WO2006119249A3 - Aerogels and methods of using the same for chemical mechanical planarization and for extracting metal ions - Google Patents

Aerogels and methods of using the same for chemical mechanical planarization and for extracting metal ions Download PDF

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Publication number
WO2006119249A3
WO2006119249A3 PCT/US2006/016740 US2006016740W WO2006119249A3 WO 2006119249 A3 WO2006119249 A3 WO 2006119249A3 US 2006016740 W US2006016740 W US 2006016740W WO 2006119249 A3 WO2006119249 A3 WO 2006119249A3
Authority
WO
WIPO (PCT)
Prior art keywords
metal ions
chemical mechanical
mechanical planarization
aerogels
methods
Prior art date
Application number
PCT/US2006/016740
Other languages
French (fr)
Other versions
WO2006119249A2 (en
Inventor
William M Risen Jr
Marissa Anne Caldwell
Chunhua Yao
Xipeng Liu
Original Assignee
Univ Brown
William M Risen Jr
Marissa Anne Caldwell
Chunhua Yao
Xipeng Liu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Brown, William M Risen Jr, Marissa Anne Caldwell, Chunhua Yao, Xipeng Liu filed Critical Univ Brown
Publication of WO2006119249A2 publication Critical patent/WO2006119249A2/en
Publication of WO2006119249A3 publication Critical patent/WO2006119249A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28014—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their form
    • B01J20/28047—Gels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
    • B01J20/103—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate comprising silica
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/32—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating
    • B01J20/3202—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating characterised by the carrier, support or substrate used for impregnation or coating
    • B01J20/3204—Inorganic carriers, supports or substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/32—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating
    • B01J20/3231—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating characterised by the coating or impregnating layer
    • B01J20/3242—Layers with a functional group, e.g. an affinity material, a ligand, a reactant or a complexing group
    • B01J20/3268—Macromolecular compounds
    • B01J20/3272—Polymers obtained by reactions otherwise than involving only carbon to carbon unsaturated bonds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/32—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating
    • B01J20/3231—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating characterised by the coating or impregnating layer
    • B01J20/3242—Layers with a functional group, e.g. an affinity material, a ligand, a reactant or a complexing group
    • B01J20/3268—Macromolecular compounds
    • B01J20/3272—Polymers obtained by reactions otherwise than involving only carbon to carbon unsaturated bonds
    • B01J20/3274—Proteins, nucleic acids, polysaccharides, antibodies or antigens
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/32—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating
    • B01J20/3231—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating characterised by the coating or impregnating layer
    • B01J20/3242—Layers with a functional group, e.g. an affinity material, a ligand, a reactant or a complexing group
    • B01J20/3268—Macromolecular compounds
    • B01J20/3276—Copolymers

Abstract

Methods for extracting or removing metal ions from a solution or system of interest include employing aerogels comprising (i) silica, and (ii) a polymer comprising at least one functional group capable of coordinating or binding a metal ion. Methods for removing or extracting metal ions from a system include providing compositions providing such aerogels, adding such compositions to a system that includes a metal to be removed therefrom, allowing the aerogel to reside in the system for a period of time sufficient to coordinate or bind metal ions, and removing the aerogel from the system. Also disclosed are chemical mechanical planarization compositions comprising an oxidizing agent and an aerogel comprising silica and a polymer having at least one functional group capable of coordinating metal ions, and is a chemical mechanical planarization process employing such chemical mechanical planarization compositions.
PCT/US2006/016740 2005-04-29 2006-05-01 Aerogels and methods of using the same for chemical mechanical planarization and for extracting metal ions WO2006119249A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US67599105P 2005-04-29 2005-04-29
US60/675,991 2005-04-29

Publications (2)

Publication Number Publication Date
WO2006119249A2 WO2006119249A2 (en) 2006-11-09
WO2006119249A3 true WO2006119249A3 (en) 2006-12-14

Family

ID=37308605

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/016740 WO2006119249A2 (en) 2005-04-29 2006-05-01 Aerogels and methods of using the same for chemical mechanical planarization and for extracting metal ions

Country Status (1)

Country Link
WO (1) WO2006119249A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3801286A4 (en) * 2018-06-07 2022-03-16 University of Cincinnati Methods and devices for hydrogel- and aerogel-based sample pretreatment
US11326076B2 (en) 2019-01-25 2022-05-10 Versum Materials Us, Llc Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with low abrasive concentration and a combination of chemical additives
CN113363383B (en) * 2021-05-31 2023-03-24 兰州大学 Resistive layer material, memristor and preparation method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6592776B1 (en) * 1997-07-28 2003-07-15 Cabot Microelectronics Corporation Polishing composition for metal CMP

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6592776B1 (en) * 1997-07-28 2003-07-15 Cabot Microelectronics Corporation Polishing composition for metal CMP
US6767476B2 (en) * 1997-07-28 2004-07-27 Cabot Microelectronics Corporation Polishing composition for metal CMP

Also Published As

Publication number Publication date
WO2006119249A2 (en) 2006-11-09

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