WO2006132862A3 - Opto-acoustic apparatus for acoustic imaging - Google Patents

Opto-acoustic apparatus for acoustic imaging Download PDF

Info

Publication number
WO2006132862A3
WO2006132862A3 PCT/US2006/020952 US2006020952W WO2006132862A3 WO 2006132862 A3 WO2006132862 A3 WO 2006132862A3 US 2006020952 W US2006020952 W US 2006020952W WO 2006132862 A3 WO2006132862 A3 WO 2006132862A3
Authority
WO
WIPO (PCT)
Prior art keywords
opto
acoustic
sound waves
pulsed
layer
Prior art date
Application number
PCT/US2006/020952
Other languages
French (fr)
Other versions
WO2006132862A2 (en
Inventor
Humphrey J Maris
Arto V Nurmikko
Original Assignee
Univ Brown
Humphrey J Maris
Arto V Nurmikko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/274,628 external-priority patent/US20060272418A1/en
Application filed by Univ Brown, Humphrey J Maris, Arto V Nurmikko filed Critical Univ Brown
Priority to US11/921,635 priority Critical patent/US8567253B2/en
Publication of WO2006132862A2 publication Critical patent/WO2006132862A2/en
Publication of WO2006132862A3 publication Critical patent/WO2006132862A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/07—Analysing solids by measuring propagation velocity or propagation time of acoustic waves
    • G01N29/075—Analysing solids by measuring propagation velocity or propagation time of acoustic waves by measuring or comparing phase angle
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0093—Detecting, measuring or recording by applying one single type of energy and measuring its conversion into another type of energy
    • A61B5/0097—Detecting, measuring or recording by applying one single type of energy and measuring its conversion into another type of energy by applying acoustic waves and detecting light, i.e. acoustooptic measurements
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/11—Analysing solids by measuring attenuation of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/221—Arrangements for directing or focusing the acoustical waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02827—Elastic parameters, strength or force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Abstract

The present invention utilizes sound waves generated by an opto-acoustical process for imaging purposes A scanning acoustic microscope includes an opto-acoustic transducer assembly (10) having a substrate (12) and a layer of opto-acoustic material (14) fo on the substrate (12) When pulsed light waves impinge the layer of opto-acoustic material (14), pulsed sound waves are created A acoustic lens (16) also formed in the substrate (12) focuses the pulsed sound waves which are then used to probe the sample (22) Pulsed sound waves reflecting off the sample (22) return to the opto-acoustic transducer (10) where the pulsed sound waves impinge layer of opto-acoustic material (14) and change at least one optical property of the layer (14) This change, which is dependent on changes to the sound waves caused by the interaction of the sound waves and the sample object (22), is then sensed using pulsed light waves (17).
PCT/US2006/020952 2005-06-03 2006-05-30 Opto-acoustic apparatus for acoustic imaging WO2006132862A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US11/921,635 US8567253B2 (en) 2005-06-03 2006-05-30 Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US68707005P 2005-06-03 2005-06-03
US60/687,070 2005-06-03
US11/274,628 US20060272418A1 (en) 2005-06-03 2005-11-14 Opto-acoustic methods and apparatus for perfoming high resolution acoustic imaging and other sample probing and modification operations
US11/274,628 2005-11-14
US11/324,866 US7624640B2 (en) 2005-06-03 2006-01-04 Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations
US11/324,866 2006-01-04

Publications (2)

Publication Number Publication Date
WO2006132862A2 WO2006132862A2 (en) 2006-12-14
WO2006132862A3 true WO2006132862A3 (en) 2009-05-07

Family

ID=37498917

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/020952 WO2006132862A2 (en) 2005-06-03 2006-05-30 Opto-acoustic apparatus for acoustic imaging

Country Status (2)

Country Link
US (1) US7624640B2 (en)
WO (1) WO2006132862A2 (en)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6517532B1 (en) 1997-05-15 2003-02-11 Palomar Medical Technologies, Inc. Light energy delivery head
US8182473B2 (en) 1999-01-08 2012-05-22 Palomar Medical Technologies Cooling system for a photocosmetic device
AU7568698A (en) 1997-05-15 1998-12-08 General Hospital Corporation, The Method and apparatus for dermatology treatment
DE69926348T2 (en) 1998-03-12 2006-06-01 Palomar Medical Technologies, Inc., Burlington SYSTEM FOR THE ELECTROMAGNETIC IRRADIATION OF THE SKIN
JP2005535370A (en) 2002-06-19 2005-11-24 パロマー・メディカル・テクノロジーズ・インコーポレイテッド Method and apparatus for treating skin and subcutaneous conditions
EP1555948A2 (en) 2002-10-23 2005-07-27 Palomar Medical Technologies, Inc. Phototreatment device for use with coolants and topical substances
FR2871902B1 (en) * 2004-06-17 2006-09-22 Centre Nat Rech Scient Cnrse METHOD AND INSTALLATION OF ACOUSTO-OPTICAL IMAGING
US7856985B2 (en) 2005-04-22 2010-12-28 Cynosure, Inc. Method of treatment body tissue using a non-uniform laser beam
US20060272418A1 (en) * 2005-06-03 2006-12-07 Brown University Opto-acoustic methods and apparatus for perfoming high resolution acoustic imaging and other sample probing and modification operations
US20070060808A1 (en) 2005-09-12 2007-03-15 Carine Hoarau Medical sensor for reducing motion artifacts and technique for using the same
BRPI0616167A2 (en) 2005-09-15 2011-06-07 Palomar Medical Tech Inc optical skin characterization device
US7586957B2 (en) 2006-08-02 2009-09-08 Cynosure, Inc Picosecond laser apparatus and methods for its operation and use
WO2008097527A1 (en) 2007-02-05 2008-08-14 Brown University Enhanced ultra-high resolution acoustic microscope
JP5055385B2 (en) * 2007-02-28 2012-10-24 ルドルフテクノロジーズ インコーポレイテッド Characterization of metal parts of samples that may be subjected to erosion using picosecond ultrasound
GB2461909A (en) * 2008-07-17 2010-01-20 South Bank Univ Entpr Ltd Sound absorbing device
US8426933B2 (en) * 2008-08-08 2013-04-23 Araz Yacoubian Broad spectral band sensor
US9919168B2 (en) 2009-07-23 2018-03-20 Palomar Medical Technologies, Inc. Method for improvement of cellulite appearance
US8376955B2 (en) 2009-09-29 2013-02-19 Covidien Lp Spectroscopic method and system for assessing tissue temperature
CN101852774B (en) * 2010-05-14 2012-10-24 西安金波检测仪器有限责任公司 Flaw detection system and flaw detection method
WO2012054171A2 (en) 2010-10-20 2012-04-26 Sonix, Inc. Method and apparatus for adjusting the level of a response signal from an ultrasound transducer
WO2012125649A2 (en) * 2011-03-14 2012-09-20 Lawrence Livermore National Security, Llc Non-contact optical system for detecting ultrasound waves from a surface
KR101607559B1 (en) 2011-11-18 2016-04-11 소닉스, 인코퍼레이티드 Method and apparatus for signal path equalization in a scanning acoustic microscope
EP2806803B1 (en) * 2012-01-23 2019-03-13 Tomowave Laboratories, Inc. Laser optoacoustic ultrasonic imaging system (louis) and methods of use
KR102183581B1 (en) 2012-04-18 2020-11-27 싸이노슈어, 엘엘씨 Picosecond laser apparatus and methods for treating target tissues with same
JP2014066701A (en) * 2012-09-04 2014-04-17 Canon Inc Specimen information acquisition apparatus
EP3751684A1 (en) 2013-03-15 2020-12-16 Cynosure, Inc. Picosecond optical radiation systems and methods of use
US9885691B1 (en) 2013-10-08 2018-02-06 Nanometronix LLC Nanoindenter ultrasonic probe tip and force control
US10371668B2 (en) * 2014-07-11 2019-08-06 Vanderbilt University Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation
FR3054380B1 (en) * 2016-07-20 2018-09-07 Universite de Bordeaux SYSTEM AND METHOD FOR RESONANT ACOUSTIC SPECTROMETRY
WO2018187742A1 (en) * 2017-04-06 2018-10-11 Arizona Board Of Regents On Behalf Of The University Of Arizona Systems and methods for a quantum-analogue computer
US11927891B2 (en) * 2018-01-26 2024-03-12 Asml Netherlands B.V. Apparatus and methods for determining the position of a target structure on a substrate
FR3077891B1 (en) * 2018-02-12 2021-08-27 Centre Nat Rech Scient SOUND PARAMETRIC OSCILLATOR
WO2019165426A1 (en) 2018-02-26 2019-08-29 Cynosure, Inc. Q-switched cavity dumped sub-nanosecond laser
EP3620105B1 (en) * 2018-09-04 2022-04-27 iThera Medical GmbH System and method for optoacoustic imaging of an object
CN109142788A (en) * 2018-09-20 2019-01-04 东南大学 A kind of high-precision ray machine accelerometer based on the coupling of hemisphere micro-nano chamber mechanical optics
NL2024739B1 (en) * 2020-01-23 2021-09-09 Univ Delft Tech Ultrasonic subsurface imaging microscopy device and method
RU2746492C1 (en) * 2020-04-17 2021-04-14 Автономная некоммерческая образовательная организация высшего образования Сколковский институт науки и технологий Optoacoustic sensor based on structural optical fiber
CN112350682B (en) * 2020-11-12 2024-03-26 厦门市三安集成电路有限公司 Bonding method and bonding structure of acoustic surface filter
US11835546B1 (en) 2021-08-04 2023-12-05 Nanometronix LLC Characterization of nanoindented and scratch induced accoustic events
US11346857B1 (en) 2021-08-04 2022-05-31 Nanometronix LLC Characterization of nanoindentation induced acoustic events
WO2023065064A1 (en) * 2021-10-18 2023-04-27 Fudan University Photoacoustic tweezers
CN114146890B (en) * 2021-12-03 2022-09-13 深圳先进技术研究院 Ultrasonic sound control method and sound tweezers device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4909082A (en) * 1987-02-02 1990-03-20 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducer for acoustic microscopy
US4938216A (en) * 1988-06-21 1990-07-03 Massachusetts Institute Of Technology Mechanically scanned line-focus ultrasound hyperthermia system
US5457997A (en) * 1991-11-22 1995-10-17 Doryokuro Kakunenryo Kaihatsu Jigyodan Laser ultrasonic detection method and apparatus therefor
US5999847A (en) * 1997-10-21 1999-12-07 Elstrom; John A. Apparatus and method for delivery of surgical and therapeutic agents
US20010055435A1 (en) * 2000-08-02 2001-12-27 Elena Biagi Opto-acoustic generator of ultrasound waves from laser energy supplied via optical fiber
US6491685B2 (en) * 1999-03-04 2002-12-10 The Regents Of The University Of California Laser and acoustic lens for lithotripsy

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4137991A (en) * 1976-11-23 1979-02-06 International Business Machines Corporation Clamped acoustic elastic wave generator
US4267732A (en) * 1978-11-29 1981-05-19 Stanford University Board Of Trustees Acoustic microscope and method
US4269067A (en) * 1979-05-18 1981-05-26 International Business Machines Corporation Method and apparatus for focusing elastic waves converted from thermal energy
US4430897A (en) * 1981-05-14 1984-02-14 The Board Of Trustees Of The Leland Stanford University Acoustic microscope and method
US4710030A (en) * 1985-05-17 1987-12-01 Bw Brown University Research Foundation Optical generator and detector of stress pulses
JP2834173B2 (en) * 1989-02-17 1998-12-09 株式会社日立製作所 Scanning tunnel acoustic microscope
US5706094A (en) * 1995-08-25 1998-01-06 Brown University Research Foundation Ultrafast optical technique for the characterization of altered materials
US5748318A (en) * 1996-01-23 1998-05-05 Brown University Research Foundation Optical stress generator and detector
US6321601B1 (en) * 1996-08-06 2001-11-27 Brown University Research Foundation Optical method for the characterization of laterally-patterned samples in integrated circuits
US5615675A (en) * 1996-04-19 1997-04-01 Regents Of The University Of Michigan Method and system for 3-D acoustic microscopy using short pulse excitation and 3-D acoustic microscope for use therein
US5844684A (en) * 1997-02-28 1998-12-01 Brown University Research Foundation Optical method for determining the mechanical properties of a material
US5748317A (en) * 1997-01-21 1998-05-05 Brown University Research Foundation Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector
US5864393A (en) * 1997-07-30 1999-01-26 Brown University Research Foundation Optical method for the determination of stress in thin films
US6025918A (en) * 1998-07-07 2000-02-15 Brown University Research Foundation Apparatus and method for measurement of the mechanical properties and electromigration of thin films
US6038026A (en) * 1998-07-07 2000-03-14 Brown University Research Foundation Apparatus and method for the determination of grain size in thin films
US6317216B1 (en) * 1999-12-13 2001-11-13 Brown University Research Foundation Optical method for the determination of grain orientation in films

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4909082A (en) * 1987-02-02 1990-03-20 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducer for acoustic microscopy
US4938216A (en) * 1988-06-21 1990-07-03 Massachusetts Institute Of Technology Mechanically scanned line-focus ultrasound hyperthermia system
US5457997A (en) * 1991-11-22 1995-10-17 Doryokuro Kakunenryo Kaihatsu Jigyodan Laser ultrasonic detection method and apparatus therefor
US5999847A (en) * 1997-10-21 1999-12-07 Elstrom; John A. Apparatus and method for delivery of surgical and therapeutic agents
US6491685B2 (en) * 1999-03-04 2002-12-10 The Regents Of The University Of California Laser and acoustic lens for lithotripsy
US20010055435A1 (en) * 2000-08-02 2001-12-27 Elena Biagi Opto-acoustic generator of ultrasound waves from laser energy supplied via optical fiber

Also Published As

Publication number Publication date
US7624640B2 (en) 2009-12-01
WO2006132862A2 (en) 2006-12-14
US20060272419A1 (en) 2006-12-07

Similar Documents

Publication Publication Date Title
WO2006132862A3 (en) Opto-acoustic apparatus for acoustic imaging
US7357029B2 (en) Thermal-acoustic scanning systems and methods
Fischer Optical microphone hears ultrasound
Hall et al. Integrated optical interferometric detection method for micromachined capacitive acoustic transducers
EP1228501B1 (en) System and method for ultrasonic laser testing using a laser source to generate ultrasound having a tunable wavelength
CN107421635B (en) Device for detecting sound waves
WO2006083917A3 (en) Laser scanning interferometric surface metrology
TW200801497A (en) Method and apparatus for inspecting a pattern
WO2004046307A3 (en) Scanning of biological samples
WO2009055705A3 (en) Confocal photoacoustic microscopy with optical lateral resolution
WO2007079342A3 (en) Method of analyzing a remotely-located object utilizing an optical technique to detect terahertz radiation
WO2007117377A2 (en) Method and apparatus for remote sensing of molecular species at nanoscale utilizing a reverse photoacoustic effect
JPH02243956A (en) Method and device for opto-acoustic signal detection and method for detecting semiconductor element internal defect
WO2008039656A3 (en) Sensor for measuring a vibrating surface obscured from view
ATE329240T1 (en) ULTRASONIC GAS LEAK DETECTOR WITH A DEVICE FOR DETECTOR EXAMINATION
EP1835783A2 (en) An optical audio microphone arrangement
JP2008544269A (en) Method and apparatus for measuring structural properties by wavelength effect in a photoacoustic system
WO2002054139A3 (en) Lcc device inspection module
US9709437B2 (en) System and method for detecting a defect in a structure member
Antoncecchi et al. High-resolution microscopy through optically opaque media using ultrafast photoacoustics
JP5248443B2 (en) Ultrasonic microscope
WO2007003952A3 (en) Method and apparatus for non contact scanning acoustic microscopy
Grégoire et al. Nonlinear photothermal and photoacoustic processes for crack detection
JP5555910B2 (en) Photoacoustic measurement system
Kaniak et al. Enhanced non-contact ultrasonic testing using an air-coupled optical microphone

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06771620

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 11921635

Country of ref document: US