WO2009064164A3 - Method for fabricating microneedles and microneedle fabricated from the same - Google Patents

Method for fabricating microneedles and microneedle fabricated from the same Download PDF

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Publication number
WO2009064164A3
WO2009064164A3 PCT/MY2008/000138 MY2008000138W WO2009064164A3 WO 2009064164 A3 WO2009064164 A3 WO 2009064164A3 MY 2008000138 W MY2008000138 W MY 2008000138W WO 2009064164 A3 WO2009064164 A3 WO 2009064164A3
Authority
WO
WIPO (PCT)
Prior art keywords
microneedles
fabricating
same
isotropic
reactive ion
Prior art date
Application number
PCT/MY2008/000138
Other languages
French (fr)
Other versions
WO2009064164A2 (en
Inventor
Muhamad Ramdzan Buyong
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Publication of WO2009064164A2 publication Critical patent/WO2009064164A2/en
Publication of WO2009064164A3 publication Critical patent/WO2009064164A3/en

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/003—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles having a lumen
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0053—Methods for producing microneedles

Abstract

This invention relates to a method of fabricating microneedles using dry etching methods on a silicon based material and more particularly a method of fabricating hollow out-of-plane microneedles which are arranged in a single row of at least two microneedles. The fabrication process comprises of multiple steps involving reactive ion etching (RJE) isotropic and deep reactive ion etching (DRIE) anisotropic processes. The process involved only dry etching and the isotropic process step particularly, includes Plasma Etch.
PCT/MY2008/000138 2007-11-14 2008-11-14 Method for fabricating microneedles and microneedle fabricated from the same WO2009064164A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI20071992A MY157968A (en) 2007-11-14 2007-11-14 Method for fabricating microneedled and microneedle fabricated from the same
MYPI20071992 2007-11-14

Publications (2)

Publication Number Publication Date
WO2009064164A2 WO2009064164A2 (en) 2009-05-22
WO2009064164A3 true WO2009064164A3 (en) 2009-09-24

Family

ID=40639338

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/MY2008/000138 WO2009064164A2 (en) 2007-11-14 2008-11-14 Method for fabricating microneedles and microneedle fabricated from the same

Country Status (2)

Country Link
MY (1) MY157968A (en)
WO (1) WO2009064164A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11963796B1 (en) 2021-06-16 2024-04-23 Biolinq Incorporated Heterogeneous integration of silicon-fabricated solid microneedle sensors and CMOS circuitry

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9933387B1 (en) 2014-09-07 2018-04-03 Biolinq, Inc. Miniaturized sub-nanoampere sensitivity low-noise potentiostat system
US10092207B1 (en) 2016-05-15 2018-10-09 Biolinq, Inc. Tissue-penetrating electrochemical sensor featuring a co-electrodeposited thin film comprised of polymer and bio-recognition element
US11045142B1 (en) 2017-04-29 2021-06-29 Biolinq, Inc. Heterogeneous integration of silicon-fabricated solid microneedle sensors and CMOS circuitry
GB201709668D0 (en) 2017-06-16 2017-08-02 Spts Technologies Ltd Microneedles
CN108751120B (en) * 2018-04-13 2021-03-05 杭州电子科技大学 Preparation method of silicon-based microneedle array patch
KR102373658B1 (en) * 2020-01-31 2022-03-15 한국과학기술연구원 High density neural probes having various forms and methods of manufacturing the same
US11478194B2 (en) 2020-07-29 2022-10-25 Biolinq Incorporated Continuous analyte monitoring system with microneedle array
USD988160S1 (en) 2021-03-16 2023-06-06 Biolinq Incorporated Wearable dermal sensor
CN116113454A (en) 2021-05-08 2023-05-12 比奥林股份有限公司 Continuous analyte monitoring device fault detection based on microneedle arrays
USD1013544S1 (en) 2022-04-29 2024-02-06 Biolinq Incorporated Wearable sensor
USD996999S1 (en) 2021-11-16 2023-08-29 Biolinq Incorporated Wearable sensor
USD1012744S1 (en) 2022-05-16 2024-01-30 Biolinq Incorporated Wearable sensor with illuminated display

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6334856B1 (en) * 1998-06-10 2002-01-01 Georgia Tech Research Corporation Microneedle devices and methods of manufacture and use thereof
US20020193754A1 (en) * 2001-06-13 2002-12-19 Cho Steve T. Microneedles for minimally invasive drug delivery
KR20040074167A (en) * 2003-02-17 2004-08-23 학교법인 포항공과대학교 Method for preparing polymer micro needle array
US6790372B2 (en) * 2000-08-21 2004-09-14 Cleveland Clinic Foundation Microneedle array module and method of fabricating the same
US20040267205A1 (en) * 2001-08-14 2004-12-30 Goran Stemme Micro needles and method of manufacture thereof
US20050171480A1 (en) * 2003-11-21 2005-08-04 The Regents Of The University Of California Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles
US20060030812A1 (en) * 2004-08-05 2006-02-09 Nevenka Golubovic-Liakopoulos System and method for drug delivery and microfluidic applications using microneedles

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6334856B1 (en) * 1998-06-10 2002-01-01 Georgia Tech Research Corporation Microneedle devices and methods of manufacture and use thereof
US6790372B2 (en) * 2000-08-21 2004-09-14 Cleveland Clinic Foundation Microneedle array module and method of fabricating the same
US20020193754A1 (en) * 2001-06-13 2002-12-19 Cho Steve T. Microneedles for minimally invasive drug delivery
US20040267205A1 (en) * 2001-08-14 2004-12-30 Goran Stemme Micro needles and method of manufacture thereof
KR20040074167A (en) * 2003-02-17 2004-08-23 학교법인 포항공과대학교 Method for preparing polymer micro needle array
US20050171480A1 (en) * 2003-11-21 2005-08-04 The Regents Of The University Of California Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles
US20060030812A1 (en) * 2004-08-05 2006-02-09 Nevenka Golubovic-Liakopoulos System and method for drug delivery and microfluidic applications using microneedles

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11963796B1 (en) 2021-06-16 2024-04-23 Biolinq Incorporated Heterogeneous integration of silicon-fabricated solid microneedle sensors and CMOS circuitry

Also Published As

Publication number Publication date
WO2009064164A2 (en) 2009-05-22
MY157968A (en) 2016-08-30

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