WO2006125131A3 - Analyzing low-coherence interferometry signals for thin film structures - Google Patents

Analyzing low-coherence interferometry signals for thin film structures Download PDF

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Publication number
WO2006125131A3
WO2006125131A3 PCT/US2006/019350 US2006019350W WO2006125131A3 WO 2006125131 A3 WO2006125131 A3 WO 2006125131A3 US 2006019350 W US2006019350 W US 2006019350W WO 2006125131 A3 WO2006125131 A3 WO 2006125131A3
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WO
WIPO (PCT)
Prior art keywords
thin film
interferometry signal
scanning
model function
scanning interferometry
Prior art date
Application number
PCT/US2006/019350
Other languages
French (fr)
Other versions
WO2006125131A2 (en
Inventor
Groot Peter De
Original Assignee
Zygo Corp
Groot Peter De
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp, Groot Peter De filed Critical Zygo Corp
Priority to JP2008512524A priority Critical patent/JP4885212B2/en
Priority to ES06760145T priority patent/ES2749378T3/en
Priority to EP06760145.0A priority patent/EP1883781B1/en
Priority to KR1020077029677A priority patent/KR101054786B1/en
Publication of WO2006125131A2 publication Critical patent/WO2006125131A2/en
Publication of WO2006125131A3 publication Critical patent/WO2006125131A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02087—Combining two or more images of the same region
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02088—Matching signals with a database
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method

Abstract

Methods and systems are disclosed for analyzing a scanning interferometry signal. Steps include: providing a scanning interferometry signal produced by a scanning interferometer for a first location of a test object (e.g., a sample having a thin film); providing a model function of the scanning interferometry signal produced by the scanning interferometer, wherein the model function is parametrized by one or more parameter values; fitting the model function to the scanning interferometry signal for each of a series of shifts in scan position between the model function and the scanning interferometry signal by varying the parameter values; and determining information about the test object (e.g., a surface height or height profile, and/or a thickness or thickness profile for a thin film in the test object) at the first location based on the fitting.
PCT/US2006/019350 2005-05-19 2006-05-18 Analyzing low-coherence interferometry signals for thin film structures WO2006125131A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008512524A JP4885212B2 (en) 2005-05-19 2006-05-18 Method and system for analyzing low coherence interferometer signals for information about thin film structures
ES06760145T ES2749378T3 (en) 2005-05-19 2006-05-18 Low coherence interferometry signal analysis for thin film structures
EP06760145.0A EP1883781B1 (en) 2005-05-19 2006-05-18 Analyzing low-coherence interferometry signals for thin film structures
KR1020077029677A KR101054786B1 (en) 2005-05-19 2006-05-18 Methods and systems for analyzing low coherence interferometric signals for information about thin film structures

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US68274205P 2005-05-19 2005-05-19
US60/682,742 2005-05-19

Publications (2)

Publication Number Publication Date
WO2006125131A2 WO2006125131A2 (en) 2006-11-23
WO2006125131A3 true WO2006125131A3 (en) 2007-05-03

Family

ID=37432162

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/019350 WO2006125131A2 (en) 2005-05-19 2006-05-18 Analyzing low-coherence interferometry signals for thin film structures

Country Status (7)

Country Link
US (2) US7321431B2 (en)
EP (1) EP1883781B1 (en)
JP (1) JP4885212B2 (en)
KR (1) KR101054786B1 (en)
ES (1) ES2749378T3 (en)
TW (1) TWI394930B (en)
WO (1) WO2006125131A2 (en)

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Also Published As

Publication number Publication date
US20080221837A1 (en) 2008-09-11
US20060262321A1 (en) 2006-11-23
KR101054786B1 (en) 2011-08-05
ES2749378T3 (en) 2020-03-20
TWI394930B (en) 2013-05-01
KR20080015018A (en) 2008-02-15
EP1883781A4 (en) 2014-01-01
JP4885212B2 (en) 2012-02-29
US7321431B2 (en) 2008-01-22
EP1883781A2 (en) 2008-02-06
JP2008545957A (en) 2008-12-18
WO2006125131A2 (en) 2006-11-23
US7564566B2 (en) 2009-07-21
TW200700694A (en) 2007-01-01
EP1883781B1 (en) 2019-08-07

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