WO2009062846A1 - Method and unit for igniting and maintaining a plasma - Google Patents

Method and unit for igniting and maintaining a plasma Download PDF

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Publication number
WO2009062846A1
WO2009062846A1 PCT/EP2008/064621 EP2008064621W WO2009062846A1 WO 2009062846 A1 WO2009062846 A1 WO 2009062846A1 EP 2008064621 W EP2008064621 W EP 2008064621W WO 2009062846 A1 WO2009062846 A1 WO 2009062846A1
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Prior art keywords
plasma
piezoelectric material
vessel
electrodes
gas
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PCT/EP2008/064621
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German (de)
French (fr)
Inventor
Roland Gesche
Horia-Eugen Porteanu
Silvio Kuehn
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Forschungsverbund Berlin E. V.
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Priority to EP08848925A priority Critical patent/EP2223577A1/en
Publication of WO2009062846A1 publication Critical patent/WO2009062846A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H05H1/2481—Generating plasma using acoustic pressure discharges the plasma being activated using piezoelectric actuators

Definitions

  • the invention relates to a method for igniting and maintaining a plasma in a gas space and a corresponding device designed as a resonator.
  • the method and the device are particularly suitable for realizing a plasma light source.
  • Plasma light sources are an important application for gas discharge equipment. They can operate at low pressure or at high pressure.
  • hollow bodies made of glass or quartz are used.
  • the hollow bodies are filled with a gas.
  • the excitation of a gas discharge in the hollow body takes place either by electrodes within the plasma space formed by the hollow body or by externally mounted electrodes.
  • Electrodes within the hollow body are not compatible with all gases.
  • the metal of the electrodes can be attacked by the gas in the plasma chamber.
  • some of the electrode material evaporates over time. Due to this electrode wear such plasma light sources have only a limited life.
  • the metallic electrodes disturb the light guidance.
  • Arrangements are also known in which the plasma chamber has no electrodes.
  • the plasma space from the outer electrodes through a dielectric plasma vessel separated.
  • An example of such a light source is shown in WO 2006/129102 A2.
  • Light sources would be other plasma sources which have hitherto operated with internal electrodes, for example devices for dielectric heating.
  • the invention is based on the object of specifying a method and a device for igniting and maintaining a plasma in a gas space, in particular for realizing a plasma light source, in which the negative influence of the previously existing electrodes is compensated.
  • the plasma generator used is a plasma vessel with at least one cavity which itself consists at least partially of piezoelectric material or in which at least one resonant body made of piezoelectric material protrudes into the at least one cavity, the piezoelectric material being resonantly vibrated by external electrical excitation becomes. These vibrations produce in the cavity or cavities field strengths, which serve to ignite and maintain the plasma.
  • the piezoelectric material can be realized, for example, by a ferroelectric material.
  • the electric polarization can be reversed analogous to ferromagnetic substances by applying a voltage, that is, it creates by the polarity reversal and the mechanical excitation of the material along the piezoelectric excitable body at the same time, a voltage at resonant excitation peak achieved, which may be sufficient to ignite a gas discharge on the surface of this body. This creates an excitation without internal electrodes.
  • the spatially remote outer electrodes on the plasma vessel generate a high field strength directly in the plasma due to the mechanical resonance.
  • the one or more cavities of the plasma vessel are expediently transparent at least at the light exit point (s) if a plasma light source is to be realized.
  • the device according to the invention is constructed as a resonator such that a plasma vessel containing one or more cavities is made at least partially from a piezoelectric material or in each of which at least one cavity projects into a resonator body to be excited piezoelectrically.
  • the cavity or cavities contain the gas to be ionized.
  • Electro-stimulation via electrodes externally attached to the body causes the piezoelectric material to resonate, generating electric field strengths which serve to ignite and maintain a gas discharge, such that the piezoelectric material itself acts as an electrode for the plasma.
  • Ferroelectric materials are suitable because they always have a piezoelectric effect.
  • the cavity in which a plasma is to be excited is directly in communication with a piezoelectric resonance body, which optionally directly from the cavity surrounding the housing part, and the exciting electrodes mounted in any case on the outside of the housing body are to which the voltage of an oscillator is applied, thus the electrodes are no longer disturbing.
  • Suitable materials include various materials with an electric dipole moment, for example, polycrystalline ceramics such as barium titanate or lead zirconate titanate (PZT) in question, recently also lead-free piezoelectric glass ceramics and even plastics.
  • polycrystalline ceramics such as barium titanate or lead zirconate titanate (PZT) in question
  • PZT lead zirconate titanate
  • the plasma vessel may be made entirely of transparent piezoelectric material.
  • the plasma vessel is closed and hollow shaped as a ball or cylinder and is equipped on its outer wall with electrodes.
  • the plasma vessel and a resonator body projecting into it can also both consist of transparent, piezoelectric material and be fabricated together as a hollow body.
  • the plasma vessel can consist of transparent material and have an attachment of piezoelectric material on which the electrodes are arranged. It can not be either transparent piezoelectric resonance body, which is provided with electrodes, protrude into a transparent plasma container.
  • piezoelectric bodies with a plurality of cavities for example piezoelectric foam
  • cavities for example piezoelectric foam
  • These can be ignited by a common electrical vibration excitation or individually excited.
  • the invention will be explained below with reference to an embodiment.
  • the accompanying drawing shows a schematic representation of a plasma resonator according to the invention, for example for the realization of a plasma light source.
  • the plasma resonator consists of a closed housing 1, which forms a cavity 2, in which a rod-shaped sound box 3 protrudes.
  • Housing 1 and resonator 3 are made entirely of a transparent, piezoelectric material, for example, piezoelectric glass ceramic.
  • the sound box 3 is extended outward.
  • On it are two electrodes 4, to which the voltage of an oscillator 5 is guided.
  • the cavity 2 is filled with a gas to be ionized.
  • a gap 6 in which by the piezoelectric effect of the piezoelectric material of which the resonant body 3, as a result of excitation by the oscillator voltage, an electric field is formed in the at sufficient altitude, a plasma discharge is ignited and sustained.
  • the exciting electrodes 4, which are externally mounted on the resonator body 3 and to which the voltage of the oscillator 5 is applied, are thus no longer disturbing the light emanating from the plasma.

Abstract

The invention relates to a method for igniting and maintaining a plasma in a gas chamber and to a corresponding unit configured as a resonator. The method and the unit are particularly suitable for implementing a plasma light source. The invention proposes that a plasma vessel having at least one hollow space filled with the gas to be ionized be used as the plasma generator, said vessel being made at least partially of a piezoelectric material, or at least one resonance body made of a piezoelectric material protruding into the at least one hollow space, wherein the piezoelectric material is resonantly caused to oscillate by exterior electric excitement. A plasma vessel (1) comprising one or more hollow spaces (2) containing the gas to be ionized is at least partially made of a piezoelectric material, or a resonance body (3) made of a piezoelectric material protrudes into at least one hollow space (2) of the plasma vessel (1). Electrodes (4) are attached to the exterior of the piezoelectric material.

Description

VERFAHREN UND EINRICHTUNG ZUR ZÜNDUNG UND AUFRECHTERHALTUNG EINES PLASMASMETHOD AND DEVICE FOR IGNITING AND MAINTAINING A PLASMA
Die Erfindung betrifft ein Verfahren zur Zündung und Aufrechterhaltung eines Plasmas in einem Gasraum und eine entsprechende, als Resonator ausgebildete Einrichtung. Das Verfahren und die Einrichtung sind insbesondere geeignet zur Realisierung einer Plasma-Lichtquelle.The invention relates to a method for igniting and maintaining a plasma in a gas space and a corresponding device designed as a resonator. The method and the device are particularly suitable for realizing a plasma light source.
Plasma-Lichtquellen stellen einen wichtigen Anwendungsbereich für Gasentladungseinrichtungen dar. Sie können bei Niederdruck oder bei Hochdruck betrieben werden. Zur Realisierung solcher Lichtquellen werden Hohlkörper aus Glas oder Quarz verwendet. Die Hohlkörper sind mit einem Gas befüllt. Die Anregung einer Gasentladung in dem Hohlkörper erfolgt entweder durch Elektroden innerhalb des durch den Hohlkörper gebildeten Plasmaraumes oder durch außen angebrachte Elektroden.Plasma light sources are an important application for gas discharge equipment. They can operate at low pressure or at high pressure. For the realization of such light sources hollow bodies made of glass or quartz are used. The hollow bodies are filled with a gas. The excitation of a gas discharge in the hollow body takes place either by electrodes within the plasma space formed by the hollow body or by externally mounted electrodes.
Elektroden innerhalb des Hohlkörpers sind nicht mit allen Gasen verträglich. Das Metall der Elektroden kann von dem Gas im Plasmaraum angegriffen werden. Außerdem verdampft im Laufe der Zeit ein gewisser Teil des Elektrodenmaterials. Aufgrund dieses Elektrodenverschleißes haben solche Plasma-Lichtquellen nur eine begrenzte Lebensdauer. Zusätzlich stören die metallischen Elektroden die Lichtführung.Electrodes within the hollow body are not compatible with all gases. The metal of the electrodes can be attacked by the gas in the plasma chamber. In addition, some of the electrode material evaporates over time. Due to this electrode wear such plasma light sources have only a limited life. In addition, the metallic electrodes disturb the light guidance.
Es sind auch Anordnungen bekannt, bei denen der Plasmaraum keine Elektroden aufweist. Hier ist der Plasmaraum von den äußeren Elektroden durch ein dielektrisches Plasmagefäß getrennt. Ein Beispiel für eine solche Lichtquelle zeigt die WO 2006/129102 A2.Arrangements are also known in which the plasma chamber has no electrodes. Here is the plasma space from the outer electrodes through a dielectric plasma vessel separated. An example of such a light source is shown in WO 2006/129102 A2.
Der Spannungsabfall über die Gefäßwände verringert hierbei die für die Plasmazündung effektiv verfügbare Feldstärke. Daher ist eine höhere Transformation mit höheren Verlusten verbunden. Das heißt, wenn die Elektroden außen angebracht sind, so muss ein zusätzliches Feld zur Kompensation desThe voltage drop across the vessel walls thereby reduces the effective field strength for the plasma ignition. Therefore, a higher transformation is associated with higher losses. That is, if the electrodes are externally mounted, then an additional field for compensation of the
Spannungsabfalls über der Wanddicke aufgebracht werden, was den Wirkungsgrad verschlechtert und den apparativen Aufbau erhöht .Voltage drops are applied over the wall thickness, which deteriorates the efficiency and increases the apparatus design.
Es ist auch bereits bekannt, piezoelektrische Resonanzeffekte zur Erzeugung von Plasmen auszunutzen. Krasik et al . , Ferroelectric Plasma Sources and their Application, IEEE Transactions on Plasma Sciences, Vol. 31., No. 1 (Februar 2003), S. 49-59 zeigt eine Plasmaquelle mit einem tellerförmigen Resonanzkörper und beidseitig aufgebrachten Elektroden, wobei die frontseitige Elektrode ringförmig gestaltet ist. Innerhalb der ringförmigen Elektrode bildet sich bei Anregung des piezoelektrischen Resonanzkörpers mit einer hochfrequenten Spannung ein Plasma aus. Die Anwendung einer solchen Anordnung für eine Gasentladungslampe zeigt beispielsweise US 6 157 145. Auch hier verschleißen die Elektroden bzw. sind für die Lichtführung störend.It is also already known to exploit piezoelectric resonance effects for the generation of plasmas. Krasik et al. , Ferroelectric Plasma Sources and their Application, IEEE Transactions on Plasma Sciences, Vol. 1 (February 2003), pp 49-59 shows a plasma source with a plate-shaped resonant body and electrodes applied on both sides, wherein the front-side electrode is designed annular. Within the annular electrode, when the piezoelectric resonance body is excited with a high-frequency voltage, a plasma is formed. The application of such an arrangement for a gas discharge lamp is shown, for example, in US Pat. No. 6,157,145. Here, too, the electrodes wear out or are disturbing to the light guide.
Weitere Anwendungen für die vorliegende Lösung neben denOther applications for the present solution besides the
Lichtquellen wären andere Plasmaquellen, die bisher mit inneren Elektroden arbeiten, beispielsweise Einrichtungen zur dielektrischen Erwärmung. Der Erfindung liegt die Aufgabe zugrunde, ein Verfahren und eine Einrichtung zur Zündung und Aufrechterhaltung eines Plasmas in einem Gasraum, insbesondere zur Realisierung einer Plasma-Lichtquelle, anzugeben, bei denen der negative Einfluss der bisher vorhandenen Elektroden kompensiert wird.Light sources would be other plasma sources which have hitherto operated with internal electrodes, for example devices for dielectric heating. The invention is based on the object of specifying a method and a device for igniting and maintaining a plasma in a gas space, in particular for realizing a plasma light source, in which the negative influence of the previously existing electrodes is compensated.
Erfindungsgemäß wird die Aufgabe gelöst durch die Merkmale der Ansprüche 1 und 2. Zweckmäßige Ausgestaltungen sind Gegenstand der Unteransprüche.According to the invention the object is achieved by the features of claims 1 and 2. Advantageous embodiments are the subject of the dependent claims.
Danach wird als Plasmaerzeuger ein Plasmagefäß mit mindestens einem Hohlraum verwendet, welches selbst mindestens teilweise aus piezoelektrischem Material besteht oder bei dem mindestens ein aus piezoelektrischem Material bestehender Resonanzkörper in den mindestens einen Hohlraum hineinragt, wobei das piezoelektrische Material durch eine äußere elektrische Anregung resonant in Schwingungen versetzt wird. Diese Schwingungen erzeugen in dem oder den Hohlräumen Feldstärken, die zur Zündung und Aufrechterhaltung des Plasmas dienen.Thereafter, the plasma generator used is a plasma vessel with at least one cavity which itself consists at least partially of piezoelectric material or in which at least one resonant body made of piezoelectric material protrudes into the at least one cavity, the piezoelectric material being resonantly vibrated by external electrical excitation becomes. These vibrations produce in the cavity or cavities field strengths, which serve to ignite and maintain the plasma.
Das piezoelektrische Material kann beispielsweise durch einen ferroelektrischen Stoff realisiert werden. In ferro- elektrischen Stoffen kann die elektrische Polarisation analog zu ferromagnetischen Stoffen durch Anlegen einer Spannung umgepolt werden, das heißt es entsteht durch die Umpolung und die damit vorhandene mechanische Anregung des Materials entlang des gleichzeitig piezoelektrisch erregbaren Körpers eine Spannung, die bei resonanter Anregung einen Höchstwert erreicht, der zur Zündung einer Gasentladung an der Oberfläche dieses Körpers ausreichen kann. Damit entsteht eine Anregung ohne innere Elektroden. Die räumlich entfernten äußeren Elektroden an dem Plasmagefäß erzeugen direkt im Plasma durch die mechanische Resonanz eine hohe Feldstärke.The piezoelectric material can be realized, for example, by a ferroelectric material. In ferroelectric materials, the electric polarization can be reversed analogous to ferromagnetic substances by applying a voltage, that is, it creates by the polarity reversal and the mechanical excitation of the material along the piezoelectric excitable body at the same time, a voltage at resonant excitation peak achieved, which may be sufficient to ignite a gas discharge on the surface of this body. This creates an excitation without internal electrodes. The spatially remote outer electrodes on the plasma vessel generate a high field strength directly in the plasma due to the mechanical resonance.
Der oder die Hohlräume des Plasmagefäßes sind zweckmäßig mindestens an der oder den Lichtaustrittsstellen transparent, wenn eine Plasma-Lichtquelle realisiert werden soll.The one or more cavities of the plasma vessel are expediently transparent at least at the light exit point (s) if a plasma light source is to be realized.
Die erfindungsgemäße Einrichtung ist so als ein Resonator aufgebaut, dass ein Plasmagefäß, das einen oder mehrere Hohlräume enthält, mindestens teilweise aus einem piezoelektrischen Material gefertigt ist oder in den mindestens einen Hohlraum jeweils ein piezoelektrisch anzuregender Resonanzkörper hineinragt. Der oder die Hohlräume enthalten das zu ionisierende Gas. Durch eine elektrische Anregung über außen an dem Körper angebrachte Elektroden wird das piezoelektrische Material in resonante Schwingungen versetzt, wobei elektrische Feldstärken erzeugt werden, die zur Zündung und Aufrechterhaltung einer Gasentladung dienen, so dass das piezoelektrische Material selbst als Elektrode für das Plasma fungiert.The device according to the invention is constructed as a resonator such that a plasma vessel containing one or more cavities is made at least partially from a piezoelectric material or in each of which at least one cavity projects into a resonator body to be excited piezoelectrically. The cavity or cavities contain the gas to be ionized. Electro-stimulation via electrodes externally attached to the body causes the piezoelectric material to resonate, generating electric field strengths which serve to ignite and maintain a gas discharge, such that the piezoelectric material itself acts as an electrode for the plasma.
Ferroelektrische Materialien sind geeignet, weil sie auch immer einen piezoelektrischen Effekt aufweisen.Ferroelectric materials are suitable because they always have a piezoelectric effect.
Dadurch, dass der Hohlraum, in dem ein Plasma angeregt werden soll, unmittelbar mit einem piezoelektrischen Resonanzkörper in Verbindung steht, der gegebenenfalls direkt aus dem den Hohlraum umgebenden Gehäuseteil besteht, und die anregenden Elektroden in jedem Fall außen an dem Gehäusekörper angebracht sind, an die die Spannung eines Oszillators gelegt wird, sind somit die Elektroden nicht mehr störend.Characterized in that the cavity in which a plasma is to be excited, is directly in communication with a piezoelectric resonance body, which optionally directly from the cavity surrounding the housing part, and the exciting electrodes mounted in any case on the outside of the housing body are to which the voltage of an oscillator is applied, thus the electrodes are no longer disturbing.
Als geeignete Materialien kommen verschiedene Stoffe mit einem elektrischen Dipolmoment, zum Beispiel polykristalline Keramiken wie Bariumtitanat oder Blei-Zirkonat-Titanat (PZT) in Frage, neuerdings auch bleifreie piezoelektrische Glaskeramiken und sogar Kunststoffe.Suitable materials include various materials with an electric dipole moment, for example, polycrystalline ceramics such as barium titanate or lead zirconate titanate (PZT) in question, recently also lead-free piezoelectric glass ceramics and even plastics.
Durch eine geeignete Formgebung kann das piezoelektrischeBy a suitable shaping, the piezoelectric
Material außerdem die zur Zündung und zur Aufrechterhaltung des Plasmas notwendige elektrische Impedanztransformation übernehmen .Material also take over the necessary for the ignition and maintenance of the plasma electrical impedance transformation.
Für die Einrichtung sind verschiedene Ausführungsformen möglich. Zum Beispiel kann das Plasmagefäß vollständig aus transparentem piezoelektrischem Material bestehen. Das Plasmagefäß ist geschlossen und hohlförmig als Kugel oder Zylinder gestaltet und ist an seiner Außenwand mit Elektroden ausgestattet.For the device various embodiments are possible. For example, the plasma vessel may be made entirely of transparent piezoelectric material. The plasma vessel is closed and hollow shaped as a ball or cylinder and is equipped on its outer wall with electrodes.
Plasmagefäß und ein in dieses hineinragender Resonanzkörper können auch beide aus transparentem, piezoelektrischem Material bestehen und gemeinsam als Hohlkörper gefertigt sein.The plasma vessel and a resonator body projecting into it can also both consist of transparent, piezoelectric material and be fabricated together as a hollow body.
Kombinationen aus piezoelektrischen mit nicht piezoelektrischen Materialien sind möglich. So kann das Plasmagefäß aus transparentem Material bestehen und eine Anformung aus piezoelektrischem Material aufweisen, an dem die Elektroden angeordnet sind. Es kann auch ein nicht transparenter piezoelektrischer Resonanzkörper, der mit Elektroden versehen ist, in einen transparenten Plasmabehälter hineinragen .Combinations of piezoelectric with non-piezoelectric materials are possible. Thus, the plasma vessel can consist of transparent material and have an attachment of piezoelectric material on which the electrodes are arranged. It can not be either transparent piezoelectric resonance body, which is provided with electrodes, protrude into a transparent plasma container.
Eine vorteilhafte Variante sind Piezokörper mit einer Vielzahl von Hohlräumen (zum Beispiel Piezoschaum) , in denen durch den Piezoeffekt Plasmen erzeugt werden. Diese können durch eine gemeinsame elektrische Schwingungsanregung gezündet oder auch einzeln angeregt werden.An advantageous variant are piezoelectric bodies with a plurality of cavities (for example piezoelectric foam) in which plasmas are produced by the piezo effect. These can be ignited by a common electrical vibration excitation or individually excited.
Die Erfindung soll nachstehend anhand eines Ausführungsbeispiels näher erläutert werden. Die zugehörige Zeichnung zeigt eine Prinzipdarstellung eines erfindungsgemäßen Plasmaresonators, zum Beispiel zur Realisierung einer Plasma-Lichtquelle.The invention will be explained below with reference to an embodiment. The accompanying drawing shows a schematic representation of a plasma resonator according to the invention, for example for the realization of a plasma light source.
Der Plasmaresonator besteht aus einem geschlossenen Gehäuse 1, das einen Hohlraum 2 bildet, in den ein stabförmiger Resonanzkörper 3 hineinragt. Gehäuse 1 und Resonanzkörper 3 bestehen vollständig aus einem transparenten, piezoelektrischen Material, zum Beispiel piezoelektrischer Glaskeramik. Der Resonanzkörper 3 ist nach außen verlängert. An ihm befinden sich zwei Elektroden 4, an die die Spannung eines Oszillators 5 geführt wird. Der Hohlraum 2 ist mit einem zu ionisierenden Gas gefüllt.The plasma resonator consists of a closed housing 1, which forms a cavity 2, in which a rod-shaped sound box 3 protrudes. Housing 1 and resonator 3 are made entirely of a transparent, piezoelectric material, for example, piezoelectric glass ceramic. The sound box 3 is extended outward. On it are two electrodes 4, to which the voltage of an oscillator 5 is guided. The cavity 2 is filled with a gas to be ionized.
Im Hohlraum 2 bildet sich zwischen Resonanzkörper 3 und der Innenwand des Gehäuses 1 ein Spalt 6, in welchem durch den piezoelektrischen Effekt des piezoelektrischen Materials, aus dem der Resonanzkörper 3 besteht, infolge einer Anregung durch die Oszillatorspannung ein elektrisches Feld entsteht, in dem bei genügender Höhe eine Plasmaentladung gezündet und aufrechterhalten wird.In the cavity 2 is formed between the resonant body 3 and the inner wall of the housing 1, a gap 6 in which by the piezoelectric effect of the piezoelectric material of which the resonant body 3, as a result of excitation by the oscillator voltage, an electric field is formed in the at sufficient altitude, a plasma discharge is ignited and sustained.
Die anregenden Elektroden 4, die außen am Resonanzkörper 3 angebracht sind und an die die Spannung des Oszillators 5 gelegt wird, sind somit nicht mehr störend für das von dem Plasma ausgehende Licht. The exciting electrodes 4, which are externally mounted on the resonator body 3 and to which the voltage of the oscillator 5 is applied, are thus no longer disturbing the light emanating from the plasma.
Liste der BezugszeichenList of reference numbers
1 Gehäuse1 housing
2 Hohlraum2 cavity
3 Resonanzstab3 resonant bar
4 Elektroden4 electrodes
5 Oszillator5 oscillator
6 Spalt 6 gap

Claims

Patentansprüche claims
1. Verfahren zur Zündung und Aufrechterhaltung eines Plasmas in einem Gasraum, dadurch gekennzeichnet, dass als Plasmaerzeuger ein Plasmagefäß mit mindestens einem mit dem zu ionisierenden Gas gefüllten Hohlraum verwendet wird, welches selbst mindestens teilweise aus piezoelektrischem Material besteht oder bei dem mindestens ein aus piezoelektrischem Material bestehender Resonanzkörper in den mindestens einen Hohlraum hineinragt, wobei das piezoelektrische Material durch eine äußere elektrische Anregung resonant in Schwingungen versetzt wird.1. A method for igniting and maintaining a plasma in a gas space, characterized in that a plasma vessel with at least one filled with the gas to be ionized cavity is used as the plasma generator, which itself consists at least partially of piezoelectric material or at least one of piezoelectric material Existing resonant body protrudes into the at least one cavity, wherein the piezoelectric material is resonantly vibrated by an external electrical excitation.
2. Einrichtung zur Zündung und Aufrechterhaltung eines Plasmas in einem Gasraum mittels eines Resonators zur Realisierung des Verfahrens nach Anspruch 1, dadurch gekennzeichnet, dass ein Plasmagefäß (1), das einen oder mehrere Hohlräume (2) enthält, die das zu ionisierende Gas enthalten, mindestens teilweise aus einem piezoelektrischen Material gefertigt ist oder bei dem mindestens ein aus piezoelektrischem Material bestehender Resonanzkörper (3) in den mindestens einen Hohlraum (2) des Plasmagefäßes (1) hineinragt und außen an dem piezoelektrischen Material Elektroden (4) angebracht sind.2. A device for igniting and maintaining a plasma in a gas space by means of a resonator for implementing the method according to claim 1, characterized in that a plasma vessel (1) containing one or more cavities (2) containing the gas to be ionized, at least partially made of a piezoelectric material or in which at least one of piezoelectric material existing resonant body (3) protrudes into the at least one cavity (2) of the plasma vessel (1) and externally attached to the piezoelectric material electrodes (4).
3. Einrichtung nach Anspruch 2, dadurch gekennzeichnet, dass das Plasmagefäß (1) mindestens teilweise aus transparentem Material besteht. 3. Device according to claim 2, characterized in that the plasma vessel (1) consists at least partially of transparent material.
4. Einrichtung nach Anspruch 2, dadurch gekennzeichnet, dass ein nicht transparenter, piezoelektrischer Resonanzkörper (3) in ein transparentes Plasmagefäß (1) hineinragt.4. Device according to claim 2, characterized in that a non-transparent, piezoelectric resonance body (3) projects into a transparent plasma vessel (1).
5. Einrichtung nach Anspruch 2, , dadurch gekennzeichnet, dass das Plasmagefäß aus Piezoschaum besteht. 5. Device according to claim 2, characterized in that the plasma vessel consists of piezo foam.
PCT/EP2008/064621 2007-11-14 2008-10-28 Method and unit for igniting and maintaining a plasma WO2009062846A1 (en)

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