WO2009002788A3 - Indication of the end-point reaction between xef2 and molybdenum - Google Patents

Indication of the end-point reaction between xef2 and molybdenum Download PDF

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Publication number
WO2009002788A3
WO2009002788A3 PCT/US2008/067401 US2008067401W WO2009002788A3 WO 2009002788 A3 WO2009002788 A3 WO 2009002788A3 US 2008067401 W US2008067401 W US 2008067401W WO 2009002788 A3 WO2009002788 A3 WO 2009002788A3
Authority
WO
WIPO (PCT)
Prior art keywords
xef2
molybdenum
indication
point reaction
reaction
Prior art date
Application number
PCT/US2008/067401
Other languages
French (fr)
Other versions
WO2009002788A2 (en
Inventor
Marjorio Rafanan
Original Assignee
Qualcomm Mems Technologies Inc
Marjorio Rafanan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc, Marjorio Rafanan filed Critical Qualcomm Mems Technologies Inc
Publication of WO2009002788A2 publication Critical patent/WO2009002788A2/en
Publication of WO2009002788A3 publication Critical patent/WO2009002788A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/00468—Releasing structures
    • B81C1/00476—Releasing structures removing a sacrificial layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00777—Preserve existing structures from alteration, e.g. temporary protection during manufacturing
    • B81C1/00785—Avoid chemical alteration, e.g. contamination, oxidation or unwanted etching
    • B81C1/00801—Avoid alteration of functional structures by etching, e.g. using a passivation layer or an etch stop layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0055—Manufacturing logistics
    • B81C99/0065—Process control; Yield prediction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/0138—Monitoring physical parameters in the etching chamber, e.g. pressure, temperature or gas composition

Abstract

Embodiments of the present invention relate to methods and systems for making a microelectromechanical system comprising supplying an etchant to etch one or more sacrificial structures of the system.
PCT/US2008/067401 2007-06-22 2008-06-18 Indication of the end-point reaction between xef2 and molybdenum WO2009002788A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/767,430 2007-06-22
US11/767,430 US7569488B2 (en) 2007-06-22 2007-06-22 Methods of making a MEMS device by monitoring a process parameter

Publications (2)

Publication Number Publication Date
WO2009002788A2 WO2009002788A2 (en) 2008-12-31
WO2009002788A3 true WO2009002788A3 (en) 2009-04-16

Family

ID=40136902

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/067401 WO2009002788A2 (en) 2007-06-22 2008-06-18 Indication of the end-point reaction between xef2 and molybdenum

Country Status (3)

Country Link
US (1) US7569488B2 (en)
TW (1) TW200909340A (en)
WO (1) WO2009002788A2 (en)

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