WO2008142784A1 - インプリント装置 - Google Patents

インプリント装置 Download PDF

Info

Publication number
WO2008142784A1
WO2008142784A1 PCT/JP2007/060497 JP2007060497W WO2008142784A1 WO 2008142784 A1 WO2008142784 A1 WO 2008142784A1 JP 2007060497 W JP2007060497 W JP 2007060497W WO 2008142784 A1 WO2008142784 A1 WO 2008142784A1
Authority
WO
WIPO (PCT)
Prior art keywords
mold
substrate
holding
holding portion
plane
Prior art date
Application number
PCT/JP2007/060497
Other languages
English (en)
French (fr)
Inventor
Kazunobu Hashimoto
Tetsuya Imai
Original Assignee
Pioneer Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corporation filed Critical Pioneer Corporation
Priority to US12/601,392 priority Critical patent/US20100166906A1/en
Priority to PCT/JP2007/060497 priority patent/WO2008142784A1/ja
Priority to JP2009515052A priority patent/JPWO2008142784A1/ja
Publication of WO2008142784A1 publication Critical patent/WO2008142784A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning
    • B29C2033/426—Stampers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0003—Discharging moulded articles from the mould
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2017/00—Carriers for sound or information
    • B29L2017/001—Carriers of records containing fine grooves or impressions, e.g. disc records for needle playback, cylinder records
    • B29L2017/003—Records or discs

Abstract

　表面に凹凸パターンが形成されたモールドと、前記モールドと転写層を有する被転写基板とを密着させて加圧して前記転写層に前記凹凸パターン形状を転写する加圧ピストンとを含むインプリント装置であり、モールドを保持するモールド保持面を有するモールド保持部と、被転写基板を保持し且つモールド保持面に対向する基板保持面を有する基板保持部と、モールド保持部と基板保持部とを近接離間可能に支持する支持部とを含む。加圧ピストンは、モールド保持面および基板保持面に対して交差する方向に可動であり、加圧時においてモールド保持部または基板保持部の一方と当接し得る加圧面と、後退時においてモールド保持部または基板保持部の一方と係合し得る複数の係合部とを有する。
PCT/JP2007/060497 2007-05-23 2007-05-23 インプリント装置 WO2008142784A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/601,392 US20100166906A1 (en) 2007-05-23 2007-05-23 Inprint equipment
PCT/JP2007/060497 WO2008142784A1 (ja) 2007-05-23 2007-05-23 インプリント装置
JP2009515052A JPWO2008142784A1 (ja) 2007-05-23 2007-05-23 インプリント装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/060497 WO2008142784A1 (ja) 2007-05-23 2007-05-23 インプリント装置

Publications (1)

Publication Number Publication Date
WO2008142784A1 true WO2008142784A1 (ja) 2008-11-27

Family

ID=40031511

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/060497 WO2008142784A1 (ja) 2007-05-23 2007-05-23 インプリント装置

Country Status (3)

Country Link
US (1) US20100166906A1 (ja)
JP (1) JPWO2008142784A1 (ja)
WO (1) WO2008142784A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010082297A1 (ja) * 2009-01-13 2010-07-22 パイオニア株式会社 転写装置
WO2010086983A1 (ja) * 2009-01-29 2010-08-05 パイオニア株式会社 転写装置
US8113813B2 (en) * 2009-02-03 2012-02-14 Sony Corporation Optical shaping apparatus and shaping base
EP2548712A4 (en) * 2010-03-15 2017-11-08 Toshiba Kikai Kabushiki Kaisha Transfer device

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101255285B1 (ko) * 2009-12-18 2013-04-15 엘지디스플레이 주식회사 평판 표시 소자의 제조 장치 및 방법
KR100978612B1 (ko) * 2010-05-25 2010-08-27 (주)아이에스티 코리아 자동 평행 조정 스크레이퍼 가공 장치
JP5445695B2 (ja) * 2010-12-27 2014-03-19 日産自動車株式会社 半導体モジュール、モールド装置及びモールド成形方法
JP5661666B2 (ja) * 2012-02-29 2015-01-28 株式会社東芝 パターン形成装置及び半導体装置の製造方法
JP5263440B1 (ja) * 2012-11-05 2013-08-14 オムロン株式会社 転写成形方法、及び、転写成形装置
US9962863B2 (en) * 2013-01-03 2018-05-08 Elwha Llc Nanoimprint lithography
US9561603B2 (en) 2013-01-03 2017-02-07 Elwha, Llc Nanoimprint lithography
DE102015108327A1 (de) * 2015-05-27 2016-12-01 Technische Universität Darmstadt Vorrichtung und Verfahren zum Erzeugen einer Abformung einer Oberflächeneigenschaft
CN106094429B (zh) * 2016-08-19 2019-11-05 京东方科技集团股份有限公司 压印装置及其工作方法
CN115629520A (zh) 2016-09-05 2023-01-20 Ev 集团 E·索尔纳有限责任公司 用于压印微和/或纳米结构的设备和方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10277790A (ja) * 1997-04-10 1998-10-20 Toyota Motor Corp 加熱圧縮成形用金型
JP2006245071A (ja) * 2005-02-28 2006-09-14 Canon Inc 転写装置および転写方法
JP2007118552A (ja) * 2005-10-25 2007-05-17 Ind Technol Res Inst 離型装置と方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW570290U (en) * 2003-05-02 2004-01-01 Ind Tech Res Inst Uniform pressing device for nanometer transfer-print
KR100558754B1 (ko) * 2004-02-24 2006-03-10 한국기계연구원 Ｕｖ 나노임프린트 리소그래피 공정 및 이 공정을수행하는 장치
KR101289337B1 (ko) * 2007-08-29 2013-07-29 시게이트 테크놀로지 엘엘씨 양면 임프린트 리소그래피 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10277790A (ja) * 1997-04-10 1998-10-20 Toyota Motor Corp 加熱圧縮成形用金型
JP2006245071A (ja) * 2005-02-28 2006-09-14 Canon Inc 転写装置および転写方法
JP2007118552A (ja) * 2005-10-25 2007-05-17 Ind Technol Res Inst 離型装置と方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010082297A1 (ja) * 2009-01-13 2010-07-22 パイオニア株式会社 転写装置
JP4756106B2 (ja) * 2009-01-13 2011-08-24 パイオニア株式会社 転写装置
WO2010086983A1 (ja) * 2009-01-29 2010-08-05 パイオニア株式会社 転写装置
US8113813B2 (en) * 2009-02-03 2012-02-14 Sony Corporation Optical shaping apparatus and shaping base
EP2548712A4 (en) * 2010-03-15 2017-11-08 Toshiba Kikai Kabushiki Kaisha Transfer device

Also Published As

Publication number Publication date
US20100166906A1 (en) 2010-07-01
JPWO2008142784A1 (ja) 2010-08-05

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