WO2007027997A3 - Electromechanical dynamic force profile articulating mechanism - Google Patents

Electromechanical dynamic force profile articulating mechanism Download PDF

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Publication number
WO2007027997A3
WO2007027997A3 PCT/US2006/034193 US2006034193W WO2007027997A3 WO 2007027997 A3 WO2007027997 A3 WO 2007027997A3 US 2006034193 W US2006034193 W US 2006034193W WO 2007027997 A3 WO2007027997 A3 WO 2007027997A3
Authority
WO
WIPO (PCT)
Prior art keywords
rigid
membrane
force profile
mems
behavior
Prior art date
Application number
PCT/US2006/034193
Other languages
French (fr)
Other versions
WO2007027997A2 (en
Inventor
Martin G Selbrede
Carey King
Ostrand Dan Van
Original Assignee
Uni Pixel Displays Inc
Martin G Selbrede
Carey King
Ostrand Dan Van
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uni Pixel Displays Inc, Martin G Selbrede, Carey King, Ostrand Dan Van filed Critical Uni Pixel Displays Inc
Priority to MX2008002486A priority Critical patent/MX2008002486A/en
Priority to JP2008529299A priority patent/JP2009507257A/en
Priority to EP06814060A priority patent/EP1920288B1/en
Priority to CA002619978A priority patent/CA2619978A1/en
Publication of WO2007027997A2 publication Critical patent/WO2007027997A2/en
Publication of WO2007027997A3 publication Critical patent/WO2007027997A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Abstract

An electromechanical dynamic force profile articulating mechanism for recovering or emulating true parallel plate capacitor actuation behaviors from deformable membranes used in MEMS systems. The curved deformation of flexible membranes causes their MEMS behavior to deviate from known interactions between rigid plates that maintain geometric parallelism during ponderomotive actuation. The present invention teaches three methods for reacquiring parallel plate behavior: superaddition or in situ integration of a rigid region within or upon the deformable MEMS membrane; creation of isodyne regions to secure parallelism by altering the force profile upon the membrane by introducing tuned and shaped voids within the conductive region associated with the membrane; and a hybrid composite approach wherein the conductive region is deposited after deposition of a raised rigid zone, thereby emulating isodyne behavior due to the increased inter-conductor distance in the vicinity of the rigid zone, in conjunction with rigidity benefits stemming directly from said zone.
PCT/US2006/034193 2005-08-30 2006-08-30 Electromechanical dynamic force profile articulating mechanism WO2007027997A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
MX2008002486A MX2008002486A (en) 2005-08-30 2006-08-30 Electromechanical dynamic force profile articulating mechanism.
JP2008529299A JP2009507257A (en) 2005-08-30 2006-08-30 Electromechanical dynamic force profile type articulation mechanism
EP06814060A EP1920288B1 (en) 2005-08-30 2006-08-30 Electromechanical dynamic force profile articulating mechanism
CA002619978A CA2619978A1 (en) 2005-08-30 2006-08-30 Electromechanical dynamic force profile articulating mechanism

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/215,514 2005-08-30
US11/215,514 US7449759B2 (en) 2005-08-30 2005-08-30 Electromechanical dynamic force profile articulating mechanism

Publications (2)

Publication Number Publication Date
WO2007027997A2 WO2007027997A2 (en) 2007-03-08
WO2007027997A3 true WO2007027997A3 (en) 2007-12-06

Family

ID=37803692

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/034193 WO2007027997A2 (en) 2005-08-30 2006-08-30 Electromechanical dynamic force profile articulating mechanism

Country Status (9)

Country Link
US (4) US7449759B2 (en)
EP (1) EP1920288B1 (en)
JP (1) JP2009507257A (en)
KR (1) KR20080049744A (en)
CN (1) CN101253438A (en)
CA (1) CA2619978A1 (en)
MX (1) MX2008002486A (en)
TW (1) TW200730873A (en)
WO (1) WO2007027997A2 (en)

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US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
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Also Published As

Publication number Publication date
EP1920288A2 (en) 2008-05-14
CN101253438A (en) 2008-08-27
EP1920288A4 (en) 2010-03-03
WO2007027997A2 (en) 2007-03-08
KR20080049744A (en) 2008-06-04
US20080158637A1 (en) 2008-07-03
MX2008002486A (en) 2008-04-03
TW200730873A (en) 2007-08-16
US20080212158A1 (en) 2008-09-04
CA2619978A1 (en) 2007-03-08
US20110063706A1 (en) 2011-03-17
US20070047051A1 (en) 2007-03-01
US7817332B2 (en) 2010-10-19
EP1920288B1 (en) 2012-11-21
US7449759B2 (en) 2008-11-11
JP2009507257A (en) 2009-02-19
US7535611B2 (en) 2009-05-19

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