectric structure
US20020109959A1 (en) * 2001-02-15 2002-08-15 Inao Toyoda Capacitive moisture sensor and fabrication method for capacitive moisture sensor
US20050188764A1 (en) * 2004-02-27 2005-09-01 Denso Corporation Capacitive type humidity sensor
US20060096370A1 (en) * 2004-11-09 2006-05-11 Denso Corporation Capacitive humidity sensor
US7247271B2 (en) * 2003-03-14 2007-07-24 Delphi Technologies, Inc. Compact ceramic sensor for fuel volatility and oxygenate concentration

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017820A (en) * 1975-07-25 1977-04-12 Illinois Tool Works Inc. Humidity sensor with multiple electrode layers separated by a porous monolithic ceramic dielectric structure
US20020109959A1 (en) * 2001-02-15 2002-08-15 Inao Toyoda Capacitive moisture sensor and fabrication method for capacitive moisture sensor
US7247271B2 (en) * 2003-03-14 2007-07-24 Delphi Technologies, Inc. Compact ceramic sensor for fuel volatility and oxygenate concentration
US20050188764A1 (en) * 2004-02-27 2005-09-01 Denso Corporation Capacitive type humidity sensor
US20060096370A1 (en) * 2004-11-09 2006-05-11 Denso Corporation Capacitive humidity sensor

Also Published As

Publication number Publication date
MY164505A (en) 2017-12-29
WO2009066992A2 (en) 2009-05-28

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